Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition

2006 ◽  
Vol 24 (6) ◽  
pp. 2911 ◽  
Author(s):  
Jun-ya Igaki ◽  
Ken-ichiro Nakamatsu ◽  
Reo Kometani ◽  
Kazuhiro Kanda ◽  
Yuichi Haruyama ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Mechanical Characteristics ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Diamondlike Carbon

Mechanical Characteristics of Nanosprings Fabricated by Focused-Ion-Beam Chemical Vapor Deposition Using Ferrocene Source Gas

2010 ◽  
Vol 49 (6) ◽  
pp. 06GH07 ◽  
Author(s):  
Yasuki Nakai ◽  
Yuji Kang ◽  
Makoto Okada ◽  
Yuichi Haruyama ◽  
Kazuhiro Kanda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Mechanical Characteristics ◽  
Ion Beam ◽  
Chemical Vapor

Transmission Electron Microscopy (TEM) Specimen Preparation Technique using Focused Ion Beam (FIB): Application to Material Characterization of Chemical Vapor Deposition of Tungsten (W) and Tungsten Silicides (WSix)

1997 ◽  
Author(s):  
K. Doong ◽  
J.-M. Fu ◽  
Y.-C. Huang
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Chemical Vapor ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Transmission Electron

Abstract The specimen preparation technique using focused ion beam (FIB) to generate cross-sectional transmission electron microscopy (XTEM) samples of chemical vapor deposition (CVD) of Tungsten-plug (W-plug) and Tungsten Silicides (WSix) was studied. Using the combination method including two axes tilting[l], gas enhanced focused ion beam milling[2] and sacrificial metal coating on both sides of electron transmission membrane[3], it was possible to prepare a sample with minimal thickness (less than 1000 A) to get high spatial resolution in TEM observation. Based on this novel thinning technique, some applications such as XTEM observation of W-plug with different aspect ratio (I - 6), and the grain structure of CVD W-plug and CVD WSix were done. Also the problems and artifacts of XTEM sample preparation of high Z-factor material such as CVD W-plug and CVD WSix were given and the ways to avoid or minimize them were suggested.

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