Diagnosis of MEMS Packages Using Speckle Correlation Method: An Application in Pressure Sensor Packaging

2000 ◽  
Author(s):  
Xiantao Yan
Keyword(s):  
Pressure Sensor ◽  
Glass Bead ◽  
Pressure Sensors ◽  
Correlation Method ◽  
Ccd Camera ◽  
Fuel Vapor ◽  
Thermal Shock Test ◽  
Sensor Applications ◽  
Speckle Correlation ◽  
Speckle Patterns

Abstract Cracked glass beads embedded in the plastic housing material of fuel vapor pressure sensors have been observed after a few hundreds of cycles of thermal shock test. In order to diagnose the root cause of the cracked glass bead, the speckle correlation method is used to in-situ measure the thermal deformation field on the surface of the glass bead. Measurements are taken at 130°C, 26°C and −40°C. The speckle patterns at different temperature are recorded digitally by a CCD camera with a resolution of 1024×1024 pixels. Every two sequential speckle patterns are compared to yield the displacement field of the sample. Then the strain fields are calculated by a finite deformation formulation. Results reveal that the material made of the glass bead is highly non-uniform, and there exists a highly tensile strain zone on the surface of the glass bead. This is correlated with the location of cracking in the bead. Moreover, there is a sliding zone along the boundary of the glass bead, which may result in leakage. As a replacement for glass bead, a metal bead embedded in housing material is examined. Experimental results show that strain level in the metal bead is lower than that in the glass bead, which will reduce disturbance on the sensor part. In addition to that, there are no potential cracking and leakage problems in the pressure sensor applications. Therefore, the metal bead is recommended for future pressure sensor applications.

Automatic Measurement of Concrete Deformation Field under Uniaxial Compression Based on DSCM

2011 ◽  
Vol 320 ◽  
pp. 58-63 ◽  
Author(s):  
Wei Weng ◽  
Rui Dong Peng ◽  
Hong Bin Liu ◽  
Wei Jia Ma ◽  
Sheng Hua Zhang
Keyword(s):  
Uniaxial Compression ◽  
Experimental Studies ◽  
Correlation Method ◽  
Ccd Camera ◽  
Compression Process ◽  
Full Field ◽  
Digital Speckle Correlation Method ◽  
Speckle Correlation ◽  
Digital Speckle ◽  
Digital Speckle Correlation

As a kind of optical approach to measure full field deformation with the properties of non-contact, Digital Speckle Correlation Method (DSCM) has been adopted widely with the development of computer technology. The deformation of concrete under external loads is usually uneven and thus it should be characterized by full filed measurement so as to obtain accurate results. It should be effective for engineering to monitor the deformation of concrete by using digital speckle correlation method, and such monitoring is helpful to study the law of uneven deformation of concrete and discover its damage characteristics. The images of the surface of concrete specimens at the different stress were captured and recorded with a high-resolution CCD camera during uniaxial compression process. An own software was developed to analyze these images by DSCM. The nature texture of the specimen surface were searched and matched in different images, therefore the displacement field and the strain field of the surface of concrete specimens were calculated out. Experimental studies have shown that digital speckle correlation method can be well used to calculate the accurate deformation of concrete just through a direct photograph of concrete surface under different loads.

scholarly journals Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications

2020 ◽  
Vol 11 ◽  
pp. 14
Author(s):  
Ahmad Dagamseh ◽  
Qais Al-Bataineh ◽  
Zaid Al-Bataineh ◽  
Nermeen S. Daoud ◽  
Ahmad Alsaad ◽  
...  
Keyword(s):  
Thermal Stress ◽  
Pressure Sensor ◽  
Membrane Structure ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Membrane Thickness ◽  
Capacitive Pressure Sensor ◽  
The Finite Element Method ◽  
Sensor Applications ◽  
Opposite Behavior

In this paper, mathematical modeling and simulation of a MEMS-based clamped square-shape membrane for capacitive pressure sensors have been performed. Three types of membrane materials were investigated (i.e. Zinc Oxide (ZnO), Zinc Sulfide (ZnS) and Aluminum Nitride (AlN)). Various performance parameters such as capacitance changes, deflection, nonlinearity, the sensitivity of the membrane structure for different materials and film-thicknesses have been considered using the Finite Element Method (FEM) and analytically determined using the FORTRAN environment. The simulation model outperforms in terms of the effective capacitance value. The results show that the membrane deflection is linearly related to the applied pressure. The ZnS membrane provides a capacitance of 0.023 pico-Farad at 25 kPa with a 42.5% relative capacitance changes to reference capacitance. Additionally, the results show that for ZnO and AlN membranes the deflection with no thermal stress is higher than that with thermal stress. However, an opposite behavior for the ZnS membrane structure has been observed. The mechanical and capacitance sensitivities are affected by the membrane thickness as the capacitance changes are inversely proportional to the membrane thickness. Such results open possibilities to utilize various materials for pressure sensor applications by means of the capacitance-based detection technique.

