scholarly journals AFM-Based Nanofabrication: Modeling, Simulation, and Experimental Verification

Author(s):  
Rapeepan Promyoo ◽  
Hazim El-Mounayri ◽  
Varun Kumar Karingula ◽  
Kody Varahramyan

Recent developments in science and engineering have advanced the fabrication techniques for micro/nanodevices. Among them, atomic force microscope (AFM) has already been used for nanomachining and fabrication of micro/nanodevices. In this paper, a computational model for AFM-based nanofabrication processes is being developed. Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation and scratching at the nanoscale. The effects of AFM-tip radius and crystal orientation are investigated. The simulation is also used to study the effect of the AFM tip speed on the indentation force at the interface between the tip and the substrate/workpiece The material deformation and indentation geometry are extracted from the final locations of atoms, which are displaced by the rigid indenter. Material properties including modulus of elasticity and hardness are estimated. It is found that properties vary significantly at the nanoscale. AFM is used to conduct actual nanoindentation and scratching, to validate the MD simulation. Qualitative agreement is found. Finally, AFM-based fabrication of nanochannels/nanofluidic devices is conducted using different applied forces, scratching length, and feed rate.

Author(s):  
Rapeepan Promyoo ◽  
Hazim El-Mounayri ◽  
Ashlie Martini

Recent developments in science and engineering have advanced the fabrication techniques for micro/nanodevices. Among them, the atomic force microscope (AFM) has already been used for nanomachining and nanofabrication such as nanolithography, nanowriting and nanopatterning. This paper describes the development and validation of computational models for AFM-based nanomachining (nanoindentation and nanoscratching). The Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation and scratching at the nanoscale for the case of gold. The simulation allows for the prediction of indentation forces and the friction force at the interface between an indenter and a substrate. The effect of scratching speeds on indentation force and friction coefficient is investigated. The material deformation and indentation geometry are extracted based on the final locations of the atoms, which have been displaced by the rigid tool. In addition to the modeling, an AFM was used to conduct actual indentation at the nanoscale, and provide measurements to which the MD simulation predictions can be compared. The AFM provides resolution on the nanometer (lateral) and angstrom (vertical) scales. A three-sided pyramid indenter (with a radius of curvature ∼ 25 nm) is raster scanned on top of the surface and in contact with it. It can be observed from the MD simulation results that the indentation force increases as the depth of indentation increases, but decreases as the scratching speed increases. Moreover, the friction coefficient is found to be independent of scratching speed.


Author(s):  
Rapeepan Promyoo ◽  
Hazim El-Mounayri ◽  
Kody Varahramyan ◽  
Ashlie Martini

Recently, atomic force microscopy (AFM) has been widely used for nanomachining and fabrication of micro/ nanodevices. This paper describes the development and validation of computational models for AFM-based nanomachining (nanoindentation and nanoscratching). The Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation and scratching at the nanoscale in the case of gold and silicon. The simulation allows for the prediction of indentation forces and the friction force at the interface between an indenter and a substrate. The effects of tip curvature and speed on indentation force and friction coefficient are investigated. The material deformation and indentation geometry are extracted based on the final locations of atoms, which are displaced by the rigid tool. In addition to modeling, an AFM was used to conduct actual indentation at the nanoscale, and provide measurements to validate the predictions from the MD simulation. The AFM provides resolution on nanometer (lateral) and angstrom (vertical) scales. A three-sided pyramid indenter (with a radius of curvature ∼ 50 nm) is raster scanned on top of the surface and in contact with it. It can be observed from the MD simulation results that the indentation force increases as the depth of indentation increases, but decreases as the scratching speed increases. On the other hand, the friction coefficient is found to be independent of scratching speed.


2015 ◽  
Author(s):  
Rapeepan Promyoo ◽  
Hazim El-Mounayri ◽  
Kody Varahramyan

In this paper, a three-dimensional computational model for Atomic Force Microscopy (AFM) based nanoindentation processes is being developed. Molecular Dynamics (MD) and Finite Element (FE) techniques are used to model and simulate mechanical indentation at the nanoscale. The correlation between the indentation conditions, including applied force and tip radius, and defect mechanism in substrate is investigated. The tip geometries used in the model are the same as those used in the experiments. The MD simulations of nanoindentation process are performed on different crystal orientations of single-crystal gold substrate, Au(100), Au(110), and Au(111). In MD simulation, the material deformation is extracted from the final locations of atoms, which are displaced by the rigid indenter. The simulation also allows for the prediction of forces at the interface between the indenter and substrate. In addition to the modeling, an AFM is used to conduct actual indentation at the nanoscale, and provide measurements to which the simulation predictions are compared.


