Reproducible reflection high energy electron diffraction signatures for improvement of AlN using in situ growth regime characterization

2007 ◽  
Vol 25 (3) ◽  
pp. 1009 ◽  
Author(s):  
Shawn D. Burnham ◽  
Gon Namkoong ◽  
Kyoung-Keun Lee ◽  
W. Alan Doolittle
Keyword(s):  
Electron Diffraction ◽  
High Energy ◽  
Energy Electron ◽  
In Situ Growth ◽  
High Energy Electron ◽  
Growth Regime

Temperature-gradient epitaxy under in situ growth mode diagnostics by scanning reflection high-energy electron diffraction

2002 ◽  
Vol 80 (4) ◽  
pp. 565-567 ◽  
Author(s):  
T. Koida ◽  
D. Komiyama ◽  
H. Koinuma ◽  
M. Ohtani ◽  
M. Lippmaa ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Temperature Gradient ◽  
High Energy ◽  
Energy Electron ◽  
Growth Mode ◽  
In Situ Growth ◽  
High Energy Electron
Sign in / Sign up

Export Citation Format

Share Document