Temperature-gradient epitaxy under in situ growth mode diagnostics by scanning reflection high-energy electron diffraction

T. Koida; D. Komiyama; H. Koinuma; M. Ohtani; M. Lippmaa; M. Kawasaki

doi:10.1063/1.1445483

Temperature-gradient epitaxy under in situ growth mode diagnostics by scanning reflection high-energy electron diffraction

Applied Physics Letters ◽

10.1063/1.1445483 ◽

2002 ◽

Vol 80 (4) ◽

pp. 565-567 ◽

Cited By ~ 45

Author(s):

T. Koida ◽

D. Komiyama ◽

H. Koinuma ◽

M. Ohtani ◽

M. Lippmaa ◽

...

Keyword(s):

Electron Diffraction ◽

Temperature Gradient ◽

High Energy ◽

Energy Electron ◽

Growth Mode ◽

In Situ Growth ◽

High Energy Electron

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In situ growth regime characterization of cubic GaN using reflection high energy electron diffraction

Applied Physics Letters ◽

10.1063/1.2432293 ◽

2007 ◽

Vol 90 (4) ◽

pp. 041918 ◽

Cited By ~ 51

Author(s):

J. Schörmann ◽

S. Potthast ◽

D. J. As ◽

K. Lischka

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

In Situ Growth ◽

High Energy Electron ◽

Growth Regime ◽

Cubic Gan

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Reproducible reflection high energy electron diffraction signatures for improvement of AlN using in situ growth regime characterization

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2737435 ◽

2007 ◽

Vol 25 (3) ◽

pp. 1009 ◽

Cited By ~ 22

Author(s):

Shawn D. Burnham ◽

Gon Namkoong ◽

Kyoung-Keun Lee ◽

W. Alan Doolittle

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

In Situ Growth ◽

High Energy Electron ◽

Growth Regime

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In situ growth regime characterization of AlN using reflection high energy electron diffraction

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2219757 ◽

2006 ◽

Vol 24 (4) ◽

pp. 2100 ◽

Cited By ~ 18

Author(s):

Shawn D. Burnham ◽

W. Alan Doolittle

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

In Situ Growth ◽

High Energy Electron ◽

Growth Regime

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In-situ characterization of II/VI molecular beam epitaxy growth using reflection high-energy electron diffraction oscillations

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91270-x ◽

1994 ◽

Vol 137 (1-2) ◽

pp. 187-194 ◽

Cited By ~ 12

Author(s):

J.M. Gaines

Keyword(s):

Molecular Beam Epitaxy ◽

Electron Diffraction ◽

Molecular Beam ◽

High Energy ◽

Energy Electron ◽

Molecular Beam Epitaxy Growth ◽

High Energy Electron ◽

In Situ Characterization

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Reflection high-energy electron diffraction during substrate rotation: A new dimension for in situ characterization

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.589976 ◽

1998 ◽

Vol 16 (3) ◽

pp. 1507 ◽

Cited By ~ 32

Author(s):

W. Braun

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

In Situ Characterization ◽

Substrate Rotation

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Growth of oriented Ag nanocrystals on air-oxidized Si surfaces: An in-situ reflection high energy electron diffraction study

Thin Solid Films ◽

10.1016/j.tsf.2011.01.228 ◽

2011 ◽

Vol 520 (2) ◽

pp. 853-860 ◽

Cited By ~ 3

Author(s):

Anupam Roy ◽

K. Bhattacharjee ◽

J.K. Dash ◽

B.N. Dev

Keyword(s):

Electron Diffraction ◽

Diffraction Study ◽

Electron Diffraction Study ◽

High Energy ◽

Energy Electron ◽

High Energy Electron

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Spectroscopies combined with reflection high-energy electron diffraction (RHEED) for real-time in situ surface monitoring of thin film growth

In Situ Characterization of Thin Film Growth ◽

10.1533/9780857094957.3.180 ◽

2011 ◽

pp. 180-211 ◽

Cited By ~ 1

Author(s):

P.G. Staib

Keyword(s):

Thin Film ◽

Electron Diffraction ◽

Real Time ◽

Film Growth ◽

High Energy ◽

Thin Film Growth ◽

Energy Electron ◽

High Energy Electron ◽

Surface Monitoring

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Reflection high-energy electron diffraction (RHEED) for in situ characterization of thin film growth

In Situ Characterization of Thin Film Growth ◽

10.1533/9780857094957.1.3 ◽

2011 ◽

pp. 3-28 ◽

Cited By ~ 2

Author(s):

G. Koster

Keyword(s):

Thin Film ◽

Electron Diffraction ◽

Film Growth ◽

High Energy ◽

Thin Film Growth ◽

Energy Electron ◽

High Energy Electron ◽

In Situ Characterization

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Initial growth mechanism of BiSrCaCuO thin films on SrTiO3(110) surfaces studied by in-situ reflection high energy electron diffraction observation

Thin Solid Films ◽

10.1016/0040-6090(93)90595-g ◽

1993 ◽

Vol 228 (1-2) ◽

pp. 189-192 ◽

Cited By ~ 4

Author(s):

Tadao Miura ◽

Yoshiki Ishizuka

Keyword(s):

Thin Films ◽

Electron Diffraction ◽

Growth Mechanism ◽

High Energy ◽

Energy Electron ◽

Initial Growth ◽

High Energy Electron

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Accurate in situ lattice matching from the dynamics of high energy electron diffraction

Applied Physics Letters ◽

10.1063/1.116696 ◽

1996 ◽

Vol 68 (3) ◽

pp. 394-396 ◽

Cited By ~ 5

Author(s):

J. E. Cunningham ◽

R. N. Pathak ◽

W. Y. Jan

Keyword(s):

Electron Diffraction ◽

High Energy ◽

Energy Electron ◽

High Energy Electron ◽

Lattice Matching

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