scholarly journals Voltage-Induced Snap-Through of an Asymmetrically Laminated, Piezoelectric, Thin-Film Diaphragm Micro-Actuator—Part 1: Experimental Studies and Mathematical Modeling

2018 ◽  
Vol 140 (5) ◽  
Author(s):  
W. C. Tai ◽  
Chuan Luo ◽  
Cheng-Wei Yang ◽  
G. Z. Cao ◽  
I. Y. Shen
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Virtual Work ◽  
Equations Of Motion ◽  
Experimental Studies ◽  
Elastic Strain Energy ◽  
Lead Zirconate ◽  
Rectangular Domain ◽  
Strain Components ◽  
Piezoelectric Thin Film

A piezoelectric thin-film microactuator in the form of an asymmetrically laminated diaphragm is developed as an intracochlear hearing aid. Experimentally, natural frequencies of the microactuator bifurcate with respect to an applied bias voltage. To qualitatively explain the findings, we model the lead-zirconate-titanate (PZT) diaphragm as a doubly curved, asymmetrically laminated, piezoelectric shallow shell defined on a rectangular domain with simply supported boundary conditions. The von Karman type nonlinear strain–displacement relationship and the Donnell–Mushtari–Vlasov theory are used to calculate the electric enthalpy and elastic strain energy. Balance of virtual work between two top electrodes is also considered to incorporate an electric-induced displacement field that has discontinuity of in-plane strain components. A set of discretized equations of motion are obtained through a variational approach.

Dynamics, Sensing, and Control of a Thin-Film Piezoelectric Vertical Micro-Stage

2010 ◽  
Author(s):  
Kenn Oldham ◽  
Xianke Lin ◽  
Zhen Qiu ◽  
Thomas Wang ◽  
Jeffrey S. Pulskamp ◽  
...  
Keyword(s):  
Thin Film ◽  
Sliding Mode Control ◽  
Strain Gage ◽  
Lead Zirconate Titanate ◽  
Sliding Mode ◽  
Lead Zirconate ◽  
Plane Motion ◽  
Position Sensing ◽  
Mode Control ◽  
Piezoelectric Thin Film

A novel thin-film piezoelectric vertical actuator with integrated strain gage position sensor is described, with sensor performance in simulated sliding mode control examined. The actuator utilizes four bending-beam thin-film lead-zirconate-titanate (PZT) legs to generate net translational out-of-plane motion of almost 100 μm, with higher speed and lower voltages than most MEMS vertical actuators. In addition, a portion of the top platinum electrode on the piezoelectric thin-film is used to perform position sensing, and shown to have good sensitivity during experimental operation of the actuator. A dynamic model of the stage based on a hysteresis model derived to fit experimental piezoelectric strain coefficient behavior is presented, and used to predict stage performance during sliding mode control using the integrated strain gage.

Energy Dissipation Mechanisms in Lead Zirconate Titanate Thin Film Transduced Micro Cantilevers

2006 ◽  
Vol 45 (11) ◽  
pp. 8795-8800 ◽  
Author(s):  
Jian Lu ◽  
Tsuyoshi Ikehara ◽  
Yi Zhang ◽  
Ryutaro Maeda ◽  
Takashi Mihara
Keyword(s):  
Thin Film ◽  
Energy Dissipation ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Titanate Thin Film

Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors

1993 ◽  
Vol 310 ◽  
Author(s):  
In K. Yoo ◽  
Seshu B. Desu ◽  
Jimmy Xing
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Lead Zirconate Titanate ◽  
Oxygen Vacancies ◽  
Lead Zirconate ◽  
Electrical Degradation ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Pzt Thin Film ◽  
Degradation Properties

AbstractMany attempts have been made to reduce degradation properties of Lead Zirconate Titanate (PZT) thin film capacitors. Although each degradation property has been studied extensively for the sake of material improvement, it is desired that they be understood in a unified manner in order to reduce degradation properties simultaneously. This can be achieved if a common source(s) of degradations is identified and controlled. In the past it was noticed that oxygen vacancies play a key role in fatigue, leakage current, and electrical degradation/breakdown of PZT films. It is now known that space charges (oxygen vacancies, mainly) affect ageing, too. Therefore, a quantitative ageing mechanism is proposed based on oxygen vacancy migration under internal field generated by either remanent polarization or spontaneous polarization. Fatigue, leakage current, electrical degradation, and polarization reversal mechanisms are correlated with the ageing mechanism in order to establish guidelines for simultaneous degradation control of PZT thin film capacitors. In addition, the current pitfalls in the ferroelectric test circuit is discussed, which may cause false retention, imprint, and ageing.

Antenna-Like Tactile Sensor for Thin-Film Piezoelectric Micro-Robots

2013 ◽  
Author(s):  
Ryan Rudy ◽  
Adam J. Cohen ◽  
Jeffrey S. Pulskamp ◽  
Ronald G. Polcawich ◽  
Kenn R. Oldham
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Materials ◽  
Tactile Sensor ◽  
Lead Zirconate ◽  
Obstacle Detection ◽  
Design Parameters ◽  
Small Power ◽  
Impact Detection ◽  
Low Mass

Terrestrial and other millimeter-scale autonomous micro-robots face significant challenges in surveying their environment, due to small power budgets and payload capacities. One low-power, low-mass form of obstacle detection is tactile sensing of contact with other surfaces. In this-paper, a tactile sensor inspired by insect antennae is described, based on thin-film lead-zirconate-titanate (PZT) transduction. Thin-film piezoelectric materials permit actuation and sensing mechanisms to be coupled in very small, compact structures, as well as complement previously developed microrobotic leg mechanisms. Key design parameters for the tactile sensor are introduced and analyzed in terms of sweep frequency and range of motion, and signals from sensor impact are predicted. Experimental results with partially-released prototype actuators show respectable agreement with modeled behavior for dynamic motion, though impact detection is hampered by large feedthrough disturbances. Completed sensors range from 2 to 4 mm in length and are approximately 500 μm in width, with a sweep range of nearly 1 mm demonstrated from a 2 mm long prototype.

Piezoelectric PZT Semi-Ordered Nanotubes Arrays by Wetting of Porous Alumina Template

2008 ◽  
Author(s):  
Brian J. Butcher ◽  
Chad B. O’Neal
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Porous Alumina ◽  
Lead Zirconate ◽  
Alumina Template ◽  
Preliminary Step ◽  
Porous Alumina Template ◽  
Ceramic Nanotubes ◽  
Template Wetting

Piezoelectric nanotubes are applicable to many areas including sensors, actuators, and energy storage. Before these applications can be realized using nanoscale components, a study is needed to characterize the piezoelectric-properties of nanotube geometries versus the piezoelectric-properties of a thin-film of the same material (not shown here). The material used in this study is (PZT) lead-zirconate-titanate, PbZr0.5Ti0.48O3. In this work, 200nm diameter PZT structures are manufactured by a template wetting procedure. These ceramic nanotubes are brittle but hold up well inside the alumina template structure. Having an array of nanometer-sized piezoelectric-tubes has been hypothesized to give comparable results to that of thin-films of the same material. The research described in this paper is a preliminary step towards testing this hypothesis via characterization and later producing piezoelectric-nanoscale-sensors, which are both small and efficient.

Dynamics of nanoscale polarization backswitching in tetragonal lead zirconate titanate thin film

2003 ◽  
Vol 82 (13) ◽  
pp. 2130-2132 ◽  
Author(s):  
Desheng Fu ◽  
Kazuyuki Suzuki ◽  
Kazumi Kato ◽  
Hisao Suzuki
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Titanate Thin Film
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