Experimental Investigation on the Use of Photostrictive Optical Actuator for MEMS Devices and Verification With the FEA Modeling Results

Author(s):  
Mosfequr Rahman ◽  
Masud Nawaz ◽  
John E. Jackson

Photostrictive materials are lanthanum-modified lead zirconate titanate (Pb, La)(Zr, Ti) O3 ceramics doped with WO3, called PLZT, exhibit large photostriction under uniform illumination of high-energy light. Photostrictive materials are ferrodielectric ceramics that have a photostrictive effect. Photostriction arises from a superposition of the photovoltaic effect, i.e. the generation of large voltage from the irradiation of light, and the converse-piezoelectric effect, i.e. expansion or contraction under the voltage applied. When non-centrosymmetric materials, such as ferroelectric single crystals or polarized ferroelectric ceramics, are uniformly illuminated, a high voltage, considerably exceeding the band gap energy, is generated. Along with this photovoltage, mechanical strain is also induced due to the converse piezoelectric effect. Photostrictive materials offer the potential for actuators with many advantages over traditional transducing electromechanical actuators made of shape memory alloys and electroceramics (piezoelectric and electrostrictive). Drawback of traditional actuators is that they require hard-wired connections to transmit the control signals which introduce electrical noise into the control signals; on the other hand PLZT actuators offer non-contact actuation, remote control, and immune from electric/magnetic disturbances. Some experimental research has been conducted on the use of PLZT materials, such as optical motor as an electromechanical device suitable for miniaturization, micro-waking machine, photo driven relay device using PLZT bimorphs and high speed (less than 10 ns), low-voltage, low power consumption optical switch. Authors have developed a computational method and implemented in an in-house finite element code which will be useful for designing systems incorporating thin film photostrictive actuators. The purpose of this current research work is to design and develop an experimental test set-up for photostriction effect measurement of PLZT thin film of different thickness, size and location on silicon wafer as smart beams, which may be useful for various MEMS device as optical actuator. The experimental results will be verified by comparing with the FEA modeling results.

Author(s):  
Mosfequr Rahman ◽  
John E. Jackson

The objective of this work is to study the effect of three important parameters such as photostrictive actuator thickness, incident light intensity and convective heat transfer coefficient on a silicon cantilever beam with thin photostrictive optical actuator film surface. The authors have developed a computational method useful for design of systems incorporating thin film photostrictive actuators. The element has been implemented in an in-house finite element code named BAMAFEM. A finite element for static analysis of photostrictive thin films has already been developed and verified with analytical analysis approach of another author. To the best of our knowledge, finite element parametric analysis of the photostrictive thin film has not been extensively studied, if studied at all. Photostrictive materials, such as PLZT, demonstrate significant photostrictive behavior under illumination by high-energy light, which can be considered a superposition of a bulk photovoltaic effect and a converse piezoelectric effect. Photostrictive actuators can directly convert photonic energy to mechanical motion. Photostrictive materials can produce strain as a result of irradiation from high-intensity light. Neither electric lead wires nor electric circuits are required. Thus, photostrictive actuators are relatively immune from electrical interference. They have potential use in numerous MEMS devices. At least from the computational point of view, it would be interesting to investigate the effect of different parameters in the actuation of beam using the thin film photostrictive actuators to develop a finite element model useful for design of numerous MEMS and NANO systems having photostrictive actuators.


2017 ◽  
Vol 10 (04) ◽  
pp. 1750036 ◽  
Author(s):  
Yunxia Zhou ◽  
Jun Zhu ◽  
Xingpeng Liu ◽  
Zhipeng Wu

