A Micromachined Contactless Suspension With Zero Spring Constant
In this paper, a micromachined contactless suspension with a zero spring constant that provides possibility to significantly increasing sensitivity of micromachined sensors is studied. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electric contactless suspensions. In particular, the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the disk shaped proof mass are obtained based on the analysis of developed mathematical model of the suspension. It is shown that such a suspension can be developed in principle.
1983 ◽
Vol 26
(3)
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pp. 459-464
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1983 ◽
Vol 105
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pp. 339-347
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2019 ◽
Vol 8
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pp. 1655-1660
1988 ◽
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pp. 133-144
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2007 ◽
Vol 2007
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pp. 273-275
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