Nanometer-precision pattern registration for scanning-probe lithographies using interferometric-spatial-phase imaging

2006 ◽  
Vol 24 (6) ◽  
pp. 3083 ◽  
Author(s):  
Euclid E. Moon ◽  
Henry I. Smith
Keyword(s):  
Scanning Probe ◽  
Phase Imaging ◽  
Spatial Phase

scholarly journals Nanometer-level alignment using interferometric-spatial-phase-imaging (ISPI) during silicon nanowire growth

2010 ◽  
Author(s):  
Pornsak Srisungsitthisunti ◽  
Euclid E. Moon ◽  
Chookiat Tansarawiput ◽  
Huaichen Zhang ◽  
Minghao Qi ◽  
...  
Keyword(s):  
Silicon Nanowire ◽  
Nanowire Growth ◽  
Phase Imaging ◽  
Spatial Phase

scholarly journals Near-Field Ultrasonic Imaging: A Novel Method for Nondestructive Mechanical Imaging of IC Interconnect Structures

2002 ◽  
Vol 716 ◽  
Author(s):  
G. S. Shekhawat ◽  
H. Xie ◽  
Y. Zheng ◽  
R. E. Geer
Keyword(s):  
Relative Phase ◽  
Near Field ◽  
Scanning Probe ◽  
Phase Imaging ◽  
Force Microscopy ◽  
Probe Microscope ◽  
Novel Method ◽  
Phase Sensitive ◽  
Low K ◽  
Mechanical Imaging

AbstractThe investigation of an alternate approach to nondestructive, nanoscale mechanical imaging for IC interconnect structures is reported. This approach utilizes a heterodyne interferometer based on a scanning probe microscope, also referred to as heterodyne force microscopy (HFM). This interferometer is sensitive to the relative phase difference of the two ultrasonic excitations due to spatial variations in the sample viscoelastic response and enables near-field, phase-sensitive imaging. Proof-of-feasibility demonstrations of this technique are presented for ultrasonic phase-imaging of Al/low-k interconnect structures. Spatial resolution <10 nm is demonstrated.

Interferometric-spatial-phase imaging for six-axis mask control

2003 ◽  
Vol 21 (6) ◽  
pp. 3112 ◽  
Author(s):  
Euclid E. Moon ◽  
Lynn Chen ◽  
Patrick N. Everett ◽  
Mark K. Mondol ◽  
Henry I. Smith
Keyword(s):  
Phase Imaging ◽  
Spatial Phase

Advanced applications and instrumentation for scanning probe microscopy (SPM)

1996 ◽  
Vol 54 ◽  
pp. 852-853
Author(s):  
D.A. Grigg
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Cellulose Microfibrils ◽  
Phase Image ◽  
Pulp Fiber ◽  
Phase Imaging ◽  
Topographic Image ◽  
Ambient Conditions ◽  
Probe Microscopy ◽  
Cellulose Component

Scanning probe microscopy (SPM) has continued to advance into new applications and disciplines every year. The development of new techniques and instrumentation for SPM's have enabled researchers to study sample surfaces in a variety of ambient conditions and using a number of contrast mechanisms. A review of new SPM techniques and instrumentation will be presented.Phase imaging is a new technique that provides nanometer-scale information about variations in surface properties, such as adhesion, friction, viscoelasticity, composition and perhaps others, not revealed by any other single SPM technique. An example using phase imaging to differentiate component phases of composite materials is shown in Fig. 1 of wood pulp fiber. The left image is a normal topographic image acquired using the TappingMode™ technique. The right image is the simultaneous phase image. The phase image highlights cellulose microfibrils and a lignin component atop the cellulose component not seen in the topographic image. The details of phase imaging will be discussed.

Tilt-modulated spatial phase imaging method for wafer-mask leveling in proximity lithography

2010 ◽  
Vol 35 (18) ◽  
pp. 3132 ◽  
Author(s):  
Shaolin Zhou ◽  
Yong Yang ◽  
Lixin Zhao ◽  
Song Hu
Keyword(s):  
Imaging Method ◽  
Phase Imaging ◽  
Spatial Phase

Comprehensive Structural Study of Pre- and Post-Heat Treated Compression Molded Polyurethane Samples of Varying Composition Studied by Scanning Probe Techniques

2000 ◽  
Vol 661 ◽  
Author(s):  
M.E. Hawley ◽  
E.B. Orler ◽  
D.A. Wrobleski ◽  
R.P. Hjelm ◽  
G.W. Brown
Keyword(s):  
Morphological Changes ◽  
Imaging Techniques ◽  
Soft Segment ◽  
Sample Surface ◽  
Scanning Probe ◽  
Phase Imaging ◽  
Quenching Rate ◽  
Heat Treated ◽  
Soft Segments ◽  
Before And After

ABSTRACTOnly a limited number of structural studies have been performed on polyurethanes using scanning probe techniques to determine both the microstructure and the corresponding distribution of hard and soft segments within samples. This type of information is needed to better understand the mechanical properties of these materials and to facilitate modeling. In order to address these issues, we have fabricated a series of compression molded segmented poly(ester urethane) samples with hard (HS) to soft segment ratios from 19 to 100%. Samples were examined using scanning probe phase imaging techniques to obtain the topography and corresponding distribution of hard domains before and after heating at 100°C.A number of significant differences were observed between the pre- and post-heat treated samples. Variations in structure and heat-induced morphological changes were directly related to HS content. Fine strand- or fibril-like structures were most prominent in the 23 and 19% HS sample but first appeared at 30% HS. Harder, thicker elongated structures dominated the surface of the100% HS sample and were seen to a limited extent on all samples, especially after annealing and quenching. The 23% HS sample surface structure depended on quenching rate and time after treatment.

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