scholarly journals Simulation and Nonlinearity Optimization of a High-Pressure Sensor

Sensors ◽  
2020 ◽  
Vol 20 (16) ◽  
pp. 4419
Author(s):  
Ting Li ◽  
Haiping Shang ◽  
Weibing Wang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Original Model ◽  
Ansys Software ◽  
Nonlinear Error ◽  
Sensor Model ◽  
Optimized Model ◽  
Simulation Results ◽  
Better Than

A pressure sensor in the range of 0–120 MPa with a square diaphragm was designed and fabricated, which was isolated by the oil-filled package. The nonlinearity of the device without circuit compensation is better than 0.4%, and the accuracy is 0.43%. This sensor model was simulated by ANSYS software. Based on this model, we simulated the output voltage and nonlinearity when piezoresistors locations change. The simulation results showed that as the stress of the longitudinal resistor (RL) was increased compared to the transverse resistor (RT), the nonlinear error of the pressure sensor would first decrease to about 0 and then increase. The theoretical calculation and mathematical fitting were given to this phenomenon. Based on this discovery, a method for optimizing the nonlinearity of high-pressure sensors while ensuring the maximum sensitivity was proposed. In the simulation, the output of the optimized model had a significant improvement over the original model, and the nonlinear error significantly decreased from 0.106% to 0.0000713%.

scholarly journals A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on a Porous Three-Dimensional PDMS/Microsphere Composite

Polymers ◽  
2020 ◽  
Vol 12 (6) ◽  
pp. 1412 ◽  
Author(s):  
Young Jung ◽  
Wookjin Lee ◽  
Kyungkuk Jung ◽  
Byunggeon Park ◽  
Jinhyoung Park ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Sacrificial Layer ◽  
Three Dimensional ◽  
Pressure Sensors ◽  
Capacitive Pressure Sensor ◽  
Mechanical Stimuli ◽  
Highly Sensitive ◽  
Flexible Pressure Sensors ◽  
Fast Rise ◽  
Better Than

In recent times, polymer-based flexible pressure sensors have been attracting a lot of attention because of their various applications. A highly sensitive and flexible sensor is suggested, capable of being attached to the human body, based on a three-dimensional dielectric elastomeric structure of polydimethylsiloxane (PDMS) and microsphere composite. This sensor has maximal porosity due to macropores created by sacrificial layer grains and micropores generated by microspheres pre-mixed with PDMS, allowing it to operate at a wider pressure range (~150 kPa) while maintaining a sensitivity (of 0.124 kPa−1 in a range of 0~15 kPa) better than in previous studies. The maximized pores can cause deformation in the structure, allowing for the detection of small changes in pressure. In addition to exhibiting a fast rise time (~167 ms) and fall time (~117 ms), as well as excellent reproducibility, the fabricated pressure sensor exhibits reliability in its response to repeated mechanical stimuli (2.5 kPa, 1000 cycles). As an application, we develop a wearable device for monitoring repeated tiny motions, such as the pulse on the human neck and swallowing at the Adam’s apple. This sensory device is also used to detect movements in the index finger and to monitor an insole system in real-time.

scholarly journals Hierarchical network enabled flexible textile pressure sensors with ultra-high sensitivity, ultra-wide linearity and high-temperature resistance

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
High Performance ◽  
Full Range ◽  
Pressure Sensors ◽  
Fiber Surface ◽  
High Sensitivity ◽  
Harsh Environments ◽  
Point To Point

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to precisely detect the full range of faint pressure (< 100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a major challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor exhibits ultra-high sensitivity (3.57 MPa− 1), ultra-wide linearity (3.24 MPa), exceptionally broad sensing range (~ 45 MPa), and long-term stability (> 4000 cycles). Furthermore, under a high working temperature of 200 ºC, the proposed sensor device still shows an ultra-high sensitivity of 2.64 MPa− 1 within a wide linear range of 7.2 MPa, attributing to its intrinsic high-temperature-resistant properties of PI and CNT. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could serve as an E-skin device to monitor the human physiological information, precisely detect tiny and extremely high pressure, and can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (> 300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.

A resonant high-pressure sensor based on dual cavities

2021 ◽  
Vol 31 (12) ◽  
pp. 124002
Author(s):  
Jie Yu ◽  
Yulan Lu ◽  
Deyong Chen ◽  
Junbo Wang ◽  
Jian Chen ◽  
...  
Keyword(s):  
High Pressure ◽  
Temperature Sensitivity ◽  
Pressure Sensor ◽  
Pressure Range ◽  
High Vacuum ◽  
Pressure Sensors ◽  
Anodic Bonding ◽  
Temperature Range ◽  
Pressure Sensitive ◽  
Ocean Sciences

