Parameter extraction for 193 nm chemically amplified resist from refractive index change

2001 ◽  
Vol 19 (6) ◽  
pp. 2077 ◽  
Author(s):  
Young-Soo Sohn ◽  
Hye-Keun Oh ◽  
Ilsin An
Keyword(s):  
Refractive Index ◽  
Refractive Index Change ◽  
Parameter Extraction ◽  
Index Change ◽  
Chemically Amplified ◽  
Chemically Amplified Resist ◽  
193 Nm

Refractive index change during exposure for 193-nm chemically amplified resists

1999 ◽  
Author(s):  
Hye-Keun Oh ◽  
Young-Soo Sohn ◽  
Moon-Gyu Sung ◽  
Young-Mi Lee ◽  
Eun-Mi Lee ◽  
...  
Keyword(s):  
Refractive Index ◽  
Refractive Index Change ◽  
Index Change ◽  
Chemically Amplified ◽  
Chemically Amplified Resists ◽  
193 Nm

Photoresist Exposure Parameter Extraction from Refractive Index Change during Exposure

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 6877-6883 ◽  
Author(s):  
Young-Soo Sohn ◽  
Moon-Gyu Sung ◽  
Young-Mi Lee ◽  
Eun-Mi Lee ◽  
Jin-Kyung Oh ◽  
...  
Keyword(s):  
Refractive Index ◽  
Refractive Index Change ◽  
Parameter Extraction ◽  
Index Change

scholarly journals Critical angle reflection imaging for quantification of molecular interactions on glass surface

2021 ◽  
Vol 12 (1) ◽  
Author(s):  
Guangzhong Ma ◽  
Runli Liang ◽  
Zijian Wan ◽  
Shaopeng Wang
Keyword(s):  
Refractive Index ◽  
Small Molecule ◽  
Molecular Interactions ◽  
Glass Surface ◽  
Critical Angle ◽  
Dynamic Range ◽  
Refractive Index Change ◽  
Label Free ◽  
Index Change ◽  
Sensing Range

AbstractQuantification of molecular interactions on a surface is typically achieved via label-free techniques such as surface plasmon resonance (SPR). The sensitivity of SPR originates from the characteristic that the SPR angle is sensitive to the surface refractive index change. Analogously, in another interfacial optical phenomenon, total internal reflection, the critical angle is also refractive index dependent. Therefore, surface refractive index change can also be quantified by measuring the reflectivity near the critical angle. Based on this concept, we develop a method called critical angle reflection (CAR) imaging to quantify molecular interactions on glass surface. CAR imaging can be performed on SPR imaging setups. Through a side-by-side comparison, we show that CAR is capable of most molecular interaction measurements that SPR performs, including proteins, nucleic acids and cell-based detections. In addition, we show that CAR can detect small molecule bindings and intracellular signals beyond SPR sensing range. CAR exhibits several distinct characteristics, including tunable sensitivity and dynamic range, deeper vertical sensing range, fluorescence compatibility, broader wavelength and polarization of light selection, and glass surface chemistry. We anticipate CAR can expand SPR′s capability in small molecule detection, whole cell-based detection, simultaneous fluorescence imaging, and broader conjugation chemistry.

InP-based optical switch module operating through carrier-induced refractive index change

1990 ◽  
Vol 29 (3) ◽  
pp. 191 ◽  
Author(s):  
Takeshi Kato ◽  
Hiroaki Inoue ◽  
Yasushi Takahashi ◽  
Koji K. Ishida
Keyword(s):  
Refractive Index ◽  
Optical Switch ◽  
Refractive Index Change ◽  
Index Change ◽  
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