Electrostatically Coupled MEM Oscillators
Abstract MicroElectroMechanical (MEM) Oscillators have a wide range of potential applications and understanding the underlying system dynamics thoroughly is essential. In this paper, we present the design, modeling and characterization of a pair of electrostatically coupled torsional oscillators fabricated with the SCREAM(1) process. The dynamic and electrostatic characteristics of the new design lead to various applications and also serve as an interesting ground for understanding the electromechanical interaction and non-linearities in MEM devices.
1984 ◽
Vol 313
(1525)
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pp. 249-256
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2004 ◽
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