Ferroelectric Pb(Zr[Formula: see text],Ti[Formula: see text]O3(PZT) thin film was grown on [Formula: see text]-type GaAs (001) substrate with SrTiO3 (STO) buffer layer by laser molecular beam epitaxy (L-MBE). The epitaxial process of the STO was in situ monitored by reflection high-energy electron diffraction (RHEED). The crystallographical growth orientation relationship was revealed to be (002) [Formula: see text] PZT//(002) [Formula: see text] STO//(001) [Formula: see text] GaAs by RHEED and X-ray diffraction (XRD). It was found that a small lattice mismatch between PZT and GaAs with a 45[Formula: see text] in-plane rotation relationship can be formed by inserting of a buffer layer STO. Besides, the enhanced electrical properties of the heterostructure were obtained with the short-circuit photocurrent increased to 52[Formula: see text]mA/cm2 and the better power conversation efficiency increased by 20% under AM1.5[Formula: see text]G (100[Formula: see text]mW/cm[Formula: see text] illumination. The work could provide a way for the application of this kind of heterostructure with high photocurrent response in optoelectronic thin film devices.


Author(s):  
Hong-Hao Yue ◽  
Gui-Lan Sun ◽  
Zong-Quan Deng ◽  
Horn-Sen Tzou

Based on the photovoltaic effect and the converse piezoelectric effect, the lanthanum-modified lead zirconate titanate (PLZT) actuator can transform the photonic energy to mechanical strain/stress — the photodeformation effect. This photodeformation process can be further used for non-contact precision actuation and control in various structural, biomedical and electromechanical systems. Although there are a number of design configurations of distributed actuators, e.g., segmentation and shaping, been investigated over the years, this study is to explore a new actuator configuration spatially bonded on the surface of shell structures to broaden the spatial modal controllability. A mathematical model of a new multi-degree-of-freedom (DOF) photostrictive actuator configuration is presented first, followed by the photostrictive/shell coupling equations of a cylindrical shell structure laminated with the newly proposed multi-DOF distributed actuator. Distributed microscopic photostrictive actuation and its contributing components are analyzed in the modal domain. Effects of shell’s curvature and actuator’s size are evaluated. Parametric analyses suggest that the new multi-DOF distributed actuator, indeed, provides better performance and control effect to shell actuation and control. This multi-DOF configuration can be further applied to actuation and control of various shell and non-shell structures.


1996 ◽  
Vol 433 ◽  
Author(s):  
J.T. Dawley ◽  
G. Teowee ◽  
B.J.J. Zelinski ◽  
D.R. Uhlmann

AbstractIn this study, the use of a fiber optic technique for the measurement of the piezoelectric properties of ferroelectric bulk and thin film samples was investigated. The strain and piezoelectric properties (namely the d33 coefficients) were measured using the MTI-2000 Fotonic Sensor, which uses the principle of the optical lever to resolve very small changes in sample displacement (1 Å). Using this technique, we were able to detect the very small strains associated with the converse piezoelectric effect for PVDF films and bulk PZT samples, and correlate the results with data acquired from direct piezoelectric effect measurement. Comparison of the data sets prove that the optical lever would be a useful optical technique for measuring of the d33 values of ceramic thin films, such as BaTiO3, ZnO, and PZT.


Author(s):  
Mosfequr Rahman ◽  
Masud Nawaz ◽  
Aniruddha Mitra ◽  
Nazanin Bassiri-Gharb ◽  
John E. Jackson