Sub-Feature Speckle Interferometry: A New Approach To Temperature Measurement

1995 ◽  
Vol 387 ◽  
Author(s):  
D. Burckel ◽  
S. H. Zaidi ◽  
S. R. J. Brueck
Keyword(s):  
Temperature Measurement ◽  
Cross Correlation ◽  
Measurement Accuracy ◽  
Speckle Interferometry ◽  
New Approach ◽  
Full Field ◽  
Sensor Applications ◽  
Speckle Correlation ◽  
Interference Fringes ◽  
Speckle Patterns

AbstractA new speckle technique, sub-feature speckle interferometry, is introduced that relies on the amplitude interference of two independent speckle patterns, originating from coherent illumination, using an optical system that produces interferometric quality interference fringes on a scale comparable to the speckle correlation length. Examples are given for in-plane translation, sample tilt, and temperature measurement (strain). A temperature measurement accuracy σ = 0.92°C is realized. In contrast to traditional full-field speckle cross-correlation techniques, this technique requires only a small number of detector elements with minimal signal processing and is compatible with many real-time sensor applications. Measurements of the optical phase across a speckle feature are presented.

scholarly journals Transparent and Flexible Mayan-Pyramid-based Pressure Sensor using Facile-Transferred Indium tin Oxide for Bimodal Sensor Applications

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Minhyun Jung ◽  
Sujaya Kumar Vishwanath ◽  
Jihoon Kim ◽  
Dae-Kwan Ko ◽  
Myung-Jin Park ◽  
...  
Keyword(s):  
Tin Oxide ◽  
Pressure Sensor ◽  
Indium Tin Oxide ◽  
Motion Tracking ◽  
Pressure Sensors ◽  
Water Soluble ◽  
Plastic Substrate ◽  
Silicon Mold ◽  
Sensor Applications ◽  
Electronic Skin

Abstract Transparent and conducting flexible electrodes have been successfully developed over the last few decades due to their potential applications in optoelectronics. However, recent developments in smart electronics, such as a direct human-machine interface, health-monitoring devices, motion-tracking sensors, and artificially electronic skin also require materials with multifunctional properties such as transparency, flexibility and good portability. In such devices, there remains room to develop transparent and flexible devices such as pressure sensors or temperature sensors. Herein, we demonstrate a fully transparent and flexible bimodal sensor using indium tin oxide (ITO), which is embedded in a plastic substrate. For the proposed pressure sensor, the embedded ITO is detached from its Mayan-pyramid-structured silicon mold by an environmentally friendly method which utilizes water-soluble sacrificial layers. The Mayan-pyramid-based pressure sensor is capable of six different pressure sensations with excellent sensitivity in the range of 100 Pa-10 kPa, high endurance of 105 cycles, and good pulse detection and tactile sensing data processing capabilities through machine learning (ML) algorithms for different surface textures. A 5 × 5-pixel pressure-temperature-based bimodal sensor array with a zigzag-shaped ITO temperature sensor on top of it is also demonstrated without a noticeable interface effect. This work demonstrates the potential to develop transparent bimodal sensors that can be employed for electronic skin (E-skin) applications.

scholarly journals A New Pattern Quality Assessment Criterion and Defocusing Degree Determination of Laser Speckle Correlation Method

Sensors ◽  
2021 ◽  
Vol 21 (14) ◽  
pp. 4728
Author(s):  
Wenxin Hu ◽  
Zhipeng Sheng ◽  
Keyu Yan ◽  
Hong Miao ◽  
Yu Fu
Keyword(s):  
Quality Assessment ◽  
Speckle Pattern ◽  
Correlation Method ◽  
Quality Criterion ◽  
Laser Speckle ◽  
Widespread Application ◽  
Speckle Correlation ◽  
Speckle Patterns ◽  
Speckle Size

