Modeling influence of structural changes in photoacid generators on 193 nm single layer resist imaging
2000 ◽
Vol 18
(6)
◽
pp. 3340
◽
Keyword(s):
1996 ◽
Vol 35
(Part 2, No. 4B)
◽
pp. L528-L530
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1994 ◽
Vol 7
(3)
◽
pp. 507-516
◽
1998 ◽
1997 ◽
Vol 10
(3)
◽
pp. 511-520
◽
1996 ◽
Vol 9
(3)
◽
pp. 475-488
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