Mechanical properties of TiC/metal multilayers synthesized by ion beam sputtering technique

2001 ◽  
Vol 19 (1) ◽  
pp. 250 ◽  
Author(s):  
Jing Wang ◽  
Wen-Zhi Li ◽  
Heng-De Li
Keyword(s):  
Mechanical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Ion Beam Processing of Optical Materials

1988 ◽  
Vol 129 ◽  
Author(s):  
F. L. Williams ◽  
L. L. Boyer ◽  
W. Reicher ◽  
J. J. McNally ◽  
G. A. Al-Jumaily ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Packing Density ◽  
Optical Materials ◽  
Ion Beam ◽  
Film Material ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Optical And Mechanical Properties ◽  
Deposition Techniques

ABSTRACTWe have deposited thin films of optical materials using ion beam sputtering and ion assisted deposition techniques. It is possible to obtain good quality film material deposited on substrates at temperatures lower than normally required. Ion assisted deposition influences film stoichiometry and packing density, which in turn determine optical and mechanical properties of the film material. We discuss two general indicators which appear helpful in predicting the degree to which these occur.

Structural and Mechanical Properties of Stainless Steel Thin Films Elaborated by Thermal Evaporation and Ion Beam Sputtering

2003 ◽  
Vol 426-432 ◽  
pp. 3451-3456 ◽  
Author(s):  
Philippe Goudeau ◽  
N. Merakeb ◽  
J.P. Eymery ◽  
D. Faurie ◽  
B. Boubeker ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Stainless Steel ◽  
Thermal Evaporation ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Ion Beam Processing of Optical Materials

1988 ◽  
Vol 128 ◽  
Author(s):  
F. L. Williams ◽  
L. L. Boyer ◽  
D W. Reicher ◽  
J. J. McNally ◽  
G. A. Al-Jumaily ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Packing Density ◽  
Optical Materials ◽  
Ion Beam ◽  
Film Material ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Optical And Mechanical Properties ◽  
Deposition Techniques

ABSTRACTWe have deposited thin films of optical materials using ion beam sputtering and ion assisted deposition techniques. It is possible to obtain good quality film material deposited on substrates at temperatures lower than normally required. Ion assisted deposition influences film stoichiometry and packing density, which in turn determine optical and mechanical properties of the film material. We discuss two general indicators which appear helpful in predicting the degree to which these occur.

Mechanical properties of BCN films deposited by dual cesium ion beam sputtering system

2003 ◽  
Vol 169-170 ◽  
pp. 340-343 ◽  
Author(s):  
Eungsun Byon ◽  
Jong-Kuk Kim ◽  
Sunghun Lee ◽  
Jun-Hee Hah ◽  
Katsuhisa Sugimoto
Keyword(s):  
Mechanical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Cesium Ion ◽  
Beam Sputtering ◽  
Sputtering System

Structural and mechanical properties of ZrN films prepared by ion beam sputtering with varying N2/Ar ratio and substrate temperature

Vacuum ◽  
2006 ◽  
Vol 81 (4) ◽  
pp. 550-555 ◽  
Author(s):  
M.M. Larijani ◽  
N. Tabrizi ◽  
Sh. Norouzian ◽  
A. Jafari ◽  
S. Lahouti ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Substrate Temperature ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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