Formation of silicon nitride nanopillars in dual-frequency capacitively coupled plasma and their application to Si nanopillar etching

2007 ◽  
Vol 25 (4) ◽  
pp. 1073-1077 ◽  
Author(s):  
C. K. Park ◽  
H. T. Kim ◽  
D. Y. Kim ◽  
N.-E. Lee
Keyword(s):  
Silicon Nitride ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Trench and hole patterning with EUV resists using dual frequency capacitively coupled plasma (CCP)

2015 ◽  
Author(s):  
Yannick Feurprier ◽  
Katie Lutker-Lee ◽  
Vinayak Rastogi ◽  
Hiroie Matsumoto ◽  
Yuki Chiba ◽  
...  
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Electron Kinetic Property of a Magnetized Dual-Frequency Capacitively-Coupled Plasma

2009 ◽  
Vol 54 (9(5)) ◽  
pp. 317-322 ◽  
Author(s):  
DaeHo Kim ◽  
Chang-Mo Ryu ◽  
SungHee Lee ◽  
JaeKoo Lee
Keyword(s):  
Kinetic Property ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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