The laser speckle correlation method has found widespread application for obtaining information from vibrating objects. However, the resolution and accuracy of the laser speckle correlation method as they relate to the defocusing degree have not been analyzed sufficiently. Furthermore, the possible methods for speckle pattern quality assessment and enhancement have not been studied. In this study, the resolution and accuracy of the laser speckle correlation method are analyzed, and it is found that they are affected by the defocusing degree and speckle pattern quality, respectively. A new speckle pattern quality criterion combining the mean intensity gradient and frequency spectrum was proposed, called CMZ. The quality of the speckle pattern is higher when the CMZ is closer to zero. The proposed criterion was verified by simulated speckle patterns and real speckle patterns with different speckle sizes, densities, and gray contrasts. In the experimental setup stage, a suitable defocusing degree can be selected based on the resolution requirement and optimal speckle size, and other experimental parameters can be determined according to the CMZ criterion. Rotation and vibration experiments verified the effectiveness of the laser speckle correlation method and confirmed the reliability of the experiment preparation based on proposed CMZ criterion.

scholarly journals Fabrication of Suspended PMMA-Graphene Membrane for High Sensitivity LC-MEMS Pressure Sensor

Membranes ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 996
Author(s):  
Norliana Yusof ◽  
Badariah Bais ◽  
Jumril Yunas ◽  
Norhayati Soin ◽  
Burhanuddin Yeop Majlis
Keyword(s):  
Pressure Sensor ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Low Pressure ◽  
Sensor Applications ◽  
Deformable Structure ◽  
Response To Change ◽  
Electrical Wiring ◽  
Implantable Sensor

The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in biomedical applications, which require a highly-sensitive sensor to measure low-pressure variations. This study presents the microfabrication of an LC wireless MEMS pressure sensor that utilizes a PMMA-Graphene (PMMA/Gr) membrane supported on a silicon trench as the deformable structure. The (PMMA/Gr) membrane was employed to increase the sensor’s sensitivity due to its very low elastic modulus making it easy to deform under extremely low pressure. The overall size of the fabricated sensor was limited to 8 mm × 8 mm. The experimental results showed that the capacitance value changed from 1.64 pF to 12.32 pF when the applied pressure varied from 0 to 5 psi. This capacitance variation caused the frequency response to change from 28.74 MHz to 78.76 MHz. The sensor sensitivity was recorded with a value of 193.45 kHz/mmHg and a quality factor of 21. This study concludes that the (PMMA/Gr) membrane-based LC-MEMS pressure sensor has been successfully designed and fabricated and shows good potential in biomedical sensor applications.

High-capacitance polyurethane ionogels for low-voltage operated organic transistors and pressure sensors

2020 ◽  
Vol 8 (47) ◽  
pp. 17107-17113
Author(s):  
Grace Dansoa Tabi ◽  
Joo Sung Kim ◽  
Benjamin Nketia-Yawson ◽  
Do Hwan Kim ◽  
Young-Yong Noh
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Low Voltage ◽  
Pressure Sensors ◽  
Organic Transistors ◽  
Pressure Sensitivity ◽  
High Capacitance ◽  
Sensor Applications ◽  
Organic Transistor

A facile method to fabricate high-capacitance stretchable polyurethane ionogels is reported for organic transistor and pressure sensor applications, measuring remarkable mobility of ∼2 cm2 V−1 s−1 and a high-pressure sensitivity of 0.12 kPa−1.

scholarly journals A Simulation Analysis of an Extension of One-Dimensional Speckle Correlation Method for Detection of General In-Plane Translation

2014 ◽  
Vol 2014 ◽  
pp. 1-12 ◽  
Author(s):  
Ivana Hamarová ◽  
Petr Šmíd ◽  
Pavel Horváth ◽  
Miroslav Hrabovský
Keyword(s):  
Simulation Analysis ◽  
Speckle Pattern ◽  
Correlation Method ◽  
Object Plane ◽  
Speckle Field ◽  
Geometrical Arrangement ◽  
One Dimensional ◽  
Speckle Correlation ◽  
Speckle Patterns

The purpose of the study is to show a proposal of an extension of a one-dimensional speckle correlation method, which is primarily intended for determination of one-dimensional object's translation, for detection of general in-plane object's translation. In that view, a numerical simulation of a displacement of the speckle field as a consequence of general in-plane object's translation is presented. The translation componentsaxandayrepresenting the projections of a vectoraof the object's displacement onto bothx- andy-axes in the object plane(x,y)are evaluated separately by means of the extended one-dimensional speckle correlation method. Moreover, one can perform a distinct optimization of the method by reduction of intensity values representing detected speckle patterns. The theoretical relations between the translation componentsaxandayof the object and the displacement of the speckle pattern for selected geometrical arrangement are mentioned and used for the testifying of the proposed method's rightness.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

scholarly journals Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Original Model ◽  
Ansys Software ◽  
Nonlinear Error ◽  
Sensor Model ◽  
Optimized Model ◽  
Simulation Results ◽  
Better Than

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.

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