Combining advanced lithographic techniques and self-assembly of thin films of diblock copolymers to produce templates for nanofabrication

Author(s):  
Richard D. Peters ◽  
Xiao M. Yang ◽  
Qiang Wang ◽  
Juan J. de Pablo ◽  
Paul F. Nealey
2013 ◽  
Vol 345 ◽  
pp. 193-196
Author(s):  
Xin Kang Gao ◽  
Jun Liu ◽  
Ting Hua Wang ◽  
Xue Li ◽  
Xiao Kai Zhang

In this study, a method to generate arrays of Fe3O4 nanoparticles (MNPs) via block copolymer (BC) self-assembly was developed. A composite film of polystyrene-block-poly (2-vinylpyridine) (PS-b-P2VP)/MNPs was first prepared by spin-coating the PS-b-P2VP/MNPs mixed solution on a carbon substrate. After the composite film was annealed at high temperature for 2 days, it was found that the modified MNPs could be selectively incorporated into P2VP cylinders in PS-b-P2VP diblock copolymers and the P2VP cylinders were oriented parallel to the substrate. For a long time annealing (10 days), the P2VP cylinders become normal to the substrate and MNPs are located at the interface of P2VP and PS phases.


2020 ◽  
Author(s):  
lingying shi ◽  
Sangho Lee ◽  
Qingyang Du ◽  
rong ran ◽  
Runze Liu ◽  
...  

Abstract The formation of zig-zags, chevrons, Y-junctions and line segments is demonstrated in thin films formed from cylindrical morphology Si-containing rod-coil diblock copolymers and triblock terpolymers under solvent annealing. Directed self-assembly of the block copolymers within trenches yields well-ordered cylindrical microdomains oriented either parallel or transverse to the sidewalls depending on the chemical functionalization of the sidewalls, and the location and structure of concentric bends in the cylinders is determined by the shape of the trenches. The innate etching contrast, the spontaneous sharp bends and junctions, and the range of demonstrated periodicity and line/space ratios make these conformationally asymmetric rod-coil polymers attractive for nanoscale pattern generation.


Soft Matter ◽  
2014 ◽  
Vol 10 (31) ◽  
pp. 5755 ◽  
Author(s):  
Jingyi Rao ◽  
Huan Ma ◽  
Julia Baettig ◽  
Sanghoon Woo ◽  
Mihaiela C. Stuparu ◽  
...  

Materials ◽  
2020 ◽  
Vol 13 (6) ◽  
pp. 1286
Author(s):  
George Zapsas ◽  
Dimitrios Moschovas ◽  
Konstantinos Ntetsikas ◽  
Andreas Karydis-Messinis ◽  
Nikolaos Chalmpes ◽  
...  

Block copolymers (BCPs), through their self-assembly, provide an excellent guiding platform for precise controlled localization of maghemite nanoparticles (MNPs). Diblock copolymers (di/BCP) represent the most applied matrix to host filler components due to their morphological simplicity. A series of nanocomposites based on diblock copolymer or triblock terpolymer matrices and magnetic nanoparticles were prepared to study and compare the influence of an additional block into the BCP matrix. MNPs were grafted with low molecular weight polystyrene (PS) chains in order to be segregated in a specific phase of the matrix to induce selective localization. After the mixing of the BCPs with 10% w/v PS-g-MNPs, nanocomposite thin films were formed by spin coating. Solvent vapor annealing (SVA) enabled the PS-g-MNPs selective placement within the PS domains of the BCPs, as revealed by atomic force microscopy (AFM). The recorded images have proven that high amounts of functionalized MNPs can be controllably localized within the same block (PS), despite the architecture of the BCPs (AB vs. ABC). The adopted lamellar structure of the “neat” BCP thin films was maintained for MNPs loading approximately up to 10% w/v, while, for higher content, the BCP adopted lamellar morphology is partially disrupted, or even disappears for both AB and ABC architectures.


2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Wei Cao ◽  
Senlin Xia ◽  
Michael Appold ◽  
Nitin Saxena ◽  
Lorenz Bießmann ◽  
...  

