Large area and wide dimension range x-ray lithography for lithographite, galvanoformung, and abformung process using energy variable synchrotron radiation

2005 ◽  
Vol 23 (6) ◽  
pp. 2903 ◽  
Author(s):  
Yuichi Utsumi ◽  
Takefumi Kishimoto
Keyword(s):  
Synchrotron Radiation ◽  
Large Area ◽  
X Ray ◽  
Energy Variable

Large area and wide dimensions X-ray lithography using energy variable synchrotron radiation

2006 ◽  
Vol 13 (5-6) ◽  
pp. 417-423 ◽  
Author(s):  
Yuichi Utsumi ◽  
Takefumi Kishimoto ◽  
Tadashi Hattori ◽  
Hirotsugu Hara
Keyword(s):  
Synchrotron Radiation ◽  
Large Area ◽  
X Ray ◽  
Energy Variable

APPLICATION OF A ONE-DIMENSIONAL POSITION SENSITIVE CHAMBER ON SYNCHROTRON RADIATION

2014 ◽  
Vol 27 ◽  
pp. 1460142
Author(s):  
HUIRONG QI ◽  
MEI LIU
Keyword(s):  
Synchrotron Radiation ◽  
Low Cost ◽  
Large Area ◽  
Position Resolution ◽  
One Dimensional ◽  
X Ray ◽  
High Position ◽  
Standard Data ◽  
Wire Chamber ◽  
The One

In the last few years, wire chambers have been frequently used for X-ray detection because of their low cost, large area and reliability. X-ray diffraction is an irreplaceable method for powder crystal lattice measurements. A one-dimensional single-wire chamber has been developed in our lab to provide high position resolution for powder diffraction experiments using synchrotron radiation. There are 200 readout strips of 0.5 mm width with a pitch of 1.0 mm in the X direction, and the working gas is a mixture of Ar and CO2 (90/10). The one-dimensional position of the original ionization point is determined by the adjacent strip's distribution information using the center of gravity method. Recently, a study of the detector's performance and diffraction image was completed at the 1W1B laboratory of the Beijing Synchrotron Radiation Facility (BSRF) using a sample of SiO2. Most of the relative errors between the measured values of diffraction angles and existing data were less than 1%. The best position resolution achieved for the detector in the test was 71 μm (σ value) with a 20 μm slit collimator. Finally, by changing the detector height in incremental distances from the center of the sample, the one-dimensional detector achieved a two-dimensional diffraction imaging function, and the results are in good agreement with standard data.

Large-Area X-ray Lithography System for LIGA Process Operating in Wide Energy Range of Synchrotron Radiation

2005 ◽  
Vol 44 (7B) ◽  
pp. 5500-5504 ◽  
Author(s):  
Yuichi Utsumi ◽  
Takefumi Kishimoto ◽  
Tadashi Hattori ◽  
Hirotsugu Hara
Keyword(s):  
Synchrotron Radiation ◽  
Energy Range ◽  
Wide Energy Range ◽  
Large Area ◽  
X Ray ◽  
Wide Energy ◽  
Area X ◽  
Lithography System

scholarly journals A large-area CMOS imager as an X-ray detector for synchrotron radiation experiments

2004 ◽  
Vol 11 (4) ◽  
pp. 347-352 ◽  
Author(s):  
Naoto Yagi ◽  
Masaki Yamamoto ◽  
Kentaro Uesugi ◽  
Katsuaki Inoue
Keyword(s):  
Synchrotron Radiation ◽  
Large Area ◽  
X Ray ◽  
Cmos Imager

Large-area analysis of dislocations in ammonothermal GaN by synchrotron radiation X-ray topography

2014 ◽  
Vol 7 (9) ◽  
pp. 091003 ◽  
Author(s):  
Sakari Sintonen ◽  
Sami Suihkonen ◽  
Henri Jussila ◽  
Andreas Danilewsky ◽  
Romuald Stankiewicz ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Large Area ◽  
X Ray

Direct Observation of Monolayer Zones in Al-wt 4% Cu

1990 ◽  
Vol 48 (1) ◽  
pp. 14-15
Author(s):  
B. Jouffrey ◽  
D. Dorignac ◽  
A. Bourret
Keyword(s):  
Solid Solution ◽  
Synchrotron Radiation ◽  
Direct Observation ◽  
Supersaturated Solid Solution ◽  
Original Model ◽  
X Ray ◽  
Image Position

Since the early works on GP zones and the model independently proposed by Preston and Guinier on the first steps of precipitation in supersaturated solid solution of aluminium containing a few percent of copper, many works have been performed to understand the structure of different stages in the sequence of precipitation.The scheme which is generally admitted can be drawn from a work by Phillips.In their original model Guinier and Preston analysed a GP zone as composed of a single (100) copperrich plane surrounded by aluminum atomic planes with a slightly shorter distance from the original plane than in the solid solution.From X-ray measurements it has also been shown that GP1 zones were not only copper monolayer zones. They could be up to a few atomic planes thick. Different models were proposed by Guinier, Gerold, Toman. Using synchrotron radiation, proposals have been recently made.

THE STUDY OF DISLOCATION GLIDE IN ICE BY SYNCHROTRON RADIATION X-RAY TOPOGRAPHY

1987 ◽  
Vol 48 (C1) ◽  
pp. C1-175-C1-181
Author(s):  
S. AHMAD ◽  
M. OHTOMO ◽  
R. W. WHITWORTH
Keyword(s):  
Synchrotron Radiation ◽  
X Ray ◽  
Dislocation Glide
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