A Novel 3-DOF Micromanipulator

2003 ◽  
Author(s):  
Heng-Chung Chang ◽  
Julius Ming-Lin Tsai ◽  
Hsin-Chang Tsai ◽  
Weileun Fang
Keyword(s):  
Mechanical Properties ◽  
Degrees Of Freedom ◽  
Single Crystal Silicon ◽  
Robot Arm ◽  
Comb Drive ◽  
Crystal Silicon ◽  
Monolithically Integrated ◽  
Out Of Plane ◽  
Superior Mechanical Properties ◽  
Three Degrees Of Freedom

In this study, a stiff HARM (high aspect ratio micromachining) manipulator is reported. Since the micromanipulator is made of single crystal silicon, it has superior mechanical properties. The micromanipulator is consisted of a position stage and a robot arm. Moreover, the robot arm is monolithically integrated with the position stage through the micromachining fabrication processes. Hence, its in-plane and out-of-plane positions are precisely controlled by two comb drive actuators and a vertical comb, respectively. In applications, the robotarm, which has three degrees of freedom (DOF), can be exploited as a micromanipulator.

A CMOS-MEMS Micromirror With Large Out-of-Plane Actuation

2001 ◽  
Author(s):  
Huikai Xie ◽  
Yingtian Pan ◽  
Gary K. Fedder
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Single Crystal Silicon ◽  
Comb Drive ◽  
Crystal Silicon ◽  
Optical Scanners ◽  
Vibratory Gyroscopes ◽  
Out Of Plane ◽  
Potential Applications ◽  
Cmos Mems

Abstract This paper reports a high-aspect-ratio, silicon-based vertical comb drive used to actuate a micromirror. The large displacement is achieved by the curled-up comb drives. This high-aspect-ratio vertical comb drive uses the vertical capacitance gradient of the sidewall capacitor existing between comb fingers. The electrical isolation is realized by using the undercut of the deep Si etch. The 1 mm by 1 mm micromirror is made of an approximately 40 μm-thick single-crystal silicon membrane with aluminum coated on the surface. The mirror has a peak-to-peak curling of 0.5 μm. The mechanical rotation angle of the mirror is ±5°. The fabrication process is compatible with standard CMOS processes, and there is no need for wafer bonding and accurate front-to-backside alignment. Such capability has potential applications in optical switches, optical scanners, interferometric systems, and vibratory gyroscopes.

Nanoindentation Characterization of Single-Crystal Silicon With Oxide Film

2021 ◽  
Author(s):  
Lianmin Yin ◽  
Yifan Dai ◽  
Hao Hu
Keyword(s):  
Mechanical Properties ◽  
Plastic Deformation ◽  
Oxide Film ◽  
Single Crystal ◽  
Deformation Zone ◽  
Single Crystal Silicon ◽  
Plastic Deformation Zone ◽  
Crystal Silicon ◽  
Ultra Precision

Abstract In order to obtain ultra-smooth surfaces of single-crystal silicon in ultra-precision machining, an accurate study of the deformation mechanism, mechanical properties, and the effect of oxide film under load is required. The mechanical properties of single-crystal silicon and the phase transition after nanoindentation experiments are investigated by nanoindentation and Raman spectroscopy, respectively. It is found that pop-in events appear in the theoretical elastic domain of single-crystal silicon due to the presence of oxide films, which directly leads the single crystal silicon from the elastic deformation zone into the plastic deformation zone. In addition, the mechanical properties of single-crystal silicon are more accurately measured after it has entered the full plastic deformation.

Analysis and simulation of a new Cartesian cable-suspended robot

2009 ◽  
Vol 224 (8) ◽  
pp. 1717-1726 ◽  
Author(s):  
G Castelli ◽  
E Ottaviano ◽  
A González
Keyword(s):  
Numerical Simulation ◽  
Degrees Of Freedom ◽  
Robot Arm ◽  
Fixed Frame ◽  
Cartesian Space ◽  
Compliant Assembly ◽  
Moving Platform ◽  
Geometry Analysis ◽  
Three Degrees Of Freedom

In this article, a manipulator is presented belonging to the class of cable-suspended robots, for which the cable length variations are related by suitable functions in order to achieve specific kinematic characteristics. In particular, in this article, a Cartesian cable-suspended robot is proposed that has eight cables to have three degrees of freedom (DOF) in Cartesian space. The eight cables of the robot are arranged in parallel by pairs with identical length, with the aim of constraining the moving platform to keep a constant orientation with respect to the fixed frame. The robot can be used for selective compliant assembly robot arm (SCARA) motions (when an additional revolute actuated joint is placed on the moving platform) for a variety of applications in which a large workspace is required. In this article, a geometry analysis of the robot is presented together with a numerical simulation of the kinetostatics and dynamics to investigate the robot's performances in several operative conditions. Furthermore, a characterization of the position workspace regions is reported for this cable-suspended robot.

