Effect of assistant rf field on phase composition of iron nitride film prepared by magnetron sputtering process
2006 ◽
Vol 24
(1)
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pp. 170-173
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Keyword(s):
1997 ◽
Vol 96
(1)
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pp. 34-38
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Keyword(s):
2000 ◽
Vol 45
(20)
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pp. 3367-3373
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2012 ◽
Vol 219
(1-3)
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pp. 13-17
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2015 ◽
Vol 9
(5)
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pp. 995-1004
2015 ◽
Vol 275
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pp. 264-269
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