Tilt-modulated spatial phase imaging method for wafer-mask leveling in proximity lithography

2010 ◽  
Vol 35 (18) ◽  
pp. 3132 ◽  
Author(s):  
Shaolin Zhou ◽  
Yong Yang ◽  
Lixin Zhao ◽  
Song Hu
Keyword(s):  
Imaging Method ◽  
Phase Imaging ◽  
Spatial Phase

scholarly journals Computational Method for Wavefront Sensing Based on Transport-Of-Intensity Equation

Photonics ◽  
2021 ◽  
Vol 8 (6) ◽  
pp. 177
Author(s):  
Iliya Gritsenko ◽  
Michael Kovalev ◽  
George Krasin ◽  
Matvey Konoplyov ◽  
Nikita Stsepuro
Keyword(s):  
A Priori ◽  
Spherical Wave ◽  
Computational Method ◽  
Optical Systems ◽  
Radius Of Curvature ◽  
Imaging Method ◽  
Wavefront Sensing ◽  
Phase Imaging ◽  
Transport Of Intensity Equation ◽  
Priori Information

Recently the transport-of-intensity equation as a phase imaging method turned out as an effective microscopy method that does not require the use of high-resolution optical systems and a priori information about the object. In this paper we propose a mathematical model that adapts the transport-of-intensity equation for the purpose of wavefront sensing of the given light wave. The analysis of the influence of the longitudinal displacement z and the step between intensity distributions measurements on the error in determining the wavefront radius of curvature of a spherical wave is carried out. The proposed method is compared with the traditional Shack–Hartmann method and the method based on computer-generated Fourier holograms. Numerical simulation showed that the proposed method allows measurement of the wavefront radius of curvature with radius of 40 mm and with accuracy of ~200 μm.

NEW POSSIBILITIES OF STRUCTURAL MORPHOLOGICAL PECULIARITIES INVESTIGATION BY QUANTITATIVE PHASE IMAGING METHOD

2020 ◽  
pp. 133-135
Author(s):  
M. Zolotova ◽  
M. Ivashchenko ◽  
P. Ignatiev ◽  
V. Metelin ◽  
M. Talamanova
Keyword(s):  
Red Blood Cells ◽  
Blood Cells ◽  
Stress Conditions ◽  
Imaging Method ◽  
Phase Imaging ◽  
Quantitative Phase Imaging ◽  
Quantitative Phase ◽  
Stress Influence

The possibility of quantitative phase imaging method for the assessment of structural morphological erythrocytes peculiarities under normal and stress conditions were studied. It is stated that quantitative phase imaging is an important instrument which allows to visualize red blood cells. New aspects of stress influence on functional cells morphology are defined.

scholarly journals Recent Progress in X-ray and Neutron Phase Imaging with Gratings

2020 ◽  
Vol 4 (1) ◽  
pp. 9 ◽  
Author(s):  
Atsushi Momose ◽  
Hidekazu Takano ◽  
Yanlin Wu ◽  
Koh Hashimoto ◽  
Tetsuo Samoto ◽  
...  
Keyword(s):  
Recent Progress ◽  
Time Of Flight ◽  
Imaging Method ◽  
Phase Imaging ◽  
Imaging Methods ◽  
X Ray ◽  
Phase Microscopy ◽  
Grating Fabrication ◽  
Recent Developments ◽  
Time Of Flight Method

Under the JST-ERATO project in progress to develop X-ray and neutron phase-imaging methods together, recent achievements have been selected and reviewed after describing the merit and the principle of the phase imaging method. For X-ray phase imaging, recent developments of four-dimensional phase tomography and phase microscopy at SPring-8, Japan are mainly presented. For neutron phase imaging, an approach in combination with the time-of-flight method developed at J-PARC, Japan is described with the description of new Gd grating fabrication.

Measurements of 2-Dimensional Plasma Density Distributions by the Phase-Imaging Method in GAMMA 10

2007 ◽  
Vol 51 (2T) ◽  
pp. 277-279 ◽  
Author(s):  
A. Nakahara ◽  
M. Yoshikawa ◽  
Y. Shima ◽  
T. Matsumoto ◽  
A. Nakahara ◽  
...  
Keyword(s):  
Plasma Density ◽  
Imaging Method ◽  
Phase Imaging ◽  
Density Distributions

scholarly journals Nanometer-level alignment using interferometric-spatial-phase-imaging (ISPI) during silicon nanowire growth

2010 ◽  
Author(s):  
Pornsak Srisungsitthisunti ◽  
Euclid E. Moon ◽  
Chookiat Tansarawiput ◽  
Huaichen Zhang ◽  
Minghao Qi ◽  
...  
Keyword(s):  
Silicon Nanowire ◽  
Nanowire Growth ◽  
Phase Imaging ◽  
Spatial Phase

Two dimensional density and its fluctuation measurements by using phase imaging method in GAMMA 10

2010 ◽  
Vol 81 (10) ◽  
pp. 10D514 ◽  
Author(s):  
M. Yoshikawa ◽  
S. Negishi ◽  
Y. Shima ◽  
H. Hojo ◽  
A. Mase ◽  
...  
Keyword(s):  
Imaging Method ◽  
Phase Imaging ◽  
Two Dimensional

Interferometric-spatial-phase imaging for six-axis mask control

2003 ◽  
Vol 21 (6) ◽  
pp. 3112 ◽  
Author(s):  
Euclid E. Moon ◽  
Lynn Chen ◽  
Patrick N. Everett ◽  
Mark K. Mondol ◽  
Henry I. Smith
Keyword(s):  
Phase Imaging ◽  
Spatial Phase
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