Micro-Scale Cantilever Testing of Linear Elastic and Elastic-Plastic Materials

2012 ◽  
Vol 525-526 ◽  
pp. 57-60 ◽  
Author(s):  
J.E. Darnbrough ◽  
S. Mahalingam ◽  
Peter E.J. Flewitt
Keyword(s):  
Mechanical Properties ◽  
Single Crystal Silicon ◽  
Ion Milling ◽  
Crystal Silicon ◽  
Micro Scale ◽  
Elastic Plastic ◽  
Linear Elastic ◽  
Dual Beam ◽  
The Individual ◽  
Elastic Plastic Materials

t is increasingly a requirement to be able to determine the mechanical properties of materials: (i) at the micro-scale, (ii) that are in the form of surface coatings and (iii) that have nanoscale microstructures. As a consequence micro-scale testing is an important tool that has been developed to aid the evaluation of the mechanical properties of such materials. In this work cantilever beam specimens (typically 2μm by 2μm by 10μm in size) have been prepared by gallium ion milling and then deformed in-situ within a FEI Helios Dual Beam workstation. The latter is achieved using a force probe with a geometry suitable for loading the micro-scale test specimens. Thus force and displacement can be measured together with observing the deformation and fracture of the individual specimens. This paper considers the evaluation of the mechanical properties in particular elastic modulus, yield strength and fracture strength of materials that result in relatively large deflections to the micro-scale cantilever beams. Two materials are considered the first is linear elastic single crystal silicon and the other elastic-plastic nanocrystalline (nc) nickel. The results are discussed with respect to the reproducibility of this method of mechanical testing and the evaluated properties are compared with those derived by alternative procedures.

Robust Trajectory Following Control of Robotic Systems

1985 ◽  
Vol 107 (4) ◽  
pp. 308-315 ◽  
Author(s):  
S. N. Singh ◽  
A. A. Schy
Keyword(s):  
Degrees Of Freedom ◽  
Digital Simulation ◽  
Robotic Systems ◽  
Control Law ◽  
Robot Arm ◽  
Control Laws ◽  
Payload Uncertainty ◽  
Trajectory Following ◽  
And Control ◽  
Three Degrees Of Freedom

Using an inversion approach we derive a control law for trajectory following of robotic systems. A servocompensator is used around the inner decoupled loop for robustness to uncertainty in the system. These results are applied to trajectory control of a three-degrees-of-freedom robot arm and control laws Cθ and CH for joint angle and position trajectory following, respectively, are derived. Digital simulation results are presented to show the rapid trajectory following capability of the controller in spite of payload uncertainty.

Effect of Hydrogen on the Mechanical Properties of Silicon Crystal Surface

2013 ◽  
Author(s):  
Hayato Izumi ◽  
Ryota Mukaiyama ◽  
Nobuyuki Shishido ◽  
Shoji Kamiya
Keyword(s):  
Mechanical Properties ◽  
Plastic Deformation ◽  
Crystal Surface ◽  
Silicon Crystal ◽  
Single Crystal Silicon ◽  
Displacement Curve ◽  
Hydrogen Atoms ◽  
Crystal Silicon ◽  
Boron Doped ◽  
Energy Dissipated

This paper reports the mechanical properties of single crystal silicon surface changed with hydrogen atoms trapped by underwater boiling treatment. Nanoindentaion test using a Berkovich indenter in six different indentation loads ranging from 100 μN to 1000 μN was conducted to obtain the load-displacement curve. The energy dissipated in plastic deformation, i.e. plasticity energy, during indentation on silicon wafers with different carrier concentration (undoped, lightly and heavily boron doped silicon) were compared. After boiling treatment, increment in the plasticity energy was observed on silicon containing boron. This result suggests that hydrogen atoms trapped inside silicon enhanced dislocation mobility leading to larger plastic deformation.

Sign in / Sign up

Export Citation Format

Share Document