Low energy large scan field electron beam column for wafer inspection

2004 ◽  
Vol 22 (6) ◽  
pp. 3534 ◽  
Author(s):  
X. Liu ◽  
X. Zhang ◽  
Y. Zhao ◽  
A. Desai ◽  
Z. W. Chen
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Wafer Inspection ◽  
Field Electron

scholarly journals Dose-rate effect of low-energy electron beam irradiation on bacterial content in chilled turkey

2021 ◽  
Vol 640 (3) ◽  
pp. 032006
Author(s):  
U A Bliznyuk ◽  
P Yu Borchegovskaya ◽  
A P Chernyaev ◽  
V S Ipatova ◽  
V A Leontiev ◽  
...  
Keyword(s):  
Electron Beam ◽  
Dose Rate ◽  
Electron Beam Irradiation ◽  
Rate Effect ◽  
Low Energy ◽  
Energy Electron ◽  
Beam Irradiation ◽  
Low Energy Electron ◽  
Bacterial Content ◽  
Dose Rate Effect

Adhesive Strength of Ni–Cu Surface Alloy Formation by Low-Energy High-Current Electron Beam

2021 ◽  
Vol 63 (10) ◽  
pp. 1804-1809
Author(s):  
E. V. Yakovlev ◽  
A. B. Markov ◽  
D. A. Shepel ◽  
V. I. Petrov ◽  
A. A. Neiman
Keyword(s):  
Electron Beam ◽  
Adhesive Strength ◽  
Low Energy ◽  
Surface Alloy ◽  
Alloy Formation ◽  
High Current ◽  
High Current Electron Beam ◽  
Current Electron ◽  
High Current Electron

New mask format for low-energy electron-beam proximity projection lithography

2002 ◽  
Author(s):  
Kaoru Koike ◽  
Shinji Omori ◽  
Kazuya Iwase ◽  
Isao Ashida ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron
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