Gas delivery and virtual process chamber concept for gas-assisted material processing in a focused ion beam system

2004 ◽  
Vol 22 (6) ◽  
pp. 3008 ◽  
Author(s):  
Valery Ray
Keyword(s):  
Material Processing ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam System ◽  
Virtual Process

Metallic Nanoneedles Arrays for TEM Sample Preparation “Lift-Out”

2012 ◽  
Author(s):  
Romaneh Jalilian ◽  
David Mudd ◽  
Neil Torrez ◽  
Jose Rivera ◽  
Mehdi M. Yazdanpanah ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Electron Microscope ◽  
Sample Preparation ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam System ◽  
Transmission Electron ◽  
Nanoneedle Array ◽  
Superior Mechanical Properties ◽  
And Performance

Abstract The sample preparation for transmission electron microscope can be done using a method known as "lift-out". This paper demonstrates a method of using a silver-gallium nanoneedle array for a quicker sharpening process of tungsten probes with better sample viewing, covering the fabrication steps and performance of needle-tipped probes for lift-out process. First, an array of high aspect ratio silver-gallium nanoneedles was fabricated and coated to improve their conductivity and strength. Then, the nanoneedles were welded to a regular tungsten probe in the focused ion beam system at the desired angle, and used as a sharp probe for lift-out. The paper demonstrates the superior mechanical properties of crystalline silver-gallium metallic nanoneedles. Finally, a weldless lift-out process is described whereby a nano-fork gripper was fabricated by attaching two nanoneedles to a tungsten probe.

FIB Micromachining and Nano-Structure Fabrication

1999 ◽  
Author(s):  
Raymond A. Lee ◽  
Patrick J. Wolpert
Keyword(s):  
High Precision ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Biological Applications ◽  
Optical Lens ◽  
Nano Structure ◽  
Beam System ◽  
Afm Tips ◽  
Established Technique ◽  
Made In

Abstract FIB Micromachining has long been an established technique, but until recently it has been overshadowed by the more mainstream semiconductor application of the Focused Ion Beam system. Nano- Structure fabrication using the FIB system has become more popular recently due to several factors. The need for sub-micron structures have grown significantly due to a need for enhanced optical and biological applications. Another reason for the growth in micromachining is the improvement made in the ability of FIB systems to produce geometric shapes with high precision. With the latest high-end FIB systems, it is possible to produce microstructures with tens of nano-meters of precision. Optical lens, AFM tips, and nano-apertures are all part of the growing application for FIB Micromachining. This paper will discuss the ability and limitations of the FIB system and some possible application for FIB Micromachining.

Focused ion-beam system for automated MEMS prototyping and processing

1997 ◽  
Author(s):  
Gregory J. Athas ◽  
Kathryn E. Noll ◽  
Russell Mello ◽  
Raymond Hill ◽  
Don E. Yansen ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam System

Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system

2004 ◽  
Vol 111 (1) ◽  
pp. 57-62 ◽  
Author(s):  
Biao Li ◽  
Xiaosong Tang ◽  
Huimin Xie ◽  
Xin Zhang
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Strain Analysis ◽  
Beam System

Measurement of Work Function at MgO Crystal Surface by the γ-Focused Ion Beam System

2002 ◽  
Vol 41 (Part 2, No. 9A/B) ◽  
pp. L1006-L1009 ◽  
Author(s):  
Eun Ha Choi ◽  
Jae Yong Lim ◽  
Seung Oun Kang ◽  
Han Sup Uhm
Keyword(s):  
Work Function ◽  
Focused Ion Beam ◽  
Crystal Surface ◽  
Ion Beam ◽  
Beam System
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