Why Is (111) Silicon a Better Mechanical Material for MEMS: Torsion Case

Author(s):  
Donghun Kwak ◽  
Jongpal Kim ◽  
Sangjun Park ◽  
Hyoungho Ko ◽  
Dong-Il Cho

This paper shows that using the Finite Element Method (FEM), the torsional stiffness of silicon varies by the least amount on silicon (111) with respect to crystallographic directions, when compared to silicon (100) and (110). The used simulator is ANSYS 5.7 with the element type of Solid 64. As a simulation model, we use a simple torsion system, in which a rotational inertia is attached to the center of clamped-clamped beam with a rectangular cross-section. From the results of the modal analysis, the torsional stiffness is derived using the formula between the natural frequency and the torsional stiffness. Simulation results show that the maximum variations of the torsional stiffness on silicon (111), (100) and (110) are 2.3%, 26.5%, and 31.2%, respectively. This implies that on <100> and <110> silicon wafers, substantially different physical dimensions are necessary for devices with the same torsional characteristics, but with different orientations. Therefore, <111> silicon wafers represent a more suitable substrate to design and fabricate torsional micro and nano systems.

2012 ◽  
Vol 482-484 ◽  
pp. 792-795
Author(s):  
Ye Qiang Lu ◽  
Wen Feng Wei ◽  
Yi Long Zhang

Analyzing the strain expression referring to Castigliano’s Theorem after analysis of the tripod type universal coupling under drawing force comes to the simplified mode of tripod type universal coupling. And with the help of simplified mode, it concludes that the minimum strain occurs when the radius of cross-section of the circlip equals to the depth of groove. After setting material attributes, boundary conditions, contacts of the tripod type universal coupling, and static simulation with the finite element method in SolidWorks, the strain of the universal couplings is carried out. Theoretical analysis and simulation results show that when the radius of cross-section of the coupling equals to the depth of groove, the strain is minimum.


2013 ◽  
Vol 481 ◽  
pp. 230-234 ◽  
Author(s):  
Meng Kao Yeh ◽  
Chien Ming Kao

This paper investigates the effect of physical parameters of a rounded crack on the stress concentration near crack tip. The depth and radius at the crack tip are the two physical parameters concerned in this study. The finite element method was used to evaluate the stress value at the crack tip for a silicon chip with a tiny crack under tensile stress. Element type, shape and physical parameters of crack were varied to study their effect on the stress concentration near the crack. The simulation results were compared with the theoretical value, and the better physical parameters as well as the element type, element shape were discussed.


2021 ◽  
Vol ahead-of-print (ahead-of-print) ◽  
Author(s):  
Dragan D. Milašinović ◽  
Aleksandar Landović ◽  
Danica Goleš

PurposeThe purpose of this paper is to contribute to the solution of the fatigue damage problem of reinforced concrete frames in bending.Design/methodology/approachThe problem of fatigue damage is formulated based on the rheological–dynamical analogy, including a scalar damage variable to address the reduction of stiffness in strain softening. The modal analysis is used by the finite element method for the determination of modal parameters and resonance stability of the selected frame cross-section. The objectivity of the presented method is verified by numerical examples, predicting the ductility in bending of the frame whose basic mechanical properties were obtained by non-destructive testing systems.FindingsThe modal analysis in the frame of the finite element method is suitable for the determination of modal parameters and resonance stability of the selected frame cross-section. It is recommended that the modulus of elasticity be determined by non-destructive methods, e.g. from the acoustic response.Originality/valueThe paper presents a novel method of solving the ductility in bending taking into account both the creep coefficient and the aging coefficient. The rheological-dynamical analogy (RDA) method uses the resonant method to find material properties. The characterization of the structural damping via the damping ratio is original and effective.


2018 ◽  
Vol 159 ◽  
pp. 02030 ◽  
Author(s):  
Ojo Kurdi ◽  
Mohd Shukri Yob ◽  
Awisqarni Haji Ishamuddin ◽  
Agus Suprihanto ◽  
Susilo Adi Widyanto ◽  
...  

