A Surface-Micromachined Nitride-Diaphragm High-Pressure Sensor for Oil Well Application
Keyword(s):
Oil Well
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Abstract A surface-micromachined, high-pressure sensor with polysilicon piezoresistors for oil well applications has been successfully developed. This work represents the first report of a nitride-diaphragm (3μm thick) oil-well pressure sensor with a diaphragm diameter of 44μm. The sensors have been calibrated up to 4000 psi. A sensitivity of 7.7 μV/V/psi is obtained. With 5 V excitation voltage, the full scale output (FSO, 4000 psi) is 154 mV. The nonlinearity is less than ± 0.2% of FSO. The hysteresis is less than 0.04% of FSO. A temperature coefficient of 25 μV/V/°C (equivalent to 0.08% of FSO/°C) is observed under 1000 psi pressure bias.
2019 ◽
Vol 85
(1(I))
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pp. 49-56
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2017 ◽
Vol 17
(14)
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pp. 4388-4393
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2016 ◽
Vol 87
(12)
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pp. 125005
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2019 ◽
Vol 44
(36)
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pp. 20587-20597
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1989 ◽
Vol 25
(5)
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pp. 524-530
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