Symmetry Breaking in an Initially Curved Micro Beam Loaded by a Distributed Electrostatic Force

Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov

The asymmetric buckling of a shallow initially curved stress-free micro beam subjected to distributed nonlinear deflection-dependent electrostatic force is studied. The analysis is based on a two degrees of freedom reduced order (RO) model, resulting from the Galerkin decomposition with linear undamped eigen-modes of a straight beam used as the base functions. Simple approximate expressions are derived defining the geometric parameters of beams for which an asymmetric response bifurcates from the symmetric one. The necessary criterion establishes the conditions for the appearance of bifurcation points on the unstable branch of the symmetric response curve; the sufficient criterion assures a realistic asymmetric buckling bifurcating from the stable branches of the curve. It is shown that while the symmetry breaking conditions are affected by the nonlinearity of the electrostatic force, its influence is less pronounced than in the case of the symmetric snap-through criterion. A comparison between the RO model results and those obtained by direct numerical analysis shows good agreement between the two and indicates that the obtained criteria can be used to predict non-symmetric buckling in electrostatically actuated bistable micro beams.

Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov

Curved beams subjected to transverse force may exhibit a latching phenomena, namely remain in their buckled configuration under zero force such that an opposite force is required for their release. In this study, we investigate the latching in bistable electrostatically actuated prestressed curved beams. The analysis is based on a reduced order (RO) model resulting from the Galerkin decomposition with buckling modes of a straight beam as base functions. Criteria for the existence of latching are derived in terms of the beam geometric parameters and the axial load. Two conditions are formulated: A necessary criterion establishes the appearance of latching on the symmetric response curve and a sufficient condition which assures the existence of latching in the presence of bifurcations. A comparison between the model results and those obtained by numerical analysis shows good agreement up to a certain elevation. It is noted that as the latching is not affected by the nonlinear electrostatic load, the obtained criteria stand for all types of loading.


Author(s):  
Lior Medina ◽  
Rivka Gilat ◽  
Slava Krylov

The axisymmetric snap-through of an initially curved circular micro plate, subjected to a transversal distributed electrostatic force is studied. The analysis is based on a reduced order (RO) model resulting from the Galerkin decomposition, with buckling modes of a flat plate used as the base functions. In order to check the validity of the RO model, the corresponding problem for a displacement-independent (“mechanical”) load is solved, and a comparison between the RO model and those obtained using finite elements (FE) analysis is carried out. It is shown, that the two are in good agreement, indicating that the RO model can be used for a plate undergoing electrostatic loading. However, the study shows that at least three degrees of freedom (DOF) are required for an accurate prediction of the equilibrium path and bistability. The coupled electromechanical analysis shows that due to the nonlinearity of the electrostatic load, the snap-through occurs at a lower displacement than in the case of the “mechanical” load. Moreover, the study concludes that actuation of plates of realistic dimensions can be achieved by reasonably low voltages.


2021 ◽  
Author(s):  
Lior Medina ◽  
Ashwin A. Seshia

Abstract A limit point behaviour analysis of a metastructure, composed of two double clamped, initially curved beams, coupled via a rigid truss at their respective centres, is carried out when subjected to a distributed electrostatic load. The analysis is based on a reduced order (RO) model resulting from Galerkin’s decomposition, with symmetric buckling modes taken as the base functions, for either beam. All solutions employed the implicit arc-length “Riks” method to accommodate for winding equilibrium paths, while validation of the said results were carried out against finite differences (FD) direct solutions. In addition, local stability analysis via the energy method, conducted on the primary beam was instrumental in clarifying the role of the various extremum points by characterising which branches are stable, and which are not. The combined analysis has shown that the driving beam, which directly encounters the load, is able to possess bistable as well as tristable properties, provided that the metastructure meets certain geometrical parameters. Several variations of tristability are disclosed in the study. The analysis indicates that a model with at least three degrees of freedom (DOF) is needed to predict such configurations, as well as the various critical thresholds, with reasonable errors of around one percent when compared against FD. In so doing, the model can be used to provide static characterisation of the structure.


