Substrate Effect on Modulus of Elasticity and Hardness of Thin Film Under Nanoindentation Test

Author(s):  
Mesbah U. Ahmed ◽  
Rafiqul A. Tarefder

Mechanical properties of thin film under nanoindentation test by Finite Element Analysis (FEA) have been studied in this literature. An axi-symmetric bi-layer model has been developed in commercial finite element analysis software, ABAQUS. Aluminum (Al) comprises the thin film whereas Silicon (Si) comprises the substrate. This model has been simulated using the loading condition that mimics real nanoindentation test, i.e. an indenter has been probed to a predefined depth onto Al-thin film. Modulus of elasticity and hardness of thin film have been calculated by existing empirical relationship. Substrate effect on determination of film modulus and hardness has been investigated by varying the substrate modulus. It has been observed that substrate effect is pronounced on film modulus determination whereas hardness is not significantly sensitive to this effect. Depth of indentation has also been varied over a long range to observe the indentation effect on these parameters. It is obvious that film modulus is increased with depth increment. However, hardness variation is not regular. Different friction condition is also in the scope of this study. It has been observed that friction does not affect modulus of elasticity. It, however, affects hardness of thin film. This is attributed to the dissipation of the energy needed to overcome friction at film-indenter interface.

1999 ◽  
Vol 14 (6) ◽  
pp. 2228-2232 ◽  
Author(s):  
Takeshi Sawa ◽  
Yasushi Akiyama ◽  
Atsushi Shimamoto ◽  
Kohichi Tanaka

In a nanometer order nanoindentation test, roundness or truncation of the indenter tip cannot be avoided. In this paper, we have analyzed the indentation problem of a rounded triangular indentation into a layered elastic half-space by a finite element analysis and then established a method to estimate the intrinsic elastic modulus of the film from the nanoindentation data. The method was applied to analyze the nanoindentation data of a less-than-10 nm penetration depth on a 10 nm thick diamondlike carbon film deposited on a 50 nm thick magnetic layer.


2006 ◽  
Vol 306-308 ◽  
pp. 1151-1156 ◽  
Author(s):  
Chong Du Cho ◽  
Heung Shik Lee ◽  
Chang Boo Kim ◽  
Hyeon Gyu Beom

In this paper, a finite element code especially for micro-magnetostrictive actuators was developed. Two significant characteristics of the presented finite element code are: (1) the magnetostrictive hysteresis phenomenon is effectively taken into account; (2) intrinsic geometric feature of typical thin film structures of large length to thickness ratio, which makes it very difficult to construct finite element mesh in the region of the thin film, is considered reasonably in modeling micro-magneostrictive actuators. For verification purpose, magnetostrictive thin films were fabricated and tested in the form of a cantilevered actuator. The Tb-Fe film and Sm-Fe film are sputtered on the Si and Polyimide substrates individually. The magnetic and magnetostrictive properties of the sputtered magnetostrictive films are measured. The measured magnetostrictive coefficients are compared with the numerically calculated ones.


2016 ◽  
Vol 24 ◽  
pp. 4083-4097 ◽  
Author(s):  
Ab Halim ABU BAKAR ◽  
Alyaa ZAINAL ABIDIN ◽  
Hazlee Azil ILLIAS ◽  
Hazlie MOKHLIS ◽  
Syahirah ABD HALIM ◽  
...  

2021 ◽  
Vol 2 (2) ◽  
pp. 93-97
Author(s):  
Satriawan Dini Hariyanto ◽  
Wikan Kurniawan

Stress analysis of the bender components in the design of the begel fabricator machine was carried out using FEA (Finite Element Analysis) with three variations of the constituent material parameters, namely 6061 aluminum, mild steel, and cast iron with a modulus of elasticity of 68.9 GPa, 220 GPa, 120.5 GPa, respectively. The test is carried out by a loading parameter 2520 MPa and fixed constraint. The maximum von misses stress and displacement obtained for each material parameter components using aluminum, mild steel, and cast iron are 17.78 MPa; 0.00765, 17.49 MPa; 0.00229, 17.62 MPa; 0.00427 respectively.


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