Author(s):  
Rapeepan Promyoo ◽  
Hazim El-Mounayri ◽  
Kody Varahramyan

Atomic force microscopy (AFM) has been widely used for nanomachining and fabrication of micro/nanodevices. This paper describes the development and validation of computational models for AFM-based nanomachining. Molecular Dynamics (MD) technique is used to model and simulate mechanical indentation at the nanoscale for different types of materials, including gold, copper, aluminum, and silicon. The simulation allows for the prediction of indentation forces at the interface between an indenter and a substrate. The effects of tip materials on machined surface are investigated. The material deformation and indentation geometry are extracted based on the final locations of the atoms, which have been displaced by the rigid tool. In addition to the modeling, an AFM was used to conduct actual indentation at the nanoscale, and provide measurements to which the MD simulation predictions can be compared. The MD simulation results show that surface and subsurface deformation found in the case of gold, copper and aluminum have the same pattern. However, aluminum has more surface deformation than other materials. Two different types of indenter tips including diamond and silicon tips were used in the model. More surface and subsurface deformation can be observed for the case of nanoindentation with diamond tip. The indentation forces at various depths of indentation were obtained. It can be concluded that indentation force increases as depth of indentation increases. Due to limitations on computational time, the quantitative values of the indentation force obtained from MD simulation are not comparable to the experimental results. However, the increasing trends of indentation force are the same for both simulation and experimental results.


Author(s):  
Karthik Laxminarayana ◽  
Nader Jalili

The atomic force microscope (AFM) system has evolved into a useful tool for direct measurements of microstructural parameters and intermolecular forces at nanoscale level with atomic-resolution characterization. Typically, these microcantilever systems are operated in three open-loop modes; non-contact mode, contact mode, and tapping mode. In order to probe electric, magnetic, and/or atomic forces of a selected sample, the non-contact mode is utilized by moving the cantilever slightly away from the sample surface and oscillating the cantilever at or near its natural resonance frequency. Alternatively, the contact mode acquires sample attributes by monitoring interaction forces while the cantilever tip remains in contact with the target sample. The tapping mode of operation combines qualities of both the contact and non-contact modes by gleaning sample data and oscillating the cantilever tip at or near its natural resonance frequency while allowing the cantilever tip to impact the target sample for a minimal amount of time. Recent research on AFM systems has focused on many fabrication and manufacturing processes at molecular levels due to its tremendous surface microscopic capabilities. This paper provides a review of such recent developments in AFM imaging systems with emphasis on operational modes, microcantilever dynamic modeling and control. Due to the important contributions of AFM systems to manufacturing, this paper also provides a comprehensive review of recent applications of different AFM systems in these important areas.


RSC Advances ◽  
2019 ◽  
Vol 9 (66) ◽  
pp. 38814-38821
Author(s):  
Yongda Yan ◽  
Jiqiang Wang ◽  
Shunyu Chang ◽  
Yanquan Geng ◽  
Leyi Chen ◽  
...  

A nanofluidic chip was prepared based on a commercial AFM system. Effects on ion transport and enzymatic reaction specificity were demonstrated.


Pathogens ◽  
2020 ◽  
Vol 9 (11) ◽  
pp. 969
Author(s):  
Mateusz Cieśluk ◽  
Piotr Deptuła ◽  
Ewelina Piktel ◽  
Krzysztof Fiedoruk ◽  
Łukasz Suprewicz ◽  
...  

Despite the hope that was raised with the implementation of antibiotics to the treatment of infections in medical practice, the initial enthusiasm has substantially faded due to increasing drug resistance in pathogenic microorganisms. Therefore, there is a need for novel analytical and diagnostic methods in order to extend our knowledge regarding the mode of action of the conventional and novel antimicrobial agents from a perspective of single microbial cells as well as their communities growing in infected sites, i.e., biofilms. In recent years, atomic force microscopy (AFM) has been mostly used to study different aspects of the pathophysiology of noninfectious conditions with attempts to characterize morphological and rheological properties of tissues, individual mammalian cells as well as their organelles and extracellular matrix, and cells’ mechanical changes upon exposure to different stimuli. At the same time, an ever-growing number of studies have demonstrated AFM as a valuable approach in studying microorganisms in regard to changes in their morphology and nanomechanical properties, e.g., stiffness in response to antimicrobial treatment or interaction with a substrate as well as the mechanisms behind their virulence. This review summarizes recent developments and the authors’ point of view on AFM-based evaluation of microorganisms’ response to applied antimicrobial treatment within a group of selected bacteria, fungi, and viruses. The AFM potential in development of modern diagnostic and therapeutic methods for combating of infections caused by drug-resistant bacterial strains is also discussed.


2002 ◽  
Vol 17 (5) ◽  
pp. 936-939 ◽  
Author(s):  
Sergei V. Kalinin ◽  
Dawn A. Bonnell

Piezoresponse force microscopy (PFM) is one of the most established techniques for the observation and local modification of ferroelectric domain structures on the submicron level. Both electrostatic and electromechanical interactions contribute at the tip-surface junction in a complex manner, which has resulted in multiple controversies in the interpretation of PFM. Here we analyze the influence of experimental conditions such as tip radius of curvature, indentation force, and cantilever stiffness on PFM image contrast. These results are used to construct contrast mechanism maps, which correlate the imaging conditions with the dominant contrast mechanisms. Conditions under which materials properties can be determined quantitatively are elucidated.


2018 ◽  
Vol 660 ◽  
pp. 120-160 ◽  
Author(s):  
M. Mozetič ◽  
A. Vesel ◽  
G. Primc ◽  
C. Eisenmenger-Sittner ◽  
J. Bauer ◽  
...  

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