Maskless lithography using low-energy electron beam: Recent results for proof-of-concept system

2002 ◽  
Vol 20 (6) ◽  
pp. 2651 ◽  
Author(s):  
T. Nakasugi ◽  
A. Ando ◽  
R. Inanami ◽  
N. Sasaki ◽  
T. Ota ◽  
...  
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Maskless Lithography ◽  
Proof Of Concept ◽  
Concept System ◽  
Low Energy Electron

scholarly journals Dose-rate effect of low-energy electron beam irradiation on bacterial content in chilled turkey

2021 ◽  
Vol 640 (3) ◽  
pp. 032006
Author(s):  
U A Bliznyuk ◽  
P Yu Borchegovskaya ◽  
A P Chernyaev ◽  
V S Ipatova ◽  
V A Leontiev ◽  
...  
Keyword(s):  
Electron Beam ◽  
Dose Rate ◽  
Electron Beam Irradiation ◽  
Rate Effect ◽  
Low Energy ◽  
Energy Electron ◽  
Beam Irradiation ◽  
Low Energy Electron ◽  
Bacterial Content ◽  
Dose Rate Effect

New mask format for low-energy electron-beam proximity projection lithography

2002 ◽  
Author(s):  
Kaoru Koike ◽  
Shinji Omori ◽  
Kazuya Iwase ◽  
Isao Ashida ◽  
Shigeru Moriya
Keyword(s):  
Electron Beam ◽  
Low Energy ◽  
Energy Electron ◽  
Projection Lithography ◽  
Low Energy Electron
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