Thermoreflectance Imaging of Electromigration in Aluminum Interconnects at Different Ambient Temperatures

Author(s):  
Sami Alajlouni ◽  
Kerry Maize ◽  
Peter Bermel ◽  
Ali Shakouri

Abstract Electromigration (EM) is the process of displacing atoms in metals due to current flow leading to interconnect failures in electronic circuits. As electronics feature sizes continue to shrink, EM is becoming an increasingly serious reliability concern. EM, in aluminum (Al) interconnects, has been studied previously, but typically on the device level using Black’s law [1], without emphasis on the localized heating and defect generation around the failure site. To better understand the local EM process, thermoreflectance (TR) thermal imaging technique is used to obtain temperature profiles with submicron resolution [2]. We show that a simple lifetime prediction using Black’s law is not possible for a micro Al wire having a patterned constriction. The wire fails at two distinct failure locations depending on the level of current excitation. Moreover, the lifetime dependence on ambient temperature was studied. Each failure location had its own extracted activation energy. Our findings suggest that Black’s law may be extended to local features. They also show the potential for the design of local features in extending the lifetime of metallic interconnects. In summary, the temperature profile with submicron spatial resolution offers a unique opportunity to better understand the different mechanisms contributing to EM failures which can be used to design highly reliable interconnects.

2009 ◽  
Vol 5 (1) ◽  
pp. 31-35
Author(s):  
F.F. Sizov ◽  
◽  
V.V. Zabudsky ◽  
A.G. Golenkov ◽  
S.L. Kravchenko ◽  
...  

Author(s):  
F. Pixner ◽  
R. Buzolin ◽  
S. Schönfelder ◽  
D. Theuermann ◽  
F. Warchomicka ◽  
...  

AbstractThe complex thermal cycles and temperature distributions observed in additive manufacturing (AM) are of particular interest as these define the microstructure and the associated properties of the part being built. Due to the intrinsic, layer-by-layer material stacking performed, contact methods to measure temperature are not suitable, and contactless methods need to be considered. Contactless infrared irradiation techniques were applied by carrying out thermal imaging and point measurement methods using pyrometers to determine the spatial and temporal temperature distribution in wire-based electron beam AM. Due to the vacuum, additional challenges such as element evaporation must be overcome and additional shielding measures were taken to avoid interference with the contactless techniques. The emissivities were calibrated by thermocouple readings and geometric boundary conditions. Thermal cycles and temperature profiles were recorded during deposition; the temperature gradients are described and the associated temperature transients are derived. In the temperature range of the α+β field, the cooling rates fall within the range of 180 to 350 °C/s, and the microstructural characterisation indicates an associated expected transformation of β→α'+α with corresponding cooling rates. Fine acicular α and α’ formed and local misorientation was observed within α as a result of the temperature gradient and the formation of the α’.


2000 ◽  
Author(s):  
Li Shi ◽  
Sergei Plyasunov ◽  
Adrian Bachtold ◽  
Paul L. McEuen ◽  
Arunava Majumdar

Abstract This paper reports the use of scanning thermal microscopy (SThM) for studying heat dissipation and phonon transport in nanoelectronic circuits consisting of carbon nanotubes (CNs). Thermally designed and batch fabricated SThM probes were used to resolve the phonon temperature distribution in the CN circuits with a spatial resolution of 50 nm. Heat dissipation at poor metal-CN contacts could be readily found by the thermal imaging technique. Important questions regarding energy transport in nanoelectronic circuits, such as where is heat dissipated, whether the electrons and phonons are in equilibrium, how phonons are transported, and what are the effects of mechanical deformation on the transport and dissipation properties, are addressed in this work.


2012 ◽  
Vol 44 (5) ◽  
pp. 1456-1462 ◽  
Author(s):  
Elizabeth Azhikannickal ◽  
Philip J. Bates ◽  
Gene Zak

2020 ◽  
Author(s):  
Tatsuaki Okada ◽  
Satoshi Tanaka ◽  
Yuri Shimaki ◽  
Naoya Sakatani ◽  
Takehiko Arai ◽  
...  

<p>Thermal imaging, or thermography, has revealed the surface physical state of the C-type near-Earth asteroid 162173 Ryugu (Okada et al., 2020). The asteroid is the target body of JAXA Hayabsua2 asteroid sample return mission, and it has been characterized through remote sensing and surface experiments, and will be deeply and accurately investigated by analysis of returned sample. Thermal observations are among such multi-scale observations, providing a new insight into understanding planetary evolution process.</p> <p>Thermal infrared imager TIR (Okada et al., 2017; 2020) was used to take one-rotation global thermal images of Ryugu at every 6° step, from the home position (20 km altitude) or from the Mid-Altitude (5 km altitude). There were two big surprises contrary to the predictions before arrival at Ryugu: i) flat diurnal temperature profiles compared to the case of non-rough surface, and ii) non-cold spots identified for most of boulders. The flat diurnal temperature profiles and its maximum temperature in a day indicate that Ryugu must have very rough surfaces made of highly porous materials, derived from the thermal inertia of 300 ± 100 J K<sup>-1</sup>s<sup>-0.5</sup>m<sup>-2</sup> (hereafter, tiu). Non-cold boulders indicate that boulders are less consolidated or compacted than typical carbonaceous chondrite meteorites, and shows the same thermophysical properties as the surroundings. TIR was also used to take close-up thermal images during the descent operations, and to have proven that the surface of asteroid is covered with fragments of porous rocks, larger than several centimeters in diameter. The typical size of fragments larger than thermal skin depth (~35 mm) results in similar thermal properties between the boulders and their surroundings. We also consider the surface roughness effect (Shimaki et al., 2020) to obtain the maps of thermal inertia ( 225 ± 45 tiu) and the roughness (0.41 ± 0.05) at the same time, corresponding to very rough surfaces made of highly-porous materials. This thermal inertia is basically consistent with the value (282 +93/-35 tiu) by in situ measurement using a thermal radiometer MARA on MASCOT lander (Grott et al., 2019). Furthermore, in the close-up thermal images, there were found boulders colder by 20 °C or more, indicating the thermal inertia of typical carbonaceous chondrite meteorites.</p> <p>Considering these results, we proposed a formation scenario of Ryugu: fluffy cosmic dusts gathered to form porous planetesimals, and then much larger sized but still porous bodies. A low degree of consolidation and alteration has occurred at most of the body, while a higher degree of consolidation or alteration proceeded at the deep interior. Huge meteoritic impacts destroyed and fragmented the bodies, and part of those fragments were re-accreted to form the next generation, rubble-pile bodies (asteroids). Boulders found on Ryugu might have originated from the deep interior of parent bodies, so that most of them are very porous and less consolidated but some of them are relatively dense materials similar to carbonaceous chondrites, which might have originated from the interior. Due to YORP effect, the rotation rate decreased to current one, and the current shape of a spinning top-shape were formed. Analysis of returned sample will make progress in our knowledge of the planetary formation process.</p>


2012 ◽  
Vol 54 (5) ◽  
pp. 340-346 ◽  
Author(s):  
M. J. Suriani ◽  
Aidy Ali ◽  
A. Khalina ◽  
S. M. Sapuan ◽  
S. Abdullah ◽  
...  

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