Integrated atomic force microscopy array probe with metal–oxide–semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal–oxide–semiconductor electronics

2000 ◽  
Vol 18 (6) ◽  
pp. 2669 ◽  
Author(s):  
T. Akiyama ◽  
U. Staufer ◽  
N. F. de Rooij ◽  
D. Lange ◽  
C. Hagleitner ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Complementary Metal Oxide Semiconductor ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Force Microscopy ◽  
Atomic Force ◽  
Array Probe ◽  
Semiconductor Electronics ◽  
Effect Transistor ◽  
On Chip

III–V Complementary Metal–Oxide–Semiconductor Electronics on Silicon Substrates

Nano Letters ◽  
2012 ◽  
Vol 12 (7) ◽  
pp. 3592-3595 ◽  
Author(s):  
Junghyo Nah ◽  
Hui Fang ◽  
Chuan Wang ◽  
Kuniharu Takei ◽  
Min Hyung Lee ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Complementary Metal Oxide Semiconductor ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
Silicon Substrates ◽  
Semiconductor Electronics
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