Photostrictive materials are lanthanum-modified lead zirconatetitanate (Pb, La)(Zr, Ti) O3 ceramics doped with WO3, called PLZT, exhibit large photostriction under uniform illumination of high-energy light. Photostrictive materials are ferrodielectric ceramics that have a photostrictive effect. Photostriction arises from a superposition of the photovoltaic effect, i.e. the generation of large voltage from the irradiation of light, and the converse-piezoelectric effect, i.e. expansion or contraction under the voltage applied. Photostrictive materials offer the potential for actuators with many advantages over traditional transducing electromechanical actuators made of shape memory alloys and electroceramics (piezoelectric and electrostrictive). Drawback of traditional actuators is that they require hard-wired connections to transmit the control signals which introduce electrical noise into the control signals; on the other hand PLZT actuators offer non-contact actuation, remote control, and are immune from electric/magnetic disturbances. The main goal of the research work is to investigate the feasibility of utilizing photostrictive materials as an optical actuator for Micro-Electro-Mechanical-Systems (MEMS) applications. In this investigation process both experimental and computational approaches have been implemented. In the experimental part of this research, a test set-up has been designed and developed to measure the photostriction effect of a PLZT thin film on a silicon wafer as smart beams. The experimental set-up includes high pressure short arc xenon lamp with lamp housing, power supply, lamp igniter, hot mirror, band pass filters, optical chopper, and laser sensor with sensor head and controller.1 μm PLZT thin film on the silicon wafer sample has been tested as a cantilever beam with different light intensities, and focusing the light at the different locations on the PLZT cantilever beam. The experiment has been performed for continuous and pulses of lights focusing on the PLZT optical actuator. An optical chopper was used to make pulses of light on the PLZT cantilever beam. Also, a computational finite element method useful for design of systems incorporating thin film photostrictive actuators has already been developed by the authors. The element has been implemented in an in-house finite element code. This derived finite element for continuous illumination of light on the photostrictive thin film has been used to investigate the application of photostrictive actuators for the different structures and various boundary conditions of microbeams with various actuator locations and length intensities. A successful conclusion of these tasks will affirm the potential of the PLZT optical actuator to use in the MEMS devices.


Author(s):  
Hong-Hao Yue ◽  
Zong-Quan Deng ◽  
Horn-Sen Tzou

Non-contact wireless actuation offers many advantages to precision control, as compared with conventional hard-wired actuation mechanisms. High-energy laser or ultraviolet lights irradiating on photostrictive materials can induce a photodeformation process involving two fundamental effects: 1) the photovoltaic effect and 2) the converse piezoelectric effect. This photodeformation process transforms photonic energy to mechanical strain/stress that can be directly used for actuation and control applications. With specific design configurations, the photodeformation process of photostrictive actuators can induce various control forces and moments applied to precision manipulation and control of mechatronic and structronic systems. In this study, fundamental photodeformation coupling mechanisms among photo-thermo-electromechanical/control fields are investigated and parametric evaluation of various design parameters of a hybrid photostrictive/elastic beam is conducted. A mathematical model for a laminated beam with segmented photostrictive actuators is defined, followed by photodeformation induced modal control forces and moments of segmented actuators. Characteristics of actuation and control effectiveness of distributed photostrictive actuators at various locations, natural modes and illumination intensities are analyzed in case studies. The most effective actuator location(s) for controlling the first four beam modes are illustrated. Finally, with scheduling light irradiations on various photostrictive actuators, one can control multiple beam modes, allowed by control electronics and material response.


Author(s):  
Mosfequr Rahman ◽  
John E. Jackson

The objective of this research work is to investigate the displacement control of smart beams of different boundary conditions using photostrictive optical actuators. The authors have developed a computational method useful for design of systems incorporating thin film photostrictive actuators. The element has been implemented in an in-house finite element code. A finite element for static analysis of photostrictive thin films has already been developed and verified with analytical analysis approach of another author. Also the effect of different parameters such as actuator thickness, incident light intensity and convective heat transfer coefficient in the actuation of beam using the thin film photostrictive actuators has been investigated by the authors. In this current work, derived finite element for static analysis of photostrictive thin films has been used to investigate the application of photostrictive actuators for optimum displacement control of beam structure of various boundary conditions. Studies are performed on the effects of various actuator location and length on photoactuation. Photostrictive materials are ferrodielectric ceramics that have a photostrictive effect. The photostrictive effect arises from a superposition of the photovoltaic effect and the converse piezoelectric effect. Photostrictive materials are (Pb, La)(Zr, Ti) O3 ceramics doped with WO3, called PLZT, exhibit large photostriction under uniform illumination of high-energy light. Photostrictive actuators can directly convert photonic energy to mechanical motion. Photostrictive materials can produce strain as a result of irradiation from high-intensity light. Neither electric lead wires nor electric circuits are required. Thus, photostrictive actuators are relatively immune from electrical interference. They have potential use in numerous MEMS devices where actuation of microbeams is a common phenomenon.