Author(s):  
Dumitru I. Caruntu ◽  
Jose C. Solis Silva

The nonlinear response of an electrostatically actuated cantilever beam microresonator sensor for mass detection is investigated. The excitation is near the natural frequency. A first order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for uniform microresonators with mass deposition and without are reported.


2015 ◽  
Vol 82 (9) ◽  
Author(s):  
X. Chen ◽  
S. A. Meguid

In this paper, we investigate the asymmetric bifurcation behavior of an initially curved nanobeam accounting for Lorentz and electrostatic forces. The beam model was developed in the framework of Euler–Bernoulli beam theory, and the surface effects at the nanoscale were taken into account in the model by including the surface elasticity and the residual surface tension. Based on the Galerkin decomposition method, the model was simplified as two degrees of freedom reduced order model, from which the symmetry breaking criterion was derived. The results of our work reveal the significant surface effects on the symmetry breaking criterion for the considered nanobeam.


Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).


Author(s):  
Sami Alkharabsheh ◽  
Mohammad Younis

In this paper, the dynamic response of electrostatically actuated clamped-clamped arch microbeam is investigated when excited by a DC load superimposed to an AC harmonic load. The dynamic analysis is carried out using a Galerkin-based reduced order model along with a shooting technique to find periodic motions and analyzing its stability using a Floquet theory. Results are presented for the cases of primary and super harmonic resonances. We found several nonlinear dynamic phenomena due to the inherent nonlinear electrostatic force and geometric nonlinearity of the arch. These include frequency-amplitude dependence, jumps, tangent bifurcations, coexistence of solutions, and softening and hardening behaviors. The shooting technique showed high robustness in capturing both the stable and unstable states of the system. Hence, it helped clarify vague behaviors that were previously reported using longtime integration of the equations of motion.


Author(s):  
Dumitru I. Caruntu ◽  
Christian Reyes

This paper investigates the frequency response of microplates under electrostatic actuation. The microplate is parallel to a fixed ground plate. The electrostatic force that actuates the system is given by both Alternate Current (AC) and Direct Current (DC) voltages. The AC frequency is set to be near half natural frequency of the structure. Damping influence is also investigated in this paper. The method of investigation is Reduced Order Model. The effects of various parameters on the response of the structure are reported.


Author(s):  
Dumitru I. Caruntu ◽  
Le Luo

This paper deals with electrostatically actuated Carbon Nano-Tubes (CNT) cantilevers using Reduced Order Model method. The system consists of a CNT parallel to a ground plate. An alternating current (AC) voltage is considered between the two. The CNT undergoes an oscillatory motion due to the electrostatic force generated by the voltage. Another two forces act on the CNT, namely a damping force, and a van der Waals force due to gaps less than 50 nm. The Method of Multiple Scales (MMS) and the Reduced Order Model (ROM) method (using AUTO solver) are used to investigate the system under soft excitations and/or weak nonlinearities. The frequency response is found in the case of AC near half natural frequency.


Author(s):  
Hassen M. Ouakad

In this paper, we present an investigation of the static behavior of a doubly-clamped microbeam actuated electrically through out-of-plane electrostatic fringing-fields. The distributed electrostatic force is caused by the asymmetry of the fringing-fields. This is actually due to the out-of-plane asymmetry of the beam and its two actuating stationary electrodes. The electric force was approximated by means of fitting the results of two-dimensional numerical solution of the electrostatic problem using Finite-Element Method (FEM). Then, a reduced-order model (ROM) was built using the Galerkin decomposition with linear undamped modes of a clamped-clamped beam as base functions. The ROM equations are solved numerically to get the static response of the considered micro-actuator when actuated by a DC load. Results shows possibility of having three different regimes for this particular MEMS device: a bending regime, a catenary regime, and an elastic regime. Eigenvalue problem is then solved to get the variation of the fundamental natural frequency when the system is deflected by a DC load. Results show that controlling the microbeam stroke, with a DC voltage on the gate electrodes, enables us to tune the system frequency, resulting in a possibility of a tunable MEMS device without a pull-in scenario.


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