Bow Actuator: Low Voltage Switching in Electrostatically Actuated Bistable Beams

2018 ◽  
Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov
Keyword(s):  
Low Voltage ◽  
Electrostatic Force ◽  
Initial Configuration ◽  
Transverse Loading ◽  
Reduced Order ◽  
Zero Force ◽  
Electrostatically Actuated ◽  
Sudden Release ◽  
Direction Opposite ◽  
Voltage Switching

Curved bistable beams subjected to transverse loading may exhibit latching, namely remain in their buckled state under zero force. Under such circumstances, an opposite force is required for snapping-back (release) of the beam to its initial configuration. For an electrostatically actuated beam, two electrodes located at either side of the beam may therefore be required for bidirectional actuation. In this study, a new snapping and release procedures, are considered. The approach involves the preloading of the beam using an electrostatic force in the direction opposite to the beam desired movement, followed by a sudden release of the voltage. We show, by means of a reduced order (RO) model, resulting from the Galerkin decomposition, that such an actuation paradigm can not only be used to release a beam from its latched position, but can also create a snap-through response at a significantly low voltage.

Reduced Order Model of MEMS Sensors Near Natural Frequency

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Jose C. Solis Silva
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator sensor for mass detection is investigated. The excitation is near the natural frequency. A first order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for uniform microresonators with mass deposition and without are reported.

Reduced Order Model for MEMS Cantilever Resonators Under Soft AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

Nonlinear Dynamics of MEMS Arches

2010 ◽  
Author(s):  
Sami Alkharabsheh ◽  
Mohammad Younis
Keyword(s):  
Electrostatic Force ◽  
Equations Of Motion ◽  
Amplitude Dependence ◽  
Harmonic Load ◽  
Order Model ◽  
Shooting Technique ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Dynamic Phenomena ◽  
Unstable States

In this paper, the dynamic response of electrostatically actuated clamped-clamped arch microbeam is investigated when excited by a DC load superimposed to an AC harmonic load. The dynamic analysis is carried out using a Galerkin-based reduced order model along with a shooting technique to find periodic motions and analyzing its stability using a Floquet theory. Results are presented for the cases of primary and super harmonic resonances. We found several nonlinear dynamic phenomena due to the inherent nonlinear electrostatic force and geometric nonlinearity of the arch. These include frequency-amplitude dependence, jumps, tangent bifurcations, coexistence of solutions, and softening and hardening behaviors. The shooting technique showed high robustness in capturing both the stable and unstable states of the system. Hence, it helped clarify vague behaviors that were previously reported using longtime integration of the equations of motion.

Reduced Order Model on DC Bias Effect on the Frequency Response of Electrostatically Actuated Biosensor Microplates

2016 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Alternate Current ◽  
Reduced Order Model ◽  
Order Model ◽  
Bias Effect ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Ground Plate ◽  
Dc Bias

This paper investigates the frequency response of microplates under electrostatic actuation. The microplate is parallel to a fixed ground plate. The electrostatic force that actuates the system is given by both Alternate Current (AC) and Direct Current (DC) voltages. The AC frequency is set to be near half natural frequency of the structure. Damping influence is also investigated in this paper. The method of investigation is Reduced Order Model. The effects of various parameters on the response of the structure are reported.

Symmetry Breaking in an Initially Curved Micro Beam Loaded by a Distributed Electrostatic Force

2012 ◽  
Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov
Keyword(s):  
Symmetry Breaking ◽  
Degrees Of Freedom ◽  
Electrostatic Force ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Straight Beam ◽  
Base Functions ◽  
Approximate Expressions ◽  
Symmetric Response ◽  
Good Agreement

The asymmetric buckling of a shallow initially curved stress-free micro beam subjected to distributed nonlinear deflection-dependent electrostatic force is studied. The analysis is based on a two degrees of freedom reduced order (RO) model, resulting from the Galerkin decomposition with linear undamped eigen-modes of a straight beam used as the base functions. Simple approximate expressions are derived defining the geometric parameters of beams for which an asymmetric response bifurcates from the symmetric one. The necessary criterion establishes the conditions for the appearance of bifurcation points on the unstable branch of the symmetric response curve; the sufficient criterion assures a realistic asymmetric buckling bifurcating from the stable branches of the curve. It is shown that while the symmetry breaking conditions are affected by the nonlinearity of the electrostatic force, its influence is less pronounced than in the case of the symmetric snap-through criterion. A comparison between the RO model results and those obtained by direct numerical analysis shows good agreement between the two and indicates that the obtained criteria can be used to predict non-symmetric buckling in electrostatically actuated bistable micro beams.

