Activated Reactive Evaporation Process for High Rate Deposition of Compounds

1972 ◽  
Vol 9 (6) ◽  
pp. 1385-1388 ◽  
Author(s):  
R. F. Bunshah ◽  
A. C. Raghuram
Keyword(s):  
High Rate ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Deposition of indium nitride films by activated reactive evaporation process – a feasibility study

2005 ◽  
Vol 245 (1-4) ◽  
pp. 73-78 ◽  
Author(s):  
Sheetal J. Patil ◽  
Dhananjay S. Bodas ◽  
A.B. Mandale ◽  
S.A. Gangal
Keyword(s):  
Feasibility Study ◽  
Indium Nitride ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Plasma diagnostic studies of the activated reactive evaporation process

1987 ◽  
Vol 33 ◽  
pp. 1-16 ◽  
Author(s):  
C.V. Deshpandey ◽  
B.P. O'Brien ◽  
H.J. Doerr ◽  
R.F. Bunshah ◽  
D. Hofmann
Keyword(s):  
Evaporation Process ◽  
Plasma Diagnostic ◽  
Diagnostic Studies ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation

Superconducting films growninsituby the activated reactive evaporation process

1989 ◽  
Vol 55 (5) ◽  
pp. 504-506 ◽  
Author(s):  
S. Prakash ◽  
D. M. Umarjee ◽  
H. J. Doerr ◽  
C. V. Deshpandey ◽  
R. F. Bunshah
Keyword(s):  
Superconducting Films ◽  
Evaporation Process ◽  
Reactive Evaporation ◽  
Activated Reactive Evaporation
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