Theoretical and experimental characterization of a low-pressure rf plasma and its optimization in electron-gas secondary-neutral mass spectrometry

2001 ◽  
Vol 19 (1) ◽  
pp. 108-117 ◽  
Author(s):  
W. Bieck ◽  
E. Merz ◽  
H. Gnaser ◽  
H. Oechsner
Keyword(s):  
Mass Spectrometry ◽  
Electron Gas ◽  
Low Pressure ◽  
Rf Plasma ◽  
Experimental Characterization

Formation of low pressure striations in a krypton lamp, experimental characterization of the discharge: spectroscopic and electrical analysis

Optik ◽  
2021 ◽  
pp. 166339
Author(s):  
Fatima Nadia Haddou ◽  
Philippe Guillot ◽  
Ahmed Belasri ◽  
Thomas Maho ◽  
Bruno Caillier
Keyword(s):  
Low Pressure ◽  
Experimental Characterization ◽  
Electrical Analysis

Low Pressure RF Plasma Jet Sputtering Technique Applied to Ferroelectric Films: Ba1-x SrxTiO3

2006 ◽  
Vol 514-516 ◽  
pp. 165-169 ◽  
Author(s):  
Alexander Deyneka ◽  
Zdenek Hubička ◽  
V.A. Trepakov ◽  
Gunnar Suchaneck ◽  
Lubomir Jastrabik ◽  
...  
Keyword(s):  
Hysteresis Loops ◽  
Plasma Jet ◽  
Low Pressure ◽  
Rf Plasma ◽  
Ferroelectric Films ◽  
Si Substrates ◽  
Low Pressure Plasma ◽  
Bst Films ◽  
Bst Ceramics

Technology aspects and characterization of BaxSr1-xTiO3 (BST) films fabricated with low pressure plasma jet technique are presented. BST films were deposited on silicon coated with Pt/TiO2/SiO2 and on bare Si substrates. The nozzles-type RF hollow cathode has been fabricated from hot pressed BaTiO3, SrTiO3, and BST ceramics. Controlling of RF voltage, RF current and substrate temperature allowed us to deposit reproducible films with controlled grain size. Hysteresis loops, ellipsometric and micro-Raman investigation results are presented and discussed.

scholarly journals Characterization of Carbon-Contaminated B4C-Coated Optics after Chemically Selective Cleaning with Low-Pressure RF Plasma

2018 ◽  
Vol 8 (1) ◽  
Author(s):  
H. Moreno Fernández ◽  
D. Rogler ◽  
G. Sauthier ◽  
M. Thomasset ◽  
R. Dietsch ◽  
...  
Keyword(s):  
Low Pressure ◽  
Rf Plasma ◽  
Chemically Selective
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