Extreme ultraviolet microexposures at the Advanced Light Source using the 0.3 numerical aperture micro-exposure tool optic

Author(s):  
Patrick P. Naulleau ◽  
Kenneth A. Goldberg ◽  
Erik Anderson ◽  
Jason P. Cain ◽  
Paul Denham ◽  
...  
2006 ◽  
Vol 42 (1) ◽  
pp. 44-50 ◽  
Author(s):  
P. Naulleau ◽  
K.A. Goldberg ◽  
J.P. Cain ◽  
E.H. Anderson ◽  
K.R. Dean ◽  
...  

2010 ◽  
Vol 81 (10) ◽  
pp. 10E313
Author(s):  
M. S. Bakeman ◽  
J. van Tilborg ◽  
T. Sokollik ◽  
D. Baum ◽  
N. Ybarrolaza ◽  
...  

2003 ◽  
Vol 104 ◽  
pp. 557-561 ◽  
Author(s):  
M. R. Howells ◽  
H. Chapman ◽  
S. Hau-Riege ◽  
H. He ◽  
S. Marchesini ◽  
...  

2021 ◽  
Vol 34 (1-3) ◽  
pp. 27-29
Author(s):  
A. Scholl, ◽  
D. Parkinson ◽  
R. Koch, ◽  
L. Tamura

2012 ◽  
Vol 25 (3) ◽  
pp. 25-30 ◽  
Author(s):  
L. Tamura ◽  
Z. Hussain ◽  
H. A. Padmore ◽  
D. S. Robin ◽  
S. Bailey ◽  
...  

1997 ◽  
Vol 68 (5) ◽  
pp. 1945-1951 ◽  
Author(s):  
P. A. Heimann ◽  
M. Koike ◽  
C. W. Hsu ◽  
D. Blank ◽  
X. M. Yang ◽  
...  

2018 ◽  
Vol 2 (1) ◽  
pp. 4 ◽  
Author(s):  
Camelia Stan ◽  
Christine Beavers ◽  
Martin Kunz ◽  
Nobumichi Tamura

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