Dynamics, Sensing, and Control of a Thin-Film Piezoelectric Vertical Micro-Stage

2010 ◽  
Author(s):  
Kenn Oldham ◽  
Xianke Lin ◽  
Zhen Qiu ◽  
Thomas Wang ◽  
Jeffrey S. Pulskamp ◽  
...  
Keyword(s):  
Thin Film ◽  
Sliding Mode Control ◽  
Strain Gage ◽  
Lead Zirconate Titanate ◽  
Sliding Mode ◽  
Lead Zirconate ◽  
Plane Motion ◽  
Position Sensing ◽  
Mode Control ◽  
Piezoelectric Thin Film

A novel thin-film piezoelectric vertical actuator with integrated strain gage position sensor is described, with sensor performance in simulated sliding mode control examined. The actuator utilizes four bending-beam thin-film lead-zirconate-titanate (PZT) legs to generate net translational out-of-plane motion of almost 100 μm, with higher speed and lower voltages than most MEMS vertical actuators. In addition, a portion of the top platinum electrode on the piezoelectric thin-film is used to perform position sensing, and shown to have good sensitivity during experimental operation of the actuator. A dynamic model of the stage based on a hysteresis model derived to fit experimental piezoelectric strain coefficient behavior is presented, and used to predict stage performance during sliding mode control using the integrated strain gage.

scholarly journals Voltage-Induced Snap-Through of an Asymmetrically Laminated, Piezoelectric, Thin-Film Diaphragm Micro-Actuator—Part 1: Experimental Studies and Mathematical Modeling

2018 ◽  
Vol 140 (5) ◽  
Author(s):  
W. C. Tai ◽  
Chuan Luo ◽  
Cheng-Wei Yang ◽  
G. Z. Cao ◽  
I. Y. Shen
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Virtual Work ◽  
Equations Of Motion ◽  
Experimental Studies ◽  
Elastic Strain Energy ◽  
Lead Zirconate ◽  
Rectangular Domain ◽  
Strain Components ◽  
Piezoelectric Thin Film

A piezoelectric thin-film microactuator in the form of an asymmetrically laminated diaphragm is developed as an intracochlear hearing aid. Experimentally, natural frequencies of the microactuator bifurcate with respect to an applied bias voltage. To qualitatively explain the findings, we model the lead-zirconate-titanate (PZT) diaphragm as a doubly curved, asymmetrically laminated, piezoelectric shallow shell defined on a rectangular domain with simply supported boundary conditions. The von Karman type nonlinear strain–displacement relationship and the Donnell–Mushtari–Vlasov theory are used to calculate the electric enthalpy and elastic strain energy. Balance of virtual work between two top electrodes is also considered to incorporate an electric-induced displacement field that has discontinuity of in-plane strain components. A set of discretized equations of motion are obtained through a variational approach.

Combined Sliding Mode Control with a Feedback Linearization for Speed Control of Induction Motor

2011 ◽  
Vol 7 (1) ◽  
pp. 19-24
Author(s):  
Aamir Hashim Obeid Ahmed ◽  
Martino O. Ajangnay ◽  
Shamboul A. Mohamed ◽  
Matthew W. Dunnigan
Keyword(s):  
Sliding Mode Control ◽  
Induction Motor ◽  
Feedback Linearization ◽  
Sliding Mode ◽  
Speed Control ◽  
Mode Control

Adjust Method of Nonlinear Gain in Four-Wheel Steering Control Using Sliding Mode Control

2009 ◽  
Vol 129 (7) ◽  
pp. 1389-1396 ◽  
Author(s):  
Misawa Kasahara ◽  
Yuki Kanai ◽  
Ryoko Shiraki ◽  
Yasuchika Mori
Keyword(s):  
Sliding Mode Control ◽  
Sliding Mode ◽  
Steering Control ◽  
Nonlinear Gain ◽  
Mode Control
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