Reduced Order Model of CNT Cantilever Resonators Under AC Voltage Near Half Natural Frequency

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Le Luo
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Damping Force ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Carbon Nano Tubes ◽  
Ground Plate

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model method. The system consists of a CNT parallel to a ground plate. An alternating current (AC) voltage is considered between the two. The CNT undergoes an oscillatory motion due to the electrostatic force generated by the voltage. Another two forces act on the CNT, namely a damping force, and a van der Waals force due to gaps less than 50 nm. The Method of Multiple Scales (MMS) and the Reduced Order Model (ROM) method (using AUTO solver) are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency response is found in the case of AC near half natural frequency.

Limit Points Behavior in Electrostatically Actuated Initially Curved Micro Plate

2016 ◽  
Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov
Keyword(s):  
Degrees Of Freedom ◽  
Mechanical Load ◽  
Electrostatic Force ◽  
Equilibrium Path ◽  
Buckling Modes ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Base Functions ◽  
Three Degrees Of Freedom ◽  
Good Agreement

The axisymmetric snap-through of an initially curved circular micro plate, subjected to a transversal distributed electrostatic force is studied. The analysis is based on a reduced order (RO) model resulting from the Galerkin decomposition, with buckling modes of a flat plate used as the base functions. In order to check the validity of the RO model, the corresponding problem for a displacement-independent (“mechanical”) load is solved, and a comparison between the RO model and those obtained using finite elements (FE) analysis is carried out. It is shown, that the two are in good agreement, indicating that the RO model can be used for a plate undergoing electrostatic loading. However, the study shows that at least three degrees of freedom (DOF) are required for an accurate prediction of the equilibrium path and bistability. The coupled electromechanical analysis shows that due to the nonlinearity of the electrostatic load, the snap-through occurs at a lower displacement than in the case of the “mechanical” load. Moreover, the study concludes that actuation of plates of realistic dimensions can be achieved by reasonably low voltages.

ON NONLINEAR RESPONSE NEAR-HALF NATURAL FREQUENCY OF ELECTROSTATICALLY ACTUATED MICRORESONATORS

2011 ◽  
Vol 11 (04) ◽  
pp. 641-672 ◽  
Author(s):  
DUMITRU I. CARUNTU ◽  
MARTIN KNECHT
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated ◽  
Fringe Effect

This paper deals with the nonlinear response of electrostatically actuated cantilever beam microresonators near-half natural frequency. A first-order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. Both forces, electrostatic and Casimir, are nonlinear. The dynamics of the resonator is investigated using the method of multiple scales (MMS) in a direct approach of the problem. The reduced order model (ROM) method, based on Galerkin procedure, is used as well. Steady-state motions are found. Numerical simulations are conducted for uniform microresonators. The influences of damping, actuation, and fringe effect on the resonator response are found.

Voltage Response of Parametric Resonance of MEMS Circular Plates Under Hard Excitations

2019 ◽  
Author(s):  
Julio S. Beatriz ◽  
Dumitru I. Caruntu
Keyword(s):  
Parametric Resonance ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Voltage Response ◽  
Circular Plates ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Modes Of Vibration

Abstract This work deals with the voltage response of parametric resonance of electrostatically actuated microelectromechanical (MEMS) circular plates under hard excitations. Method of Multiple Scales (MMS) and Reduced Order Model (ROM) method using two modes of vibration are used to predict the voltage-amplitude response of the MEMS circular plates. ROM is solved using AUTO 07p, a software package for continuation and bifurcation. MMS used in this paper has one term in the electrostatic force being considered significant. This is the way MMS is used to model hard excitations. MMS shows results similar to those of ROM at lower amplitudes and lower voltages. The differences between the two methods, MMS and ROM, are significant in high amplitudes for all voltages, and the differences are significant in all amplitudes for larger voltages. Significant differences can be noted in the effect of different parameters such as the detuning frequency and damping on the voltage response. ROM AUTO 07p is calibrated using ROM time responses in which the ROM is solved using the solver ode15s in Matlab.

Reduced Order Model of Frequency Response of Superharmonic Resonance of Electrostatically Actuated MEMS Resonators

2015 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes
Keyword(s):  
Frequency Response ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
Superharmonic Resonance ◽  
Electrostatically Actuated ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Ground Plate

This paper deals with superharmonic resonance of electrostatically actuated MEMS resonator sensors. The system consists of a MEMS cantilever on top of a parallel ground plate. An AC voltage of frequency near one fourth the natural frequency of the resonator provides the electrostatic force of actuation. The frequency response of the superharmonic resonance of the structure is investigated using two term Reduced Order Model (ROM) method.

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