Real-time observation and optimization of tungsten atomic layer deposition process cycle

2006 ◽  
Vol 24 (2) ◽  
pp. 780 ◽  
Author(s):  
Wei Lei ◽  
Laurent Henn-Lecordier ◽  
Mariano Anderle ◽  
Gary W. Rubloff ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Real Time ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition ◽  
Time Observation ◽  
Real Time Observation

scholarly journals Real-Time Observation of Atomic Layer Deposition Inhibition: Metal Oxide Growth on Self-Assembled Alkanethiols

2014 ◽  
Vol 6 (15) ◽  
pp. 11891-11898 ◽  
Author(s):  
Jason R. Avila ◽  
Erica J. DeMarco ◽  
Jonathan D. Emery ◽  
Omar K. Farha ◽  
Michael J. Pellin ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Metal Oxide ◽  
Real Time ◽  
Atomic Layer ◽  
Oxide Growth ◽  
Layer Deposition ◽  
Self Assembled ◽  
Time Observation ◽  
Real Time Observation

scholarly journals In Situ SiO2 Passivation of Epitaxial (100) and (110)InGaAs by Exploiting TaSiOx Atomic Layer Deposition Process

ACS Omega ◽  
2018 ◽  
Vol 3 (11) ◽  
pp. 14567-14574 ◽  
Author(s):  
Mantu K. Hudait ◽  
Michael B. Clavel ◽  
Jheng-Sin Liu ◽  
Shuvodip Bhattacharya
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Al 2 O 3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

2019 ◽  
Vol 217 (8) ◽  
pp. 1900237
Author(s):  
Zhen Zhu ◽  
Saoussen Merdes ◽  
Oili M. E. Ylivaara ◽  
Kenichiro Mizohata ◽  
Mikko J. Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Plasma ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Optical in situ monitoring of plasma-enhanced atomic layer deposition process

2018 ◽  
Vol 57 (6S2) ◽  
pp. 06JF05 ◽  
Author(s):  
Muhammad Zeeshan Arshad ◽  
Kyung Jae Jo ◽  
Hyun Gi Kim ◽  
Sang Jeen Hong
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
In Situ Monitoring ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition
Sign in / Sign up

Export Citation Format

Share Document