Simulation of Nanomanipulation Using Compliance-Based Contact Dynamics Modeling Technique
This paper describes dynamics modeling and simulation of AFM-based manipulation of a nano-scale object using the compliance-based contact dynamics modeling technique (also referred to as the penalty method). Such a modeling technique has been well developed and widely applied in macro-scale applications. Its applicability to nano-scale cases is, however, relatively new and thus, requires more investigation. The dynamics model developed in the paper includes the Van der Waals forces, electrostatic forces, contact forces (for modeling repulsion), and friction forces with consideration of contact geometry, stiffness, and friction properties of all the physically interacting objects. The model can simulate the dynamic behavior of interactions between nano-scale objects and its environment. For demonstration, the dynamic simulation results of an AFM-based manipulation process are presented. To provide confidence of the model fidelity, a simulation example which matches some published data is presented.