Front and back side Auger electron spectroscopy depth profile analysis to verify an interfacial reaction at the HfN∕SiO[sub 2] interface

Carolyn F. H. Gondran; Charlene Johnson; Kisik Choi

doi:10.1116/1.2232380

Front and back side Auger electron spectroscopy depth profile analysis to verify an interfacial reaction at the HfN∕SiO[sub 2] interface

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2232380 ◽

2006 ◽

Vol 24 (5) ◽

pp. 2457

Author(s):

Carolyn F. H. Gondran ◽

Charlene Johnson ◽

Kisik Choi

Keyword(s):

Auger Electron Spectroscopy ◽

Interfacial Reaction ◽

Depth Profile ◽

Electron Spectroscopy ◽

Auger Electron ◽

Profile Analysis ◽

Back Side ◽

Depth Profile Analysis ◽

Auger Electron Spectroscopy Depth

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Mikroanalyse und Tiefenprofilanalyse mit der Auger-Elektronen-Spektroskopie / Microanalysis and depth profile analysis by Auger electron spectroscopy

tm - Technisches Messen ◽

10.1524/teme.1987.54.9.330 ◽

1987 ◽

Vol 54 (9) ◽

Cited By ~ 1

Author(s):

H.J. Dudek

Keyword(s):

Auger Electron Spectroscopy ◽

Depth Profile ◽

Electron Spectroscopy ◽

Auger Electron ◽

Profile Analysis ◽

Depth Profile Analysis

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A comparative Rutherford backscattering spectrometry and Auger electron spectroscopy depth profile study of Fe-N films

Thin Solid Films ◽

10.1016/0040-6090(88)90269-6 ◽

1988 ◽

Vol 161 ◽

pp. L69-L70 ◽

Cited By ~ 1

Author(s):

H. De Rugy ◽

J.P. Langeron ◽

S. Bouquet ◽

L. Minel ◽

G.I. Grigonov ◽

...

Keyword(s):

Auger Electron Spectroscopy ◽

Depth Profile ◽

Electron Spectroscopy ◽

Auger Electron ◽

Rutherford Backscattering Spectrometry ◽

Rutherford Backscattering ◽

Auger Electron Spectroscopy Depth ◽

Profile Study

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Auger electron spectroscopy depth profile study in fracture surfaces of sinterized YBa2Cu3O7−x

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576439 ◽

1990 ◽

Vol 8 (6) ◽

pp. 4021-4025 ◽

Cited By ~ 10

Author(s):

J. Colino ◽

J. L. Sacedon ◽

L. Del Olmo ◽

J. L. Vincent

Keyword(s):

Auger Electron Spectroscopy ◽

Depth Profile ◽

Electron Spectroscopy ◽

Auger Electron ◽

Fracture Surfaces ◽

Auger Electron Spectroscopy Depth ◽

Profile Study

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Auger Electron Spectroscopy Depth Profile of Thin Oxide on a Ti‐Mo Alloy

Journal of The Electrochemical Society ◽

10.1149/1.2129749 ◽

1980 ◽

Vol 127 (3) ◽

pp. 763-765 ◽

Cited By ~ 6

Author(s):

Daniel Laser ◽

Harris L. Marcus

Keyword(s):

Auger Electron Spectroscopy ◽

Depth Profile ◽

Electron Spectroscopy ◽

Auger Electron ◽

Auger Electron Spectroscopy Depth ◽

Thin Oxide

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Determination of the depth resolution of Auger electron spectroscopy depth profiles of anodic barrier oxide films on differently pretreated aluminium substrates

Surface and Interface Analysis ◽

10.1002/sia.740220139 ◽

1994 ◽

Vol 22 (1-12) ◽

pp. 175-180 ◽

Cited By ~ 8

Author(s):

J. De Laet ◽

K. De Boeck ◽

H. Terryn ◽

J. Vereecken

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Oxide Films ◽

Depth Resolution ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Nondestructive depth profile study of oxygen‐exposed large‐grain silver using angle‐resolved Auger electron spectroscopy and ion scattering spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577624 ◽

1991 ◽

Vol 9 (3) ◽

pp. 1344-1350 ◽

Cited By ~ 17

Author(s):

Mark R. Davidson ◽

Gar B. Hoflund ◽

R. A. Outlaw

Keyword(s):

Auger Electron Spectroscopy ◽

Depth Profile ◽

Electron Spectroscopy ◽

Auger Electron ◽

Ion Scattering ◽

Ion Scattering Spectroscopy ◽

Profile Study

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Superposition of Auger electron spectroscopy depth profiles obtained on Cr/Ni multilayer samples with different roughnesses

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.574642 ◽

1987 ◽

Vol 5 (4) ◽

pp. 1209-1212 ◽

Cited By ~ 11

Author(s):

A. Zalar ◽

S. Hofmann

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiles ◽

Auger Electron Spectroscopy Depth

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Auger Electron Spectroscopy Study on the Stability and the Interfacial Reaction of Ta, Ta-N and TaN Films as a Diffusion Barrier between Cu9Al4Film and Si

Japanese Journal of Applied Physics ◽

10.1143/jjap.32.911 ◽

1993 ◽

Vol 32 (Part 1, No. 2) ◽

pp. 911-915 ◽

Cited By ~ 15

Author(s):

Atsushi Noya ◽

Katsutaka Sasaki ◽

Mayumi Takeyama

Keyword(s):

Auger Electron Spectroscopy ◽

Interfacial Reaction ◽

Diffusion Barrier ◽

Electron Spectroscopy ◽

Auger Electron ◽

Spectroscopy Study ◽

The Stability

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Comparison of angle‐resolved x‐ray photoelectron spectroscopy/Auger electron spectroscopy with depth profile restoration from inelastic background analysis

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579210 ◽

1994 ◽

Vol 12 (4) ◽

pp. 2337-2341 ◽

Cited By ~ 1

Author(s):

Wolfgang S. M. Werner ◽

Igor S. Tilinin

Keyword(s):

Auger Electron Spectroscopy ◽

Depth Profile ◽

Photoelectron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

X Ray

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Determination of the relative sputtering yield of carbon to tantalum by means of Auger electron spectroscopy depth profiling

Surface and Interface Analysis ◽

10.1002/sia.3101 ◽

2009 ◽

Vol 41 (10) ◽

pp. 799-803 ◽

Cited By ~ 9

Author(s):

L. Kotis ◽

M. Menyhard ◽

A. Sulyok ◽

G. Sáfrán ◽

A. Zalar ◽

...

Keyword(s):

Auger Electron Spectroscopy ◽

Electron Spectroscopy ◽

Auger Electron ◽

Depth Profiling ◽

Auger Electron Spectroscopy Depth ◽

Sputtering Yield

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