Selective growth of carbon nanotube on scanning probe tips by microwave plasma chemical vapor deposition

2004 ◽  
Vol 22 (1) ◽  
pp. 90 ◽  
Author(s):  
F. M. Pan ◽  
Y. B. Liu ◽  
Y. Chang ◽  
C. Y. Chen ◽  
T. G. Tsai ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Selective Growth ◽  
Scanning Probe ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Self-Organized Microcones Grown on Si Substrate by Microwave Plasma Chemical Vapor Deposition

2008 ◽  
Vol 47 (4) ◽  
pp. 3050-3052
Author(s):  
Masataka Moriya ◽  
Yuji Matsumoto ◽  
Yoshinao Mizugaki ◽  
Tadayuki Kobayashi ◽  
Kouichi Usami
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Si Substrate ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Self Organized
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