Abstract High-pressure sensors enable expansive demands in ocean sciences, industrial controls, and oil explorations. Successful sensor realized in piezoresistive high-pressure sensors which suffer from the key issue of compromised accuracies due to serious temperature drifts. Herein, this paper presents a high accuracy resonant high-pressure sensor with the pressure range of 70 MPa. Different from conventional resonant high-pressure sensor, the developed sensor utilized a dual-resonator-cavity design to minimize temperature disturbances and improve the pressure sensitivities. Besides, four circle cavities were used to maintain a high vacuum level for resonators after anodic bonding process. In details, Dual resonators, which is parallelly placed in the tensile and compressive stresses areas of a rectangular pressure sensitive diaphragm, are separated vacuum-packaged in the parallel dual cavities. Thus, pressure under measurement bends the pressure sensitive diaphragm, producing an increased pressure sensitivity and a decreased temperature sensitivity by the differential outputs of the dual resonators. Parameterized mathematical models of the sensor were established and the parameters of the models were optimized to adjust the pressure sensitivities and the temperature sensitivities of the sensor. Simplified deep reactive ion etching was used to form the sensing structure of the sensor and only once anodic bonding was used to form vacuum packaging for the dual resonators. Experimental results confirmed that the Q values of the resonators were higher than 32 000. Besides, the temperature sensitivity of the sensor was reduced from 44 Hz °C−1 (494 ppm °C−1) to 1 Hz °C−1 (11 ppm °C−1) by the differential outputs of the dual resonators in the temperature range of −10 °C–60 °C under the pressure of 1000 kPa. In addition, the accuracy of the sensor was better than 0.02% FS within the pressure range of 110–6500 kPa and the temperature range of −10 °C–60 °C by using a polynomial algorithm.

Aluminum-Silicon and Gold-Silicon Eutectics: New Opportunities for MEMS Technologies

2001 ◽  
Vol 687 ◽  
Author(s):  
Ciprian Iliescu ◽  
Daniel P. Poenar ◽  
Jianmin Miao Nanyang
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Wet Etching ◽  
Eutectic Formation ◽  
Etch Stop ◽  
Aluminum Silicon

AbstractOur practical experiments highlight that aluminum-silicon (Al-Si) and gold-silicon (Au- Si) eutectics are fairly inert to the attack of both anisotropic and isotropic wet etchants of Si (e.g. KOH or HF/HNO3 solutions). Therefore, these interfacial eutectics can be used as etch-stop layers in wet etching-based bulk micromachining. This paper presents how Al-Si and Au-Si eutectic layers may be employed for applications whose production involves such operations (e.g. high-pressure sensors) and will discuss three major directions of interest: eutectic formation, diaphragm generation and application of the eutectic layer in a pressure sensor.

scholarly journals A Nature-inspired Hierarchical Branching Structure Pressure Sensor for Medical Wearables

2021 ◽  
Author(s):  
Huang Guoliang ◽  
Yang Han ◽  
Fu Rongxin ◽  
Shan Xiaohui ◽  
Wang Ruliang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Pressure Sensors ◽  
External Environment ◽  
Pulse Diagnosis ◽  
Considerable Potential ◽  
Branching Networks ◽  
Structure Simulation ◽  
Medical Diagnostic ◽  
Simulation Results ◽  
Flexible Pressure Sensors

Abstract Both ecosystems and biological systems in nature have evolved with unique hierarchical branching networks to maximize the efficiency and range of material transmission and adaptability to their external environment. Here we emulate this hierarchical branching (HB) network using a multilayer superposition approach and apply it in the design of flexible pressure sensors for medical wearables. Based on the HB structure, simulation results demonstrate that the deformation of microstructures is efficiently scheduled. Experiments show that the sensitivity of the HB sensor exhibits almost 34- and 55-fold improvements over the medium-pressure and high-pressure ranges, respectively, compared with that of a pressure sensor with a traditional monolayer structure. Successful monitoring of the diverse stimuli from humans demonstrates the considerable potential of the HB sensor in medical wearables. Additionally, the small and thin nature of the sensor enables it to quantify medical diagnostic processes, such as intelligent traditional Chinese medicine pulse diagnosis.

High-capacitance polyurethane ionogels for low-voltage operated organic transistors and pressure sensors

2020 ◽  
Vol 8 (47) ◽  
pp. 17107-17113
Author(s):  
Grace Dansoa Tabi ◽  
Joo Sung Kim ◽  
Benjamin Nketia-Yawson ◽  
Do Hwan Kim ◽  
Young-Yong Noh
Keyword(s):  
High Pressure ◽  
Pressure Sensor ◽  
Low Voltage ◽  
Pressure Sensors ◽  
Organic Transistors ◽  
Pressure Sensitivity ◽  
High Capacitance ◽  
Sensor Applications ◽  
Organic Transistor

A facile method to fabricate high-capacitance stretchable polyurethane ionogels is reported for organic transistor and pressure sensor applications, measuring remarkable mobility of ∼2 cm2 V−1 s−1 and a high-pressure sensitivity of 0.12 kPa−1.

