Design and fabrication of MEMS-based active slider using double-layered composite PZT thin film in hard disk drives
2003 ◽
Vol 39
(2)
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pp. 926-931
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2004 ◽
Vol 116
(2)
◽
pp. 329-335
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2003 ◽
Vol 9
(5)
◽
pp. 362-368
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Keyword(s):
Keyword(s):
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1992 ◽
Vol 28
(5)
◽
pp. 2124-2126
◽
2015 ◽
Vol 9
(1)
◽
pp. JAMDSM0010-JAMDSM0010
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Keyword(s):
Keyword(s):
2002 ◽
Vol 2002
(0)
◽
pp. 70-71
Keyword(s):