Microstructural characterization of radio frequency magnetron sputter-deposited Ga2O3:Mn phosphor thin films

Joo Han Kim; Paul H. Holloway

doi:10.1116/1.1474418

Microstructural characterization of radio frequency magnetron sputter-deposited Ga2O3:Mn phosphor thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1474418 ◽

2002 ◽

Vol 20 (3) ◽

pp. 928-933 ◽

Cited By ~ 10

Author(s):

Joo Han Kim ◽

Paul H. Holloway

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Microstructural Characterization ◽

Radio Frequency Magnetron ◽

Magnetron Sputter ◽

Sputter Deposited

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Growth and characterization of radio frequency magnetron sputter-deposited zinc stannate, Zn2SnO4, thin films

Journal of Applied Physics ◽

10.1063/1.1483104 ◽

2002 ◽

Vol 92 (1) ◽

pp. 310-319 ◽

Cited By ~ 167

Author(s):

David L. Young ◽

Helio Moutinho ◽

Yanfa Yan ◽

Timothy J. Coutts

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zinc Stannate ◽

Magnetron Sputter ◽

Sputter Deposited

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Dielectric Properties of Radio Frequency Magnetron Sputter Deposited Zirconium Titanate‐Based Thin Films

Journal of The Electrochemical Society ◽

10.1149/1.1838260 ◽

1998 ◽

Vol 145 (1) ◽

pp. 358-362 ◽

Cited By ~ 29

Author(s):

E. S. Ramakrishnan ◽

Kenneth D. Cornett ◽

Gary H. Shapiro ◽

Wei‐Yean Howng

Keyword(s):

Thin Films ◽

Dielectric Properties ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zirconium Titanate ◽

Magnetron Sputter ◽

Sputter Deposited

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Phase development of radio-frequency magnetron sputter-deposited Pb(Mg1/3Nb2/3)O3–PbTiO3 (90/10) thin films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582402 ◽

2000 ◽

Vol 18 (4) ◽

pp. 1659-1662 ◽

Cited By ~ 8

Author(s):

Jeon-Kook Lee ◽

Dongkyun Park ◽

Deok-Soo Cheong ◽

Jong-Wan Park ◽

Chul Soon Park

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Phase Development ◽

Magnetron Sputter ◽

Sputter Deposited

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Stoichiometry and phase purity control of radio frequency magnetron sputter deposited Ba0.45Sr0.55TiO3 thin films for tunable devices

Journal of Applied Physics ◽

10.1063/1.4829000 ◽

2013 ◽

Vol 114 (17) ◽

pp. 174104 ◽

Cited By ~ 8

Author(s):

Fikadu Alema ◽

Aaron Reinholz ◽

Konstantin Pokhodnya

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Phase Purity ◽

Magnetron Sputter ◽

Sputter Deposited ◽

Purity Control

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Electrochromic properties of radio frequency magnetron sputter deposited mixed Nb2O5:MoO3 (95:5) thin films cycled in H+ and Li+ ions

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2014.09.043 ◽

2015 ◽

Vol 30 ◽

pp. 31-40 ◽

Cited By ~ 19

Author(s):

N. Usha ◽

R. Sivakumar ◽

C. Sanjeeviraja

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Electrochromic Properties ◽

Magnetron Sputter ◽

Sputter Deposited

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Structural and microstructural characterization of nanocrystalline silicon thin films obtained by radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.1841461 ◽

2005 ◽

Vol 97 (3) ◽

pp. 034307 ◽

Cited By ~ 33

Author(s):

M. Morales ◽

Y. Leconte ◽

R. Rizk ◽

Daniel Chateigner

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Microstructural Characterization ◽

Nanocrystalline Silicon ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Silicon Thin Films

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Temperature dependence of SiO2/Si interfacial structure formed by radio-frequency magnetron sputter deposited SiO2 thin films on Si(111)

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581617 ◽

1999 ◽

Vol 17 (2) ◽

pp. 552-554 ◽

Cited By ~ 11

Author(s):

Boquan Li ◽

Toshiyuki Fujimoto ◽

Isao Kojima

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Temperature Dependence ◽

Radio Frequency Magnetron ◽

Interfacial Structure ◽

Magnetron Sputter ◽

Sputter Deposited

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Preparation and Characterization of 70TeO2-30WO3 Glass Thin Films by Radio-Frequency Magnetron Sputtering Method

Solid State Phenomena - Advances in Nanomaterials and Processing ◽

10.4028/3-908451-31-0.487 ◽

2007 ◽

pp. 487-490

Author(s):

Jin Hyeok Kim ◽

Ki Young Yoo ◽

Sang Hoon Shin ◽

Sun Hyun Youn ◽

Jong Ha Moon

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Characterization of (Ba,Sr)TiO[sub 3] Thin Films on BaPbO[sub 3] Electrode Prepared by Radio Frequency Magnetron Sputtering

Journal of The Electrochemical Society ◽

10.1149/1.2120307 ◽

2005 ◽

Vol 152 (12) ◽

pp. F213 ◽

Cited By ~ 5

Author(s):

Chun-Sheng Liang ◽

Jenn-Ming Wu

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Surface- and microanalytical characterization of silicon-carbonitride thin films prepared by means of radio-frequency magnetron co-sputtering

Thin Solid Films ◽

10.1016/s0040-6090(98)01061-x ◽

1998 ◽

Vol 332 (1-2) ◽

pp. 230-234 ◽

Cited By ~ 46

Author(s):

H. Lutz ◽

M. Bruns ◽

F. Link ◽

H. Baumann

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Silicon Carbonitride

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