Hybrid carbon nanotube-silicon complementary metal oxide semiconductor circuits

I. Meric; V. Caruso; R. Caldwell; J. Hone; K. L. Shepard; S. J. Wind

doi:10.1116/1.2800322

Hybrid carbon nanotube-silicon complementary metal oxide semiconductor circuits

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2800322 ◽

2007 ◽

Vol 25 (6) ◽

pp. 2577 ◽

Cited By ~ 5

Author(s):

I. Meric ◽

V. Caruso ◽

R. Caldwell ◽

J. Hone ◽

K. L. Shepard ◽

...

Keyword(s):

Carbon Nanotube ◽

Metal Oxide ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Circuits ◽

Hybrid Carbon

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Radiation-Hard and Repairable Complementary Metal–Oxide–Semiconductor Circuits Integrating n-type Indium Oxide and p-type Carbon Nanotube Field-Effect Transistors

ACS Applied Materials & Interfaces ◽

10.1021/acsami.0c12539 ◽

2020 ◽

Vol 12 (44) ◽

pp. 49963-49970

Author(s):

Manman Luo ◽

Maguang Zhu ◽

Miaomiao Wei ◽

Shuangshuang Shao ◽

Malo Robin ◽

...

Keyword(s):

Carbon Nanotube ◽

Metal Oxide ◽

Field Effect ◽

Field Effect Transistors ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Circuits ◽

P Type ◽

Radiation Hard

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Air-stable n-type transistors based on assembled aligned carbon nanotube arrays and their application in complementary metal-oxide-semiconductor electronics

Nano Research ◽

10.1007/s12274-021-3567-9 ◽

2021 ◽

Author(s):

Zhen Li ◽

Katherine R. Jinkins ◽

Dingzhou Cui ◽

Mingrui Chen ◽

Zhiyuan Zhao ◽

...

Keyword(s):

Carbon Nanotube ◽

Metal Oxide ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Nanotube Arrays ◽

Carbon Nanotube Arrays ◽

Semiconductor Electronics

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Deep‐Submicrometer Complementary Metal‐Oxide‐Semiconductor Transistors Based on Carbon Nanotube Films

Advanced Electronic Materials ◽

10.1002/aelm.202100751 ◽

2021 ◽

pp. 2100751

Author(s):

Huiwen Shi ◽

Li Ding ◽

Donglai Zhong ◽

Lian‐Mao Peng ◽

Zhiyong Zhang

Keyword(s):

Carbon Nanotube ◽

Metal Oxide ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Deep Submicrometer ◽

Nanotube Films

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Characterization of High-Performance Polycrystalline Silicon Complementary Metal–Oxide–Semiconductor Circuits

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.51 ◽

2007 ◽

Vol 46 (1) ◽

pp. 51-55 ◽

Cited By ~ 16

Author(s):

Genshiro Kawachi ◽

Yoshiaki Nakazaki ◽

Hiroyuki Ogawa ◽

Masayuki Jyumonji ◽

Noritaka Akita ◽

...

Keyword(s):

Metal Oxide ◽

Polycrystalline Silicon ◽

High Performance ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Circuits

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n-Channel Metal–Oxide–Semiconductor Field-Effect Transistor Modeling in Forward Body Bias Condition for Low Voltage Complementary Metal–Oxide–Semiconductor Circuits Design

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.044301 ◽

2012 ◽

Vol 51 ◽

pp. 044301 ◽

Cited By ~ 1

Author(s):

Hitoshi Aoki ◽

Akira Matsuzawa

Keyword(s):

Metal Oxide ◽

Field Effect Transistor ◽

Low Voltage ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Effect Transistor ◽

Semiconductor Circuits ◽

Forward Body Bias ◽

Bias Condition

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Development of silicon electrode enhanced by carbon nanotube and gold nanoparticle composites on silicon neural probe fabricated with complementary metal-oxide-semiconductor process

Applied Physics Letters ◽

10.1063/1.4875961 ◽

2014 ◽

Vol 104 (19) ◽

pp. 193105 ◽

Cited By ~ 12

Author(s):

Songsong Zhang ◽

Wei Mong Tsang ◽

Merugu Srinivas ◽

Tao Sun ◽

Navab Singh ◽

...

Keyword(s):

Carbon Nanotube ◽

Metal Oxide ◽

Gold Nanoparticle ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Neural Probe ◽

Nanoparticle Composites ◽

Semiconductor Process

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Combining and matching optical, electron-beam, and x-ray lithographies in the fabrication of Si complementary metal–oxide–semiconductor circuits with 0.1 and sub-0.1 μm features

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588257 ◽

1995 ◽

Vol 13 (6) ◽

pp. 2741 ◽

Cited By ~ 5

Author(s):

Isabel Y. Yang

Keyword(s):

Electron Beam ◽

Metal Oxide ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

X Ray ◽

Optical Electron ◽

Semiconductor Circuits

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n-Channel Metal–Oxide–Semiconductor Field-Effect Transistor Modeling in Forward Body Bias Condition for Low Voltage Complementary Metal–Oxide–Semiconductor Circuits Design

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.044301 ◽

2012 ◽

Vol 51 (4R) ◽

pp. 044301

Author(s):

Hitoshi Aoki ◽

Akira Matsuzawa

Keyword(s):

Metal Oxide ◽

Field Effect Transistor ◽

Low Voltage ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Effect Transistor ◽

Semiconductor Circuits ◽

Forward Body Bias ◽

Bias Condition

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Characterization of near-terahertz complementary metal-oxide semiconductor circuits using a Fourier-transform interferometer

Review of Scientific Instruments ◽

10.1063/1.3647223 ◽

2011 ◽

Vol 82 (10) ◽

pp. 103106 ◽

Cited By ~ 2

Author(s):

D. J. Arenas ◽

Dongha Shim ◽

D. I. Koukis ◽

Eunyoung Seok ◽

D. B. Tanner ◽

...

Keyword(s):

Fourier Transform ◽

Metal Oxide ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor ◽

Semiconductor Circuits

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DNA-decorated carbon-nanotube-based chemical sensors on complementary metal oxide semiconductor circuitry

Nanotechnology ◽

10.1088/0957-4484/21/9/095504 ◽

2010 ◽

Vol 21 (9) ◽

pp. 095504 ◽

Cited By ~ 20

Author(s):

Chia-Ling Chen ◽

Chih-Feng Yang ◽

Vinay Agarwal ◽

Taehoon Kim ◽

Sameer Sonkusale ◽

...

Keyword(s):

Carbon Nanotube ◽

Metal Oxide ◽

Chemical Sensors ◽

Complementary Metal Oxide Semiconductor ◽

Metal Oxide Semiconductor ◽

Oxide Semiconductor

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