AbstractUltrahigh molecular weight (UHMW) diblock copolymers (DBCs) have emerged as a promising template for fabricating large-sized nanostructures. Therefore, it is of high significance to systematically study the influence of film thickness and solvent vapor annealing (SVA) on the structure evolution of UHMW DBC thin films. In this work, spin coating of an asymmetric linear UHMW polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) DBC is used to fabricate thin films, which are spherically structured with an inter-domain distance larger than 150 nm. To enhance the polymer chain mobility and facilitate approaching equilibrium nanostructures, SVA is utilized as a post-treatment of the spin coated films. With increasing film thickness, a local hexagonal packing of PMMA half-spheres on the surface can be obtained, and the order is improved at larger thickness, as determined by grazing incidence small angle X-ray scattering (GISAXS). Additionally, the films with locally hexagonal packed half-spherical morphology show a poor order-order-poor order transition upon SVA, indicating the realization of ordered structure using suitable SVA parameters.


2006 ◽  
Vol 961 ◽  
Author(s):  
Hiroshi Yoshida ◽  
Hirofumi Kitano ◽  
Satoshi Akasaka ◽  
Tomohiro Inoue ◽  
Mikihito Taknaka ◽  
...  

ABSTRACTBlock copolymer lithography is a promising method for fabricating periodical nano patterns less than 20nm by self-assembly and can be applicable for fabricating patterned magnetic media with recording density over 1Tbit/inch2. We found a simple technique to control the orientation of cylindrical microdomains in thin films. Only by mixing polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) diblock copolymers with the constituent homopolymer (PS or PMMA), we could align the cylindrical microdomains perpendicular to the film surface. The added homopolymer induces conformational entropic relaxation of the block chains in microdomain space and stabilizes perpendicular orientation of hexagonally packed cylindrical microdomains. Thus formed perpendicular cylinders can be readily aligned in a regular array with a grating substrate.


2019 ◽  
Vol 21 (34) ◽  
pp. 18525-18532 ◽  
Author(s):  
Wenfeng Zhao ◽  
Weihua Li

The surface affinity is a critical factor for controlling the formation of monolayer nanostructures in block copolymer thin films.


2006 ◽  
Vol 12 (S02) ◽  
pp. 606-607
Author(s):  
NL Dietz ◽  
C-T Lo ◽  
B Lee ◽  
RE Winans ◽  
P Thiyagarajan

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005


2009 ◽  
Vol 1203 ◽  
Author(s):  
Muruganathan Ramanathan ◽  
Seth B. Darling ◽  
Anirudha V. Sumant ◽  
Orlando Auciello

AbstractBlock copolymers (BCPs) consist of two or more chemically distinct and incompatible polymer chains (or blocks) covalently bonded. Due to the incompatibility and connectivity constraints between the two blocks, diblock copolymers spontaneously self-assemble into microphase-separated nanoscale domains that exhibit ordered 0, 1, 2 or 3 dimensional morphologies at equilibrium. Commonly observed microdomain morphologies in bulk samples are periodic arrangements of lamellae, cylinders, or spheres. Block copolymer lithography refers to the use of these ordered structures in the form of thin films as templates for patterning through selective etching or deposition. The self-assembly and domain orientation of block copolymers on a given substrate is critical to realize block copolymer lithography as a tool for large throughput nanolithography applications. In this work, we survey the morphology of cylinder-forming block copolymers by atomic force microscopy (AFM). Three kind of block copolymers were studied: a) poly(styrene-block-ferrocenyldimethylsilane), PS-b-PFS b) poly(styrene-block-methylmethacrylate), PS-b-PMMA and c) poly(styrene-block-dimethylsiloxane) PS-b-PDMS. Block copolymers were dissolved in a neutral solvent for both blocks (toluene) in order to obtain solutions of various concentrations (1 and 1.5 wt %). From these solutions, films were prepared by spin casting on ultrananocrystalline diamond (UNCD) thin film substrates. Results indicate that PS-b-PFS exhibits chemical and morphological compatibility to the UNCD surface in terms of wetting and domain control. A systematic comparison of self-assembly of these polymers on silicon nitride substrates demonstrates that UNCD thin films would require pre-treatment to be considered as a substrate for BCP lithography.


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