Design and Realization of a Miniature Capacitive Silicon Force Sensor for Loads up to 500 KG
Keyword(s):
Abstract In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02% of the full-scale output (fso). Creep at 500 kg after 30 minutes is within 0.01% of the fso. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
Keyword(s):
Keyword(s):
1954 ◽
Vol 14
(12)
◽
pp. 613-620
Keyword(s):
Keyword(s):