Attenuation Coefficients Prediction for Reflection Layers of Solidly Mounted Resonators via Phononic Band Structures
The solidly mounted resonator (SMR) is one of the major focuses in filter research because it can be used in the frequency above GHz range. The reflection structure composed of periodic layers is vital to the performance of this type of resonator due to its capability in confining acoustic energy in the piezoelectric layer. Therefore the design of reflection layers is a key issue in the development of SMRs. The performance of reflection layers is revealed by the attenuation coefficient that governs the energy distribution in the periodic structures. The behavior of waves propagate in the finite periodic structures are solved by transfer matrix method while the Hill’s method is employed to find the exact solutions in the corresponding phononic crystal. By comparing their displacement fields, it is observed that the attenuation coefficients of infinite and finite periodic structures are almost identical provided the number of layers is adequate. Therefore referring the design of reflection layers to the band structures of the corresponding phononic crystals is reasonable although the attenuation coefficient of a finite periodic structure can not be calculated directly. For one dimensional phononic crystals, the attenuation coefficient becomes larger as the first band gap gets wider. Moreover, the characteristic impedance ratio and density ratio between two interlaced materials increase simultaneously; the first band gap width also increases. This character can be adopted as a guideline in the design of solidly mounted resonators. Based on this guideline, Al and W are chosen as materials for the reflection structure. By calculating its electric impedance, the resonant frequency is found to be the same as the center frequency of first band gap of the corresponding phononic crystal. It shows that employing this stop band character to design the reflection structure of SMR is adequate and efficient.