scholarly journals High Amplitude Secondary Mass Drive

2000 ◽  
Author(s):  
Christopher W. Dyck ◽  
James J. Allen ◽  
Robert J. Huber ◽  
Jeffry J. Sniegowski

Abstract In this paper we describe a high amplitude electrostatic drive for surface micromachined mechanical oscillators that may be suitable for vibratory gyroscopes. It is an advanced design of a previously reported dual mass oscillator (Dyck, et. al., 1999). The structure is a 2 degree-of-freedom, parallel-plate driven motion amplifier, termed the secondary mass drive oscillator (SMD oscillator). During each cycle the device contacts the drive plates, generating large electrostatic forces. Peak-to-peak amplitudes of 54 μm have been obtained by operating the structure in air with an applied voltage of 11 V. We describe the structure, present the analysis and design equations, and show recent results that have been obtained, including frequency response data, power dissipation, and out-of-plane motion.

Author(s):  
Assaf Ya’akobovitz ◽  
Slava Krylov

We report on a novel architecture and operational principle of a large angle kinematically excited tilting micro actuator. The device transforms and amplifies small linear out-of-plane motion of a parallel-plate electrostatic transducer into a tilting motion of a plate. The device characterized by robust single layer architecture was fabricated using a silicon on insulator (SOI) wafer and common deep reactive ion etching (DRIE) based fabrication process. Experimental and model results collectively illustrate the feasibility and efficiency of the suggested actuation approach. The optical tilting angle of 37.5° was experimentally registered under relatively low actuation voltage of 100 V.


2021 ◽  
Vol 11 (8) ◽  
pp. 3655
Author(s):  
Gee-Soo Lee ◽  
Chan-Jung Kim

Microcracks of depth less than 200 μm in mechanical components are difficult to detect because conventional methods such as X-ray or eddy current measurements are less sensitive to such depths. Nonetheless, an efficient microcrack detection method is required urgently in the mechanical industry because microcracks are produced frequently during cold-forming. The frequency response function (FRF) is known to be highly sensitive even to microcracks, and it can be obtained using both the input data of an impact hammer and the response data of an accelerometer. Under the assumption of an impulse force with a similar spectral impulse pattern, spectral response data alone could be used as a crack indicator because the dynamic characteristics of a microcrack may be dependent solely on these measured data. This study investigates the feasibility of microcrack detection using the response data alone through impact tests with a simple rectangular specimen. A simple rectangular specimen with a 200 μm microcrack at one face was prepared. The experimental modal analysis was conducted for the normal (uncracked) specimen and found-first bending mode about 1090 Hz at the X-Y plane (in-plane). Response accelerations were obtained in both at in-plane locations as well as X-Z plane (out-of-plane), and the crack was detected using the coherence function between a normal and a cracked specimen. A comparison of the crack inspection results obtained using the response data and the FRF data indicated the validity of the proposed method.


2003 ◽  
Vol 125 (5) ◽  
pp. 895-901 ◽  
Author(s):  
Michael G. Olsen ◽  
Chris J. Bourdon

In microscopic particle image velocimetry (microPIV) experiments, the entire volume of a flowfield is illuminated, resulting in all of the particles in the field of view contributing to the image. Unlike in light-sheet PIV, where the depth of the measurement volume is simply the thickness of the laser sheet, in microPIV, the measurement volume depth is a function of the image forming optics of the microscope. In a flowfield with out-of-plane motion, the measurement volume (called the depth of correlation) is also a function of the magnitude of the out-of-plane motion within the measurement volume. Equations are presented describing the depth of correlation and its dependence on out-of-plane motion. The consequences of this dependence and suggestions for limiting its significance are also presented. Another result of the out-of-plane motion is that the height of the PIV signal peak in the correlation plane will decrease. Because the height of the noise peaks will not be affected by the out-of-plane motion, this could lead to erroneous velocity measurements. An equation is introduced that describes the effect of the out-of-plane motion on the signal peak height, and its implications are discussed. Finally, the derived analytical equations are compared to results calculated using synthetic PIV images, and the agreement between the two is seen to be excellent.


1992 ◽  
Vol 96 (10) ◽  
pp. 7229-7236 ◽  
Author(s):  
Marek Z. Zgierski ◽  
Francesco Zerbetto ◽  
Young‐Dong Shin ◽  
Edward C. Lim

2017 ◽  
Vol 121 (26) ◽  
pp. 4939-4947
Author(s):  
Hongmei Xiao ◽  
Lishuang Ma ◽  
Weihai Fang ◽  
Xuebo Chen
Keyword(s):  

2001 ◽  
pp. 740-743 ◽  
Author(s):  
Hung-Yi Lin ◽  
Hsin-Hwa Hu ◽  
Weileun Fang ◽  
Ruey-Shing Huang
Keyword(s):  

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