Torsional stiffness is important parameter of chassis that affect the handling performance of chassis. Torsional stiffness can be determined using Finite Element Method (FEM) in early stage design of its. In order to validate the FEM result, experimental work needs to be done. The fixture has been design in simpler stucture, flexible for any kind of chassis and using a simple measurement’s equipment such as dial indicator and load cell. Twist fixture has been designed for measuring of torsional stiffness of TATA cab chassis indirectly. The fixture measured the deflection caused by torsion subjected to the chassis. The torsional stiffness was calculated based on measured displacement of chassis. The result of comparison shows that the experimental results in agreement with the simulation results. Therefore, the simulation results of TATA cab chassis model are valid.


2015 ◽  
Vol 1096 ◽  
pp. 417-421
Author(s):  
Pei Luan Li ◽  
Zi Qian Huang

By the use of finite element method, this paper predicts the effects of the shapes of reinforcements with different ductility (Co) on the effective elastic response for WC-Co cemented carbide. This paper conducts a comparative study on the material properties obtained through theoretical model, numerical simulation and experimental observations. Simulation results indicate that the finite element method is more sophisticated than the theoretical prediction.


2011 ◽  
Vol 2011 ◽  
pp. 1-10
Author(s):  
Yi Wang ◽  
Nai Xian Hou ◽  
Zhu Feng Yue

The experiments and finite element simulations of composite laminate with stitching are carried out. Firstly, the monotonous tensile experiments with and without stitching are conducted to investigate the influence of stitch reinforcement on the composite laminate. Secondly, the finite element method (FEM) is employed to simulate the tensile process of specimens, and the link element is introduced to simulate the stitching. The experiment results shows that the stitching has little influence on the damage load under monotonous tensile load, while there is a significant influence on the changing of strain. The FEM results are consistent with the experiment results, which means that the link element can be used to study the stitching of the composite laminate. The simulation results also show that the distributions of strain are changed obviously due to the existence of the stitching. Research results have a significant role on the design of the composite structures with and without stitching.


2018 ◽  
Vol 196 ◽  
pp. 02010
Author(s):  
Viacheslav Shirokov ◽  
Alexey Soloviev ◽  
Tatiana Gordeeva

The research paper focuses on internal forces determination in the elements of modular buildings under wind load. It provides a methodology for determining dynamic characteristics of a building and for calculating wind loads. This method is based on the following assumptions: coupling of the modules elements is rigid; coupling of block-modules with foundations is hinged-fixed; connection of blocks to each other is hinged in angular points; the floor disk in its plane is not deformed. On the basis of these assumptions the authors derived approximate and refined equations for determining forces in modules elements under static and pulsation components of wind load. The equation of bending moments determination in the pillar bearing cross-section is obtained by approximation of the graph of moments variation, calculated for the spectrum of the ratio of the pillar stiffness and the floor beam in the range from 1/64 to 64. The paper further introduces the calculation results of forces based on the proposed methodology and on the finite element method. The calculations were done while taking different values of wind load and different number of storeys in a building (from 1 to 4 floors). The obtained results are similar, the error does not exceed 5%.


2011 ◽  
Vol 66-68 ◽  
pp. 373-377
Author(s):  
Yue Ying Zhu ◽  
Gui Fan Zhao ◽  
You Shan Wang ◽  
Li Liang Yin

The finite element method was used to establish model of radial tire and analysis the characteristics of tire in driving state to improve the accuracy of simulation on driving performance of off-road vehicle. The dynamics models of the vehicle and its subsystem are designed to provide an off-line dynamic simulation for vehicle driving performance. Simulation and analysis for the vehicle selected previously are made, and the simulation results are compared and analyzed in detail to prove the effectiveness of the new method.


2011 ◽  
Vol 121-126 ◽  
pp. 3258-3262
Author(s):  
Long Sheng Bao ◽  
Dan Yang ◽  
Ling Yu

The grand bridge of Fu Feng is prestressed concrete cross-section continuous girder, which is reinforced with external prestressing. Construction monitoring is based on the measured data, and using the finite element method to calculate, it need to analyze the control of the stress and deflection in the construction to ensure to make the construction could be completed on schedule and to reach an ideal type. The field monitoring result indicates that the type of bridge did improve and reach the requirement of design after reinforcement.


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