Cross Coupling in Parallel Kinematic MEMS Nanopositioners
2015 ◽
Keyword(s):
In this paper we study the origins of the cross coupling phenomenon in MEMS nanopositioners with a parallel kinematic mechanism. An analytical model is provided for a generic 2-DOF MEMS nanopositioner. The model accounts for the potential mechanical asymmetries present in the device due to micro-fabrication imperfections. Simulations are performed based on the obtained model and compared with experimental data from a previously reported MEMS nanopositioner. A close agreement is observed between the analytical and experimental results, leading to a better understanding of the phenomenon.
1983 ◽
Vol 105
(1)
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pp. 29-33
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2013 ◽
Vol 816-817
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pp. 821-824
2020 ◽
pp. 027836492090990
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2019 ◽
Vol 234
(1)
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pp. 121-136
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2012 ◽
Vol 2012
(0)
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pp. _S116053-1-_S116053-5
2014 ◽
Vol 30
(4)
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pp. 369-378
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