Magneto-Thermo-Fluidic (MTF) MEMS by Direct-Write (DW) Laser Micro-Fabrication (LμF)
Abstract Keeping up with the highlight topic of this year’s ASME MEMS Symposium 2000 “Beyond Traditional Barriers”, this paper reports on operational principles, scaling, modeling and fabrication issues for magneto-fluidic MEMS. The research is an integral part of the on-going Laser Fabrication Program at Arizona State University. It is the premise of this paper that novel MEMS devices and applications can evolve by integrating materials with unique properties in new micro device designs (Grimes, 1997). Laser processing techniques, for 5μ-thick magnetic films on silicon, have already been reported elsewhere by the same authors (Vakanas et al, 2000). The focus of the current work is on expanding the applications envelop of laser-fabricated microstructures on magnetic thick films to enable new high-volume semiconductor and MEMS devices. Research results are presented in the form of preliminary laser-based rapid prototyping and fabrication (RP&F) as well as comparative taxonomies of operational principles and applications in microfluidics and micromagnetics, leading to the conceptual design of micro and meso -scale MHD and MTF devices. The paper concludes with the on-going research activity and remaining challenges.