scholarly journals Hierarchical network enabled flexible textile pressure sensor with ultra-broad response range and high-temperature resistance

2021 ◽  
Author(s):  
Meiling Jia ◽  
Chenghan Yi ◽  
Yankun Han ◽  
Xin Li ◽  
Guoliang Xu ◽  
...  
Keyword(s):  
High Pressure ◽  
High Temperature ◽  
Pressure Sensor ◽  
Full Range ◽  
Pressure Sensors ◽  
Fiber Surface ◽  
Harsh Environments ◽  
Temperature Resistance ◽  
High Temperature Resistance ◽  
Fiber Fabric

Abstract Thin, lightweight, and flexible textile pressure sensors with the ability to detect the full range of faint pressure (<100 Pa), low pressure (in the range of KPa) and high pressure (in the range of MPa) are in significant demand to meet the requirements for applications in daily activities and more meaningfully in some harsh environments, such as high temperature and high pressure. However, it is still a significant challenge to fulfill these requirements simultaneously in a single pressure sensor. Herein, a high-performance pressure sensor enabled by polyimide fiber fabric with functionalized carbon-nanotube (PI/FCNT) is obtained via a facile electrophoretic deposition (EPD) approach. High-density FCNT is evenly wrapped and chemically bonded to the fiber surface during the EPD process, forming a conductive hierarchical fiber/FCNT matrix. Benefiting from the large compressible region of PI fiber fabric, abundant yet firm contacting points, point-to-point contacting mode, and high elastic modulus of both PI and CNT, the proposed PI/FCNT pressure sensor can be customized and modulated to achieve both a wide linear ranges, ultra-broad sensing range, long-term stability and high-temperature resistance. Thanks to these merits, the proposed PI/FCNT(EPD) pressure sensor could monitor the human physiological information, detect tiny and extremely high pressure, can be integrated into an intelligent mechanical hand to detect the contact force under high-temperature (>300 ºC), endowing it with high applicability in the fields of real-time health monitoring, intelligent robots, and harsh environments.

Development of circuit solution and design of capacitive pressure sensor array for applied robotics

2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov
Keyword(s):  
Pressure Sensor ◽  
Output Signal ◽  
Sensor Array ◽  
Applied Pressure ◽  
Pressure Sensors ◽  
Fine Tuning ◽  
Capacitive Pressure Sensor ◽  
Cell Parameters ◽  
Linear Pattern ◽  
Sensor Structure

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.

Enhanced piezocapacitive response in zinc oxide tetrapod–poly(dimethylsiloxane) composite dielectric layer for flexible and ultrasensitive pressure sensor

Nanoscale ◽  
2021 ◽  
Vol 13 (12) ◽  
pp. 6076-6086
Author(s):  
Gen-Wen Hsieh ◽  
Shih-Rong Ling ◽  
Fan-Ting Hung ◽  
Pei-Hsiu Kao ◽  
Jian-Bin Liu
Keyword(s):  
Zinc Oxide ◽  
Pressure Sensor ◽  
Dielectric Layer ◽  
Pressure Sensors ◽  
Dielectric Matrix ◽  
First Time

Zinc oxide tetrapod is introduced for the first time within a poly(dimethylsiloxane) dielectric matrix for the formation of ultrasensitive piezocapacitive pressure sensors.

scholarly journals Injection-rolling nozzle in an imprint system with continuous injection direct rolling for ultra-thin microstructure guide light plate

2021 ◽  
Vol 13 (4) ◽  
pp. 168781402110112
Author(s):  
Yan Lou ◽  
Kewei Chen ◽  
Xiangwei Zhou ◽  
Yanfeng Feng
Keyword(s):  
Flow Velocity ◽  
Superior Performance ◽  
Light Transmittance ◽  
Velocity Difference ◽  
Orthogonal Experiments ◽  
Width Direction ◽  
Direct Rolling ◽  
Simulation Results ◽  
Continuous Injection ◽  
Better Than

A novel Injection-rolling Nozzle (IRN) in an imprint system with continuous injection direct rolling (CIDR) for ultra-thin microstructure polymer guide light plates was developed to achieve uniform flow velocity and temperature at the width direction of the cavity exit. A novel IRN cavity was designed. There are eight of feature parameters of cavity were optimized by orthogonal experiments and numerical simulation. Results show that the flow velocity at the width direction of the IRN outlet can reach uniformity, which is far better than that of traditional cavity. The smallest flow velocity difference and temperature difference was 0.6 mm/s and 0.24 K, respectively. The superior performance of the IRN was verified through a CIDR experiment. Several 0.35-mm thick, 340-mm wide, and 10-m long microstructural Polymethyl Methacrylate (PMMA) guide light plates were manufactured. The average filling rates of the microgrooves with the aspect ratio 1:3 reached above 93%. The average light transmittance is 88%.

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