The Moving Liquid Mirror (MLM) Spatial Light Modulator: Simulation and Measurement of the Optical Performance

2000 ◽  
Author(s):  
Alexander Wolter ◽  
Detlef Kunze ◽  
Wolfgang Doleschal ◽  
Hubert Lakner ◽  
Günter Zimmer

Abstract Spatial light modulators (SLM) are electro-optical devices employed as optical pattern generators in applications like projection displays, direct-writing systems for photolithographic patterning, adaptive optics or optical signal processing. Here we report on the “moving liquid mirror” (MLM) as a new micromechanical actuator technology based on a deformable oil film on an aluminum mirror with electrode structure. The actuator is suitable for integration on a silicon backplane as CMOS-addressing circuit. Thus production in standard CMOS-technology is possible. A theoretical analysis of the device behavior is given, and the results of simulations are presented. Measurements on passive devices show good agreement with the simulations. Finally, active MLM-devices have been fabricated. Images can be programmed into the devices and observed under a microscope (figure 1).

2011 ◽  
Vol 20 (04) ◽  
pp. 453-457 ◽  
Author(s):  
N. COLLINGS

An optically addressed spatial light modulator (OASLM) records the image on a write beam and transfers it to a read beam. Some example application areas are: image transduction; optical correlation; adaptive optics; and optical neural networks. Current interest in OASLMs has been generated by the work of Qinetiq on 3D display. This work is based on Active tiling, where an image can be recorded in one part of the device and is memorised, whilst the remainder of the device is updated with images. This paper will explain this system and survey the technological alternatives for this application.


Photonics ◽  
2021 ◽  
Vol 8 (3) ◽  
pp. 62
Author(s):  
Remington S. Ketchum ◽  
Pierre-Alexandre Blanche

Micro-electro mechanical systems (MEMS)-based phase-only spatial light modulators (PLMs) have the potential to overcome the limited speed of liquid crystal on silicon (LCoS) spatial light modulators (SLMs) and operate at speeds faster than 10 kHz. This expands the practicality of PLMs to several applications, including communications, sensing, and high-speed displays. The complex structure and fabrication requirements for large, 2D MEMS arrays with vertical actuation have kept MEMS-based PLMs out of the market in favor of LCoS SLMs. Recently, Texas Instruments has adapted its existing DMD technology for fabricating MEMS-based PLMs. Here, we characterize the diffraction efficiency for one of these PLMs and examine the effect of a nonlinear distribution of addressable phase states across a range of wavelengths and illumination angles.


Science ◽  
2019 ◽  
Vol 364 (6445) ◽  
pp. 1087-1090 ◽  
Author(s):  
Shi-Qiang Li ◽  
Xuewu Xu ◽  
Rasna Maruthiyodan Veetil ◽  
Vytautas Valuckas ◽  
Ramón Paniagua-Domínguez ◽  
...  

Rapidly developing augmented reality, solid-state light detection and ranging (LIDAR), and holographic display technologies require spatial light modulators (SLMs) with high resolution and viewing angle to satisfy increasing customer demands. Performance of currently available SLMs is limited by their large pixel sizes on the order of several micrometers. Here, we propose a concept of tunable dielectric metasurfaces modulated by liquid crystal, which can provide abrupt phase change, thus enabling pixel-size miniaturization. We present a metasurface-based transmissive SLM, configured to generate active beam steering with >35% efficiency and a large beam deflection angle of 11°. The high resolution and steering angle obtained provide opportunities to develop the next generation of LIDAR and display technologies.


2019 ◽  
Vol 9 (10) ◽  
pp. 2012 ◽  
Author(s):  
Rujia Li ◽  
Liangcai Cao

Phase-only Spatial Light Modulator (SLM) is one of the most widely used devices for phase modulation. It has been successfully applied in the field with requirements of precision phase modulation such as holographic display, optical tweezers, lithography, etc. However, due to the limitations in the manufacturing process, the grayscale-phase response could be different for every single SLM device, even varying on sections of an SLM panel. A diverse array of calibration methods have been proposed and could be sorted into two categories: the interferometric phase calibration methods and the diffractive phase calibration methods. The principles of phase-only SLM are introduced. The main phase calibration methods are discussed and reviewed. The advantages of these methods are analyzed and compared. The potential methods for different applications are suggested.


2005 ◽  
Author(s):  
D. S. Monaghan ◽  
U. Gopinathan ◽  
B. M. Hennelly ◽  
D. P. Kelly ◽  
Thomas J. Naughton ◽  
...  

1991 ◽  
Vol 219 ◽  
Author(s):  
Garret Moddel ◽  
Pierre R. Barbier

ABSTRACTA successful application for a-Si:H is as the photosensor in a liquid crystal optically addressed spatial light modulator (OASLM). We analyze the response time of an a-Si:H p-i-n photodiode in a “pseudo-OALSM,” in which the liquid crystal is replaced by an equivalent capacitor, under both forward and reverse bias. Under reverse bias the two important effects are the photocurrent response time, and residual trapped charge. Under forward bias the mechanism shifts from double injection regimes to ohmic transport as a function of voltage. We relate these characteristics to the operation of an OASLM.


1998 ◽  
Vol 148 (4-6) ◽  
pp. 323-330 ◽  
Author(s):  
G.T Bold ◽  
T.H Barnes ◽  
J Gourlay ◽  
R.M Sharples ◽  
T.G Haskell

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