Misfit Dislocations in the Bicrystal System of Silicon-Boron-Doped Silicon

1969 ◽  
Vol 6 (4) ◽  
pp. 585-588 ◽  
Author(s):  
Yoshimitsu Sugita ◽  
Masao Tamura ◽  
Katsuro Sugawara
Keyword(s):  
Misfit Dislocations ◽  
Boron Doped ◽  
Doped Silicon

Misfit Dislocations in Bicrystals of Epitaxially Grown Silicon on Boron‐Doped Silicon Substrates

1969 ◽  
Vol 40 (8) ◽  
pp. 3089-3094 ◽  
Author(s):  
Yoshimitsu Sugita ◽  
Masao Tamura ◽  
Katsuro Sugawara
Keyword(s):  
Silicon Substrates ◽  
Misfit Dislocations ◽  
Boron Doped ◽  
Doped Silicon

New gettering using misfit dislocations in homoepitaxial wafers with heavily boron‐doped silicon substrates

1989 ◽  
Vol 54 (5) ◽  
pp. 463-465 ◽  
Author(s):  
H. Kikuchi ◽  
M. Kitakata ◽  
F. Toyokawa ◽  
M. Mikami
Keyword(s):  
Silicon Substrates ◽  
Misfit Dislocations ◽  
Boron Doped ◽  
Doped Silicon

Extraction of Elastic Parameters of Heavily Boron-Doped Silicon Layer by Elimination of Misfit Dislocations

1995 ◽  
Vol 378 ◽  
Author(s):  
HO-JUN Lee ◽  
Chul-Hi Han ◽  
Choong-Ki Kim
Keyword(s):  
Young’S Modulus ◽  
Boron Concentration ◽  
Young's Modulus ◽  
Silicon Layer ◽  
Misfit Dislocations ◽  
Residual Tensile Stress ◽  
X Ray Diffraction ◽  
Elastic Parameters ◽  
Boron Doped ◽  
Doped Silicon

AbstractIn this paper, various elastic parameters of heavily boron-doped silicon layer have been extracted by eliminating the misfit dislocations in the layer. The dislocation-free silicon membranes doped with the boron concentration of 1.3 × 1020 atoms/cm3 have been fabricated and the Young’s modulus of 1.45 × 1012 dyn/cm2 and residual tensile stress of 2.7 × 109 dyn/cm2 have been extracted by blister method. From the Young’s modulus and residual stress, the residual tensile strain of 1.34 × 10−3, lattice constant of 5.424 Å, and misfit coefficient of 1.03 × 10−23 cm3/atom have been calculated. These parameters are very similar to those obtained from X-ray diffraction analysis and theory.

Erratum: Misfit Dislocations in the Bicrystal System of Silicon–Boron-Doped Silicon

1970 ◽  
Vol 7 (2) ◽  
pp. 369-369
Author(s):  
Yoshimitsu Sugita ◽  
Masao Tamura ◽  
Katsuro Sugawara
Keyword(s):  
Misfit Dislocations ◽  
Boron Doped ◽  
Doped Silicon

Erratum: Misfit Dislocations in Bicrystals of Epitaxially Grown Silicon on Boron‐Doped Silicon Substrate

1970 ◽  
Vol 41 (4) ◽  
pp. 1877-1877
Author(s):  
Yoshimitsu Sugita ◽  
Masao Tamura ◽  
Katsuro Sugawara
Keyword(s):  
Silicon Substrate ◽  
Misfit Dislocations ◽  
Boron Doped ◽  
Doped Silicon

Preparation of integrated circuits for TEM electromigration in situ studies

1986 ◽  
Vol 44 ◽  
pp. 882-883
Author(s):  
J. V. Maskowitz ◽  
W. E. Rhoden ◽  
D. R. Kitchen ◽  
R. E. Omlor ◽  
P. F. Lloyd
Keyword(s):  
Integrated Circuits ◽  
Crystallographic Orientation ◽  
Silicon Wafers ◽  
Minimum Size ◽  
Test Vehicle ◽  
In Situ Studies ◽  
Boron Doped ◽  
Doped Silicon ◽  
Drill Holes

The fabrication of the aluminum bridge test vehicle for use in the crystallographic studies of electromigration involves several photolithographic processes, some common, while others quite unique. It is most important to start with a clean wafer of known orientation. The wafers used are 7 mil thick boron doped silicon. The diameter of the wafer is 1.5 inches with a resistivity of 10-20 ohm-cm. The crystallographic orientation is (111).Initial attempts were made to both drill and laser holes in the silicon wafers then back fill with photoresist or mounting wax. A diamond tipped dentist burr was used to successfully drill holes in the wafer. This proved unacceptable in that the perimeter of the hole was cracked and chipped. Additionally, the minimum size hole realizable was > 300 μm. The drilled holes could not be arrayed on the wafer to any extent because the wafer would not stand up to the stress of multiple drilling.

Single-charge tunneling in uncoupled boron-doped silicon nanochains

2010 ◽  
Vol 484 (4-6) ◽  
pp. 258-260 ◽  
Author(s):  
D.D.D. Ma ◽  
K.S. Chan ◽  
D.M. Chen ◽  
S.T. Lee
Keyword(s):  
Single Charge ◽  
Boron Doped ◽  
Doped Silicon ◽  
Charge Tunneling

Stability Study of Silicon Heterojunction Solar cells fabricated with Gallium‐ and Boron‐doped Silicon Wafers

Solar RRL ◽  
2021 ◽  
Author(s):  
Bruno Vicari Stefani ◽  
Moonyong Kim ◽  
Matthew Wright ◽  
Anastasia Soeriyadi ◽  
Dmitriy Andronikov ◽  
...  
Keyword(s):  
Solar Cells ◽  
Stability Study ◽  
Silicon Wafers ◽  
Heterojunction Solar Cells ◽  
Boron Doped ◽  
Doped Silicon ◽  
Silicon Heterojunction Solar Cells
Sign in / Sign up

Export Citation Format

Share Document