Precise patterning of SiO[sub 2]-based glass by low-temperature nanoimprint lithography assisted by UV irradiation on both faces using Glasia® as a precursor

Author(s):  
Motoki Okinaka ◽  
Hiroshi Tsushima ◽  
Yoshifumi Ichinose ◽  
Emi Watanabe ◽  
Keiichi Yanagisawa ◽  
...  
Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 338 ◽  
Author(s):  
Lucio Bonaccorsi ◽  
Angela Malara ◽  
Andrea Donato ◽  
Nicola Donato ◽  
Salvatore Gianluca Leonardi ◽  
...  

In this study, UV irradiation was used to improve the response of indium oxide (In2O3) used as a CO sensing material for a resistive sensor operating in a low temperature range, from 25 °C to 150 °C. Different experimental conditions have been compared, varying UV irradiation mode and sensor operating temperature. Results demonstrated that operating the sensor under continuous UV radiation did not improve the response to target gas. The most advantageous condition was obtained when the UV LED irradiated the sensor in regeneration and was turned off during CO detection. In this operating mode, the semiconductor layer showed an apparent “p-type” behavior due to the UV irradiation. Overall, the effect was an improvement of the indium oxide response at 100 °C toward low CO concentrations (from 1 to 10 ppm) that showed higher results than in the dark, which is promising to extend the detection of CO with an In2O3-based sensor in the sub-ppm range.


2013 ◽  
Vol 3 (10) ◽  
pp. 1292-1298 ◽  
Author(s):  
Valerio Zardetto ◽  
Francesco Di Giacomo ◽  
Diana Garcia-Alonso ◽  
Wytze Keuning ◽  
Mariadriana Creatore ◽  
...  

MRS Advances ◽  
2017 ◽  
Vol 2 (43) ◽  
pp. 2315-2325 ◽  
Author(s):  
Lin Song ◽  
Volker Körstgens ◽  
David Magerl ◽  
Bo Su ◽  
Thomas Fröschl ◽  
...  

ABSTRACTMesoporous titania films are prepared via the polymer-template assisted sol-gel synthesis at low temperatures, using the titania precursor ethylene glycol-modified titanate (EGMT) and the diblock copolymer polystyrene-block-polyethyleneoxide (PS-b-PEO). UV-irradiation is chosen as a low temperature technique to remove the polymer template and thereby to obtain titania sponge-like nanostructures at processing temperatures below 100 °C. After different UV irradiation times, ranging for 0 h to 24 h, the surface and inner morphologies of the titania films are studied with scanning electron microscopy (SEM) and grazing incidence small-angle x-ray scattering (GISAXS), respectively. The evolution of the band gap energies is investigated using ultraviolet/visible (UV/Vis) spectroscopy. The findings reveal that 12 h UV-treatment is sufficient to remove the polymer template from the titania/PS-b-PEO composite films with a thickness of 80 nm, and the determined bad gap energies indicate an incomplete crystallization of the titania nanostructures.


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