Metals ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 1235 ◽  
Author(s):  
Moshe Nahmany ◽  
Victor Shribman ◽  
Shlomo Levi ◽  
Dana Ashkenazi ◽  
Adin Stern

This novel research aims to examine the macro and microstructural bonding region development during magnetic pulse welding (MPW) of dissimilar additive manufactured (AM) laser powder-bed fusion (L-PBF) AlSi10Mg rod and AA6060-T6 wrought tube, using both optimal- and high-energy welding conditions. For that purpose, various joint characterisation methods were applied. It is demonstrated that high-quality hermetic welds are achievable with adjusted MPW process parameters. The macroscale analysis has shown that the joint interfaces are deformed to a waveform shape; the interface is starting relatively planar, with waves forming and growing in the welding direction. The observed thickening of the flyer’s wall after welding is the result of its diametral inward deformation, taking place during the process. A slight increase in microhardness was adjacent to the faying interfaces; a higher increase was measured on the AlSi10Mg material side, while a smaller one was observed on the AA6060 side. Along the wavy interfaces, resolidified “pockets” of material or occasionally discontinuous short layers exhibiting different morphologies, were detected. The jet residues are typically located towards the end of the weld, confirming a temperature rise that exceeds the melting temperature of both alloys. Far from the weld zone, extremely thin-film deposits were clearly observed on the inner flyer surfaces. The formation of isolated Si particles and thin-film deposits may point out that the local increase in temperatures leads to melting or even evaporation vaporisation of superficial layers from the colliding parts. It is worth noting that this type of jet residue was discovered for the first time in the present research. The current research work is expected to provide an understanding of weld formation mechanisms of additively manufactured parts to conventional wrought parts conforming to existing wrought/wrought weld knowledge.


Author(s):  
Mosfequr Rahman ◽  
Hunter Taylor ◽  
Abdur Rahman ◽  
Gustavo Molina

Photostriction is best defined as the generation of strain in a material via light irradiation. In essence the photostrictive effect is a result of the combination of the photovoltaic and converse-piezoelectric effects. When light comes into contact with the surface of a photostrictive material, the photovoltaic effect causes the generation of a large amount of voltage. The converse-piezoelectric effect in turn converts the produced voltage into mechanical motion, which induces strain in the material. Photostrictive ceramics are considered excellent materials for use in advanced actuation technologies. This is due to their ability to be activated through irradiation of light, which provides advantages over conventional actuators, which include remote control capability, freedom from physical actuation, and reduced electromagnetic (EM) interference. Conversely conventional actuators require hard wired connections to transmit control signals that can produce EM interference, creating signal noise. Photostrictive ceramics have also found use in the manufacturing of micro electromechanical systems, also known as MEMS technology, mostly due to their wireless capabilities. Photostrictive materials are ferroelectric ceramics that exhibit the photostrictive effect. PLZT, (Pb, La)(Zr, Ti) O3 ceramics doped with WO3, exhibit large photostriction deflection under uniform illumination of light, and have potential uses in numerous micro-electro-mechanical systems as a result of this property. The objective of this research is to numerically investigate the effect of light intensity on transverse deflection of an overhanging beam model, and to assess the effect actuator size has on deflection for a propped cantilever beam model using finite element analysis technique. The current research results is then compared with the validated results of other studies on PLZT using other model types. From this numerical investigation it has been observed that for an overhanging beam model, the transverse deflection of PLZT actuators has a direct relationship to the intensity of the light applied in order to induce photostriction. It has also been observed that this relationship applies over a large range of light intensity upwards of 4000 mW/cm2, boosting maximum deflection into the micron range (1E−6 – 1E−7 m). With regard to the propped cantilever beam model, it has been observed that incomplete PLZT coverage of the cantilever beam portion of the model caused upwards transverse deflection. However, as the amount of PLZT actuator was increased, the deflection behavior exponentially approached negative values. By comparing these results with similar studies on alternate model types, it was confirmed that for beams deposited with PLZT actuator, light intensity and actuator size and surface coverage will affect the transverse deflection of the beam in the same manner regardless of the beam model.


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