Development of Multi-Layered Composite PZT Thin Films for Active Sliders in Hard Disk Drives

2002 ◽  
Author(s):  
Norio Tagawa ◽  
Ken-ichi Kitamura ◽  
Atsunobu Mori
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Sol Gel ◽  
Hard Disk Drives ◽  
Hard Disk ◽  
Layered Composite ◽  
The Novel ◽  
Disk Drives ◽  
Pzt Thin Films ◽  
Pzt Thin Film

This paper describes the development of novel PZT thin films for active sliders in hard disk drives. So far, it is common that single-layered thin films are used as micro-actuators for conventional PZT thin films such as sol-gel or sputtered thin films. In this study, however, the novel composite PZT thin films are developed. The feature is that sol-gel PZT thin film is deposited on sputtered PZT thin film fabricated on Pt/Ti bottom electrode. These multilayered composite PZT thin films are found to have the higher (111) preferred orientation as well as better P-E hysteresis loop characteristics than not only sol-gel PZT thin films but also sputtered PZT thin films. Furthermore, the piezoelectric strain constant d31 for the novel PZT thin films is identified to be 189 × 10−12m/V. This value is 2.0 times higher than that for conventional PZT thin films and it is found that the novel PZT thin films have good piezoelectric properties.

Design and evaluation of PZT thin-film micro-actuator for hard disk drives

2004 ◽  
Vol 116 (2) ◽  
pp. 329-335 ◽  
Author(s):  
Yang Jing ◽  
Jianbin Luo ◽  
Xiaoxing Yi ◽  
Xin Gu
Keyword(s):  
Thin Film ◽  
Hard Disk Drives ◽  
Hard Disk ◽  
Disk Drives ◽  
Micro Actuator ◽  
Pzt Thin Film

MEMS-Based Active Sliders With Multi-Layered Composite PZT Thin Films in Hard Disk Drives

2002 ◽  
Author(s):  
Norio Tagawa ◽  
Atsunobu Mori
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Hard Disk Drives ◽  
Design Procedure ◽  
Layered Composite ◽  
Machining Process ◽  
Flying Height ◽  
Pzt Thin Films ◽  
Micro Actuators ◽  
And Control

This paper describes MEMS-based active sliders with micro-actuators. The proposal active slider uses PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. The design procedure for the active slider is discussed. In addition, novel multi-layered composite PZT thin film micro-actuators, which are very important functional micro-devices, are studied, and it is shown that the recently developed PZT thin films have better piezoelectric characteristics than not only conventional sol-gel derived PZT thin films but also sputtered PZT thin films. The micro-machining process for the active slider is also developed and the pico-size active slider is fabricated. The technical issues related to the fabrication of MEMS-based active sliders are discussed.

A Study on the Piezoelectric Properties of PZT and Doped PZT Thin Films by Sol-Gel Method

2010 ◽  
Vol 663-665 ◽  
pp. 650-653
Author(s):  
Jin Moo Byun ◽  
Jeong Sun Han ◽  
Jae Hyoung Park ◽  
Seong Eui Lee ◽  
Hee Chul Lee
Keyword(s):  
Thin Films ◽  
Piezoelectric Coefficient ◽  
Energy Harvester ◽  
Sol Gel ◽  
Pure Perovskite Structure ◽  
Pzt Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
Si Substrates ◽  
Pzt Thin Film

This study examined the effect of crystalline orientation and dopants such as Nb and Zn on the piezoelectric coefficient of sol-gel driven Pb1(Zr0.52Ti0.48)O3(PZT) and doped PZT thin films. Crack-free 1-μm-thick PZT and doped PZT thin films prepared by using 2-Methoxyethanol-based sol-gel method were fabricated on Pt/Ti/SiO2/Si substrates. The highly (111) oriented PZT thin films of pure perovskite structure could be obtained by controlling various parameters such as a PbTiO3 seed layer and a concentration of sol-gel solution. The Nb-Zn doped PZT thin films exhibited high piezoelectric coefficient which was about 50 % higher than that of undoped PZT thin film. The highest measured piezoelectric coefficient was 240 pC/N, which could be applicable to piezoelectrically operated MEMS actuator, sensor, or energy harvester devices.

Rupture and Reformation of Ultra-Thin Surface Films

2010 ◽  
Author(s):  
William W. F. Chong ◽  
Mircea Teodorescu ◽  
Homer Rahnejat
Keyword(s):  
Thin Film ◽  
Data Storage ◽  
Surface Film ◽  
Hard Disk Drives ◽  
Hard Disk ◽  
Surface Films ◽  
Disk Drives ◽  
Film Rupture ◽  
Near Surface ◽  
Ultra Thin Film

In lubricated contact conjunctions film ruptures close to the exit boundary. This significantly affects the load carrying capacity and can lead to direct surface interactions. Nano-scale films (several molecular diameters of the lubricant) are no exception, a fact that has been observed using ellipsometry studies for ultra-thin film conjunctions representative for high storage capacity hard disk drives. Immediately beyond the film rupture an area of cavitation occurs and the continuity of flow condition is breached. It has been shown that for molecularly smooth surfaces solvation effect becomes dominant. This means that the contact exit is subject to discrete drainage of lubricant and may be devoid of a sufficient lubricant for film reformation to occur. This can be a stumbling block in an increasing quest to increase the data storage density of hard disk drives. Wear can become a problem as well as non-uniformity of free surface film at the inlet meniscus. It has been noted that peaks of lubricant can gather in some places, a phenomenon referred to as lubricant mogul. These localized piles of lubricant can exceed the nominally aimed for lubricant film thickness necessary for a given data storage level. This paper carries out an in-depth prediction of ultra thin film lubricant behavior through the contact. Hydrodynamic as well as near surface effects and intermolecular interactions responsible for the supply, formation, cavitation and reformation of thin films in the slider-disk